KR980002313A - Silicon film deposition method - Google Patents

Silicon film deposition method Download PDF

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Publication number
KR980002313A
KR980002313A KR1019960023918A KR19960023918A KR980002313A KR 980002313 A KR980002313 A KR 980002313A KR 1019960023918 A KR1019960023918 A KR 1019960023918A KR 19960023918 A KR19960023918 A KR 19960023918A KR 980002313 A KR980002313 A KR 980002313A
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KR
South Korea
Prior art keywords
silicon film
glass
film deposition
depositing
deposited
Prior art date
Application number
KR1019960023918A
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Korean (ko)
Inventor
임유동
김종영
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960023918A priority Critical patent/KR980002313A/en
Publication of KR980002313A publication Critical patent/KR980002313A/en

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Abstract

박민증착장치의 유리류의 사용주기 및 수명을 연장시킬 수 있는 실리콘막의 증착방법에 관하여 개시한다. 본 발명은 박막증착장치의 내부 튜브(inner tube), 외부 튜브(outer tube) 밑 보트(boat)의 유리류 상에 실리콘막을 증착하는 실리콘막의 증착방법에 있어서, 상기 실리콘막을 증착하기 전에 상기 유리류 상에 질화막을 형성하여 상기 유리류의 열적 스트레스를 방지하는 것을 특징으로 하는 실리콘막의 증착방법을 제공한다. 본 발명은 박막증착장치에 이용되는 유리류 상에 질화막을 먼저 증착한 다음 실리콘막을 증착함으로써, 유리류의 열적 스트레스로 인한 사용주기 및 수명 감소를 방지할 수 있다.Disclosed is a method of depositing a silicon film capable of extending the service life and lifespan of glass in a thin film deposition apparatus. The present invention provides a method for depositing a silicon film on glass of a boat under an inner tube and an outer tube of a thin film deposition apparatus, wherein the glass is deposited before depositing the silicon film. It provides a silicon film deposition method to form a nitride film on the surface to prevent the thermal stress of the glass. According to the present invention, the nitride film is first deposited on the glass used in the thin film deposition apparatus and then the silicon film is deposited, thereby reducing the life cycle and lifespan caused by the thermal stress of the glass.

Description

실리콘막의 증착방법Silicon film deposition method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (1)

박막증착장치의 내부 튜브(inner tube), 외부 튜브(outer tube) 및 보트(boat)의 유리류 상에 실리콘막을 증착하는 실리콘막의 중착방법에 있어서, 상기 실리콘막을 증착하기 전에 상기 유리류 상에 질화막을 형성하여상기 유리류의 열적 스트레스를 방지하는 것을 특징으로 하는 실리콘막의 증착방법.A method of depositing a silicon film on an inner tube, an outer tube and a glass of a boat in a thin film deposition apparatus, the method of depositing a silicon film, wherein the nitride film is deposited on the glass before depositing the silicon film. Forming a silicon film deposition method characterized in that to prevent the thermal stress of the glass. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960023918A 1996-06-26 1996-06-26 Silicon film deposition method KR980002313A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960023918A KR980002313A (en) 1996-06-26 1996-06-26 Silicon film deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960023918A KR980002313A (en) 1996-06-26 1996-06-26 Silicon film deposition method

Publications (1)

Publication Number Publication Date
KR980002313A true KR980002313A (en) 1998-03-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960023918A KR980002313A (en) 1996-06-26 1996-06-26 Silicon film deposition method

Country Status (1)

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KR (1) KR980002313A (en)

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