KR980005149A - Dual part exposure device - Google Patents

Dual part exposure device Download PDF

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Publication number
KR980005149A
KR980005149A KR1019960021090A KR19960021090A KR980005149A KR 980005149 A KR980005149 A KR 980005149A KR 1019960021090 A KR1019960021090 A KR 1019960021090A KR 19960021090 A KR19960021090 A KR 19960021090A KR 980005149 A KR980005149 A KR 980005149A
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KR
South Korea
Prior art keywords
panel
exposure
light
double
pair
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Application number
KR1019960021090A
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Korean (ko)
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KR100225433B1 (en
Inventor
천병욱
Original Assignee
엄길용
오리온전기 주식회사
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Priority to KR1019960021090A priority Critical patent/KR100225433B1/en
Publication of KR980005149A publication Critical patent/KR980005149A/en
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Publication of KR100225433B1 publication Critical patent/KR100225433B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/22—Applying luminescent coatings
    • H01J9/227—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
    • H01J9/2271—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines by photographic processes
    • H01J9/2272—Devices for carrying out the processes, e.g. light houses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

본 발명은 노광시 판넬에 대해 광효율을 증대시키고, 노광시간을 단축시키기 위해 이중으로 부분 노광시키는 이중부분 노광장치에 관한 것이다. 이러한 장치는 노광장치의 내부 저면에 설치되며, 판넬의 내면을 이중으로 부분 노광시키기 위해 요동장치에 의해 서로 요동하면서 광을 입사시키는 한 쌍의 노광수단; 보정렌즈의 상부에 설치되며, 한 쌍의 노광수단의 요동과 연동해서 이동하여 광량을 조절하도록 하는 소정 형상의 한 쌍의 개구부가 형성된 이중광량조절부를 구비한다. 이상과 같은 장치에 의하여 판넬 내면을 분할하여 이중으로 부분 노광시킴으로써, 광효율을 증대시키고, 전면 노광 방식에 비해 노광 시간을 단축시켜 작업의 효율성을 높일 수 있는 효과가 있다.The present invention relates to a double part exposure apparatus for partially partial exposure to increase the light efficiency for the panel during exposure and to shorten the exposure time. Such an apparatus includes: a pair of exposure means installed on an inner bottom surface of an exposure apparatus, the light injecting while oscillating with each other by a swinging device to partially partially expose the inner surface of the panel; It is provided on the upper portion of the correction lens, and provided with a double light amount control unit having a pair of openings of a predetermined shape to move in conjunction with the swing of the pair of exposure means to adjust the amount of light. By dividing the inner surface of the panel by the above apparatus and partially partially exposing the panel, the light efficiency can be increased, and the exposure time can be shortened as compared with the front exposure method, thereby increasing the work efficiency.

Description

이중부분 노광장치Dual part exposure device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도의 (a)는 본 발명에 의한 칼라음극선관 이중부분 노광장치의 실시예의 설명도이고, (b)는 본 발명에 의한 칼라음극선관의 이중부분 노광방법에 대한 실시예시도.2A is an explanatory diagram of an embodiment of the color cathode ray tube double-portion exposure apparatus according to the present invention, and (b) is an exemplary embodiment of the double-part exposure method of the color cathode ray tube according to the present invention.

Claims (6)

광원부(18)의 광이 요동장치(26)에 의해 요동하면서 보정렌즈(15)와 셔터(14)의 개구부(14a)를 통과하고 새도우마스크(12)의 개공부를 통해 판넬(11) 내면에 도포된 막을 소정의 배열 구조로 노광시키기 위한 칼라음극선관의 형광면 노광장치(10)에 있어서; 상기 노광장치(10)의 내부 저면에 설치되며, 상기 판넬(11)의 내면을 이중으로 부분 노광시키기 위해 상기 요동장치(26)에 의해 서로 요동하면서 광을 입사시키는 한 쌍의 노광수단(20a, 20b); 상기 보정렌즈(15)의 상부에 설치되며, 상기 한 쌍의 노광수단(20a, 20b)의 요동과 연동해서 이동하여 광량을 조절하도록 하는 소정 형상의 한쌍의 개구부(28a, 28b)가 형성된 이중광량조절부(28)를 구비하는 것을 특징으로 하는 이중 부분 노광장치.The light of the light source unit 18 is oscillated by the rocking device 26, passes through the correction lens 15 and the opening 14a of the shutter 14, and passes through the opening of the shadow mask 12 to the inner surface of the panel 11. A fluorescent surface exposure apparatus 10 of a color cathode ray tube for exposing a coated film to a predetermined arrangement structure; A pair of exposure means 20a installed on an inner bottom surface of the exposure apparatus 10 and allowing light to be incident upon each other by the swinging device 26 to partially expose the inner surface of the panel 11 in a double manner; 20b); Double light amount provided on the correction lens 15, a pair of openings (28a, 28b) of a predetermined shape to move in conjunction with the swing of the pair of exposure means (20a, 20b) to adjust the amount of light Dual part exposure apparatus, characterized in that it comprises an adjustment unit (28). 제1항에 있어서, 상기 한 쌍의 노광수단(20a, 20b)은 상기 판넬(11) 중심부와 그커트부(11a, 11b) 사이를 요동하면서 경사지면서 이중으로 부분 노광을 시키도록 각각 독립된 2개의 이중광원부(20a, 20b)를 평행한 2축 방향으로 구비하는 것을 특징으로 하는 이중 부분 노광장치.The method of claim 1, wherein the pair of exposure means (20a, 20b) are two independent of each of the two to be partially exposed to the inclination while inclined while swinging between the center of the panel 11 and the cut portions (11a, 11b) A double partial exposure apparatus characterized by comprising double light source portions (20a, 20b) in parallel biaxial directions. 제1항에 있어서, 상기 이중광량조절부(28)는 상기 한 쌍의 노광수단(20a, 20b) 각각의 요동과 연동해서 그 각각의 직경 방향과 평행하며, 상기 이중광량조절부(28)의 장변측에 평행하게 구비되어 단변측의 길이에 걸쳐 이동되어서 상기 판넬(11)에 대해 입사되는 광량을 조절하도록 하는 2개의 셔터개구부(28a,28b)가 형성된 이중셔텨부(28)인 것을 특징으로 하는 이중 부분 노광장치.2. The dual light quantity adjusting unit 28 according to claim 1, wherein the double light quantity adjusting unit 28 is parallel to its respective radial direction in association with the fluctuation of each of the pair of exposure means 20a and 20b. And a double shutter portion 28 having two shutter openings 28a and 28b which are provided parallel to the long side and move over the length of the short side to adjust the amount of light incident on the panel 11. Dual part exposure apparatus. 광원부의 광이 요동장치(26)에 의해 요동하면서 보정렌즈(15)와 셔터개구부(14a)를 통과하고, 새도우마스크(12)의 개공부를 통해 판넬(11) 내면에 도포된 막을 소정의 배열 구조로 노광시키기 위한 칼라음극선관의 형광면 부분 노광 방법에 있어서: 노광시 광효율을 증대시키기 위해 상기 판넬(11)에 대해 각각 독립된 한 쌍의 광원부(20a, 20b)를 상기 요동장치(26)에 의해 서로 요동시키며, 그 요동과 연도해서 이중셔터부(28)의 셔터개구부(28a, 28b)를 이동시킴으로써 상기 판넬(11)의 내면을 분할하여 이중으로 부분 노광시키는 이중 부분 노광방법.The light of the light source portion passes through the correcting lens 15 and the shutter opening portion 14a while being shaken by the rocking device 26, and the film coated on the inner surface of the panel 11 through the opening portion of the shadow mask 12 is arranged in a predetermined arrangement. A method for exposing a fluorescent surface portion of a color cathode ray tube for exposing with a structure, comprising: a pair of light source portions 20a and 20b respectively independent of the panel 11 by the swinging device 26 so as to increase light efficiency during exposure. A double partial exposure method which causes the inner surface of the panel (11) to be divided and partially exposed by moving each other by oscillating with each other, and moving the shutter openings (28a, 28b) of the double shutter portion (28) in conjunction with the swing. 제4항에 있어서, 상기 한 쌍의 광원부(20a, 20b)의 광축이 서로 평행을 유지하면서 요동함으로서 어느 하나의 광원부(20a)에 의해 하나의 셔터개구부(28a)를 통해 파넬(11)의 일측 스커트부(11a)에서 중심부로 부분 노광이 진행되고, 다른 하나의 광원부(20b)에 의해서는 다른 하나의 셔터개구부(28b)를 통해 판넬(11)의 중심부에서 타측 스커트부(11b)로 부분 노광이 진행되는 것을 특징으로하는 이중 부분 노광 방법.5. The side of the panel 11 according to claim 4, wherein the optical axes of the pair of light source units 20a and 20b are oscillated while being parallel to each other, by one light source unit 20a through one shutter opening 28a. Partial exposure proceeds from the skirt portion 11a to the center portion, and the partial light exposure from the center portion of the panel 11 to the other skirt portion 11b through the other shutter opening portion 28b by the other light source portion 20b. The double partial exposure method characterized by the above-mentioned. 제5항에 있어서, 상기 한쌍의 광원부(20a, 20b)의 광축이 서로 평행을 유지하면서 요동함으로써 어느 하나의 광원부(20a)에 의해 하나의 셔터개구부(28a)를 통해, 판넬(11)의 중심부에서일측 스커트부(11a)로 부분 노광이 진행되고, 다른 하나의 광원부(20b)에 의해서는 다른 하나의 셔터개구부(28b)를 통해 판넬(11)의 타측 스커트부(11b)에서 중심부로 부분 노광이 진행되는 것을 특징으로 하는 이중부분 노광방법.The center of the panel 11 according to claim 5, wherein the optical axes of the pair of light source parts 20a and 20b are oscillated while being parallel to each other, through one shutter opening 28a by any one of the light source parts 20a. Partial exposure proceeds to one side skirt portion 11a, and the other portion is partially exposed from the other skirt portion 11b of panel 11 to the center through another shutter opening portion 28b by another light source portion 20b. The double-part exposure method, characterized in that the progress. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960021090A 1996-06-12 1996-06-12 Double exposing device KR100225433B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960021090A KR100225433B1 (en) 1996-06-12 1996-06-12 Double exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960021090A KR100225433B1 (en) 1996-06-12 1996-06-12 Double exposing device

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KR980005149A true KR980005149A (en) 1998-03-30
KR100225433B1 KR100225433B1 (en) 1999-10-15

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KR1019960021090A KR100225433B1 (en) 1996-06-12 1996-06-12 Double exposing device

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KR100225433B1 (en) 1999-10-15

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