KR980005352U - Photoresist removing device for semiconductor manufacturing process - Google Patents

Photoresist removing device for semiconductor manufacturing process

Info

Publication number
KR980005352U
KR980005352U KR2019960015554U KR19960015554U KR980005352U KR 980005352 U KR980005352 U KR 980005352U KR 2019960015554 U KR2019960015554 U KR 2019960015554U KR 19960015554 U KR19960015554 U KR 19960015554U KR 980005352 U KR980005352 U KR 980005352U
Authority
KR
South Korea
Prior art keywords
manufacturing process
semiconductor manufacturing
removing device
photoresist removing
photoresist
Prior art date
Application number
KR2019960015554U
Other languages
Korean (ko)
Other versions
KR200277176Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960015554U priority Critical patent/KR200277176Y1/en
Publication of KR980005352U publication Critical patent/KR980005352U/en
Application granted granted Critical
Publication of KR200277176Y1 publication Critical patent/KR200277176Y1/en

Links

KR2019960015554U 1996-06-12 1996-06-12 Photoresist removal device for semiconductor manufacturing process KR200277176Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960015554U KR200277176Y1 (en) 1996-06-12 1996-06-12 Photoresist removal device for semiconductor manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960015554U KR200277176Y1 (en) 1996-06-12 1996-06-12 Photoresist removal device for semiconductor manufacturing process

Publications (2)

Publication Number Publication Date
KR980005352U true KR980005352U (en) 1998-03-30
KR200277176Y1 KR200277176Y1 (en) 2002-11-07

Family

ID=60839863

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960015554U KR200277176Y1 (en) 1996-06-12 1996-06-12 Photoresist removal device for semiconductor manufacturing process

Country Status (1)

Country Link
KR (1) KR200277176Y1 (en)

Also Published As

Publication number Publication date
KR200277176Y1 (en) 2002-11-07

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Legal Events

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20070419

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee