KR980005326U - 히터챔버 온도제어장치 - Google Patents
히터챔버 온도제어장치Info
- Publication number
- KR980005326U KR980005326U KR2019960017395U KR19960017395U KR980005326U KR 980005326 U KR980005326 U KR 980005326U KR 2019960017395 U KR2019960017395 U KR 2019960017395U KR 19960017395 U KR19960017395 U KR 19960017395U KR 980005326 U KR980005326 U KR 980005326U
- Authority
- KR
- South Korea
- Prior art keywords
- temperature controller
- chamber temperature
- heater chamber
- heater
- controller
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960017395U KR980005326U (ko) | 1996-06-25 | 1996-06-25 | 히터챔버 온도제어장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960017395U KR980005326U (ko) | 1996-06-25 | 1996-06-25 | 히터챔버 온도제어장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005326U true KR980005326U (ko) | 1998-03-30 |
Family
ID=60927178
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960017395U KR980005326U (ko) | 1996-06-25 | 1996-06-25 | 히터챔버 온도제어장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005326U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100711265B1 (ko) * | 2005-08-16 | 2007-04-25 | 삼성전자주식회사 | 메모리소자 테스트 시스템 및 챔버의 온도제어방법 |
-
1996
- 1996-06-25 KR KR2019960017395U patent/KR980005326U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100711265B1 (ko) * | 2005-08-16 | 2007-04-25 | 삼성전자주식회사 | 메모리소자 테스트 시스템 및 챔버의 온도제어방법 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |