KR980002919U - 산화물 코팅 장치 - Google Patents

산화물 코팅 장치

Info

Publication number
KR980002919U
KR980002919U KR2019960018745U KR19960018745U KR980002919U KR 980002919 U KR980002919 U KR 980002919U KR 2019960018745 U KR2019960018745 U KR 2019960018745U KR 19960018745 U KR19960018745 U KR 19960018745U KR 980002919 U KR980002919 U KR 980002919U
Authority
KR
South Korea
Prior art keywords
coating device
oxide coating
oxide
coating
Prior art date
Application number
KR2019960018745U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960018745U priority Critical patent/KR980002919U/ko
Priority to KR1019970026693A priority patent/KR100463754B1/ko
Publication of KR980002919U publication Critical patent/KR980002919U/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019960018745U 1996-06-29 1996-06-29 산화물 코팅 장치 KR980002919U (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR2019960018745U KR980002919U (ko) 1996-06-29 1996-06-29 산화물 코팅 장치
KR1019970026693A KR100463754B1 (ko) 1996-06-29 1997-06-24 Ito 유리의 제조방법 및 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960018745U KR980002919U (ko) 1996-06-29 1996-06-29 산화물 코팅 장치

Publications (1)

Publication Number Publication Date
KR980002919U true KR980002919U (ko) 1998-03-30

Family

ID=37302754

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960018745U KR980002919U (ko) 1996-06-29 1996-06-29 산화물 코팅 장치

Country Status (1)

Country Link
KR (1) KR980002919U (ko)

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