KR970703795A - AIR FILTER, METHOD OF MANUFACTURING AIR FILTER, LOCAL FACILITY, CLEAN ROOM, TREATING AGENT, AND METHOD OF MANUFACTURING FILTER MEDIUM - Google Patents

AIR FILTER, METHOD OF MANUFACTURING AIR FILTER, LOCAL FACILITY, CLEAN ROOM, TREATING AGENT, AND METHOD OF MANUFACTURING FILTER MEDIUM Download PDF

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KR970703795A
KR970703795A KR1019960707515A KR19960707515A KR970703795A KR 970703795 A KR970703795 A KR 970703795A KR 1019960707515 A KR1019960707515 A KR 1019960707515A KR 19960707515 A KR19960707515 A KR 19960707515A KR 970703795 A KR970703795 A KR 970703795A
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filter
agent
air filter
air
main component
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KR1019960707515A
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Korean (ko)
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KR100240264B1 (en
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사다오 고바야시
마사유키 이마후쿠
요시히데 와카야마
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야마모토 효조
다이세이 겐세쓰 가부시키가이샤
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Priority claimed from PCT/JP1996/002076 external-priority patent/WO1997004851A1/en
Publication of KR970703795A publication Critical patent/KR970703795A/en
Priority to KR1019997006371A priority Critical patent/KR100250936B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0001—Making filtering elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/10—Filter screens essentially made of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
    • B01D39/1607—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
    • B01D39/1623—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2003—Glass or glassy material
    • B01D39/2017—Glass or glassy material the material being filamentary or fibrous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B01D46/06—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material with means keeping the working surfaces flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
    • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
    • D04H1/42—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties characterised by the use of certain kinds of fibres insofar as this use has no preponderant influence on the consolidation of the fleece
    • D04H1/4209—Inorganic fibres
    • D04H1/4218—Glass fibres
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/02—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with hydrocarbons
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/10—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with compounds containing oxygen
    • D06M13/11—Compounds containing epoxy groups or precursors thereof
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/10—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with compounds containing oxygen
    • D06M13/144—Alcohols; Metal alcoholates
    • D06M13/148—Polyalcohols, e.g. glycerol or glucose
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/10—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with compounds containing oxygen
    • D06M13/224—Esters of carboxylic acids; Esters of carbonic acid
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/227—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of hydrocarbons, or reaction products thereof, e.g. afterhalogenated or sulfochlorinated
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/507—Polyesters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0414—Surface modifiers, e.g. comprising ion exchange groups
    • B01D2239/0428—Rendering the filter material hydrophobic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0457—Specific fire retardant or heat resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0464—Impregnants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0471—Surface coating material
    • B01D2239/0492—Surface coating material on fibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/0604—Arrangement of the fibres in the filtering material
    • B01D2239/0618—Non-woven
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/08—Special characteristics of binders
    • B01D2239/086—Binders between particles or fibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/10—Filtering material manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2271/00—Sealings for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2271/02—Gaskets, sealings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
    • B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories

Abstract

에어필터의 여과재, 및 이것과 프레임과의 사이를 밀봉하는 시일재로서, 사용시에 가스형태 유기물을 발생하지 않는 것을 이용한다. 구체적으로는, 섬유를 직물형상의 여과재로 형성하기 위한 처리제에 함유되는 비실리콘계 발수제로서, 탄소 수 19이하의 지방족 탄화수소를 함유하지 않는 합성 파라핀을 사용한다. 상기 처리제 및 시일제에 첨가하는 가소제로서 분자량 400이상인 카르본산 에스테르 등을, 산화방지제로서 분자량 300 이상의 페놀계 화합물을 사용한다. 이에 의해 크린룸 내나 반도체 제조장치 내 등에 가스형태 유기물을 존재시키지 않도록 할 수가 있다.As a filter material of an air filter and the sealing material which seals between this and a frame, what does not generate gaseous organic substance at the time of use is used. Specifically, synthetic paraffin containing no aliphatic hydrocarbons having 19 or less carbon atoms is used as the non-silicone water repellent agent contained in the treatment agent for forming the fibers into a woven filter material. A phenolic compound having a molecular weight of 300 or more is used as an antioxidant as a carboxylic acid ester having a molecular weight of 400 or more as a plasticizer to be added to the treating agent and the sealing agent. As a result, it is possible to prevent the gaseous organic substance from being present in the clean room or the semiconductor manufacturing apparatus.

또 상기 여과재 및 시일제를, 공기 중에 유기 인화합물 및 봉소화합물을 방출하지 않은 재료로 형성함으로써, 반도체 제조용으로서 특히 적합한 크린룸 및 국소 설비를 제공한다.In addition, the filter medium and the sealing agent are formed of a material which does not release organic phosphorus compounds and rod compounds in the air, thereby providing a clean room and a local facility particularly suitable for semiconductor manufacturing.

Description

에어필터, 에어필터의 제조방법, 국소설비, 크린룸, 처리제 및 여과재의 제조방법(AIRFILTER, METHOD OF MANUFACTURING AIR FILTER, LOCAL FACILITY, CLEAN ROOM, TREATING AGENT, AND METHOD OF MANUFACTURING FILTER MEDIUM)AIR FILTER, METHOD OF MANUFACTURING AIR FILTER, LOCAL FACILITY, CLEAN ROOM, TREATING AGENT, AND METHOD OF MANUFACTURING FILTER MEDIUM

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (38)

섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣은 프레임과, 이 프레임과 여과재의 사이를 밀봉하는 시일재로 구성되며, 공기 중의 부유입자형상물질을 포집하는 에어필터에 있어서, 상기 여과재 및 시일재 중 적어도 한쪽이 사용시에 가스형태 유기물을 방생하지 않는 것인 것을 특징으로 하는 에어필터.An air filter comprising a filter material formed by treating a fiber with a treatment agent and formed into a fabric shape, a frame in which the filter material is put, and a sealing material sealing between the frame and the filter material, wherein the air filter collects suspended particulate matter in the air. Air filter, characterized in that at least one of the filter medium and the sealing material does not generate gaseous organic substances when used. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 그 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일재로 구성되며, 공기중의 부유자입형상물질을 포집하는 에어필터에 있어서, 상기 처리제에 함유되는 비실리콘계 발수제의 주성분이, 탄소 수 20이상인 지방족 탄수화물 및 탄소 수 18이상인 고급 알콜 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.A filter comprising a filter material formed into a fabric shape by treating a fiber with a treatment agent, a frame in which the filter material is put, and a seal member sealing the space between the frame and the filter medium, wherein the air filter collects suspended particulate matter in the air. And the main component of the non-silicone water repellent agent contained in the treatment agent is at least one of aliphatic carbohydrates having 20 or more carbon atoms and higher alcohols having 18 or more carbon atoms. 제2항에 있어서, 상기 비실리콘계 발수제의 주성분은, 마이크로 크리스탈린왁스, 천연파라핀, 합성 파라핀, 폴리올레핀왁스, 탄소 수 18,20,24인 분기 알콜, 및 오레일알콜 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.The main component of the non-silicone water repellent is at least one of microcrystalline wax, natural paraffin, synthetic paraffin, polyolefin wax, branched alcohol having 18, 20, 24 carbon atoms, and oleyl alcohol. Air filter. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과제와의 사이를 밀봉하는 시일재로 구성되고, 공기 중의 부유입자형상물질을 포집하는 에어필터에 있어서, 상기 처리제에 함유되는 가소제의 주성분이, 분자량 400이상인 카르본산 에스테르, 폴리에스테르, 에폭시계 화합물 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.An air filter comprising a filter material formed by treating a fiber with a treating agent, a frame in which the filter material is put, and a sealing material sealing the space between the frame and the filter agent, and collecting airborne particulate matter in the air. The main component of the plasticizer contained in the said treating agent is at least any one of carboxylic acid ester, polyester, and an epoxy-type compound whose molecular weight is 400 or more. 제4항에 있어서, 상기 처리제에 함유되는 가소제의 주성분은, 후탈산이소노닐, 후탈산 옥틸데실, 후탈산 디이소데실, 후탈산 리우릴, 후타산 미리스티릴, 아제라인산 디-2-에틸헥실, 세바틴산 디-2-에틸헥실, 트리메릿트산 트리스-2-에틸헥실, 트리메릿트산 트리옥틱, 트리메릿트산 트리노닐, 트리메릿트산 트리데실, 아디핀산 또는 아제라인산 또는 세바 틴산 또는 후탈산과 글리콜 또는 글리세린과의 중축합에 의해 얻어지는 폴리에스테르, 에폭시 지방산 에스테르, 및 에폭시화유 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.The main component of the plasticizer contained in the said treating agent is isononyl futalate, octyldecyl futalate, diisodecyl futalate, urital futalate, myristyl futaate, di-2- aceline acid di-2- Ethylhexyl, di-2-ethylhexyl sebacate, tris-2-ethylhexyl trimeric acid, trimethic acid trioctic, trimethic acid trinonyl, trimethic acid tridecyl, adipic acid or azeline acid or sebacic acid or after At least one of polyester, epoxy fatty acid ester, and epoxidized oil obtained by polycondensation of deoxidation with glycol or glycerin. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일재로 구성되고, 공기 중의 부유입자 형상물질을 포집하는 에어필터에 있어서, 상기 처리제에 함유되는 산화지방제의 주성분이 분자량 300이상인 페놀계 화합물인 것을 특징으로 하는 에어필터.An air filter comprising a filter material formed by treating a fiber with a treating agent, a frame in which the filter material is put, and a seal material sealing the space between the frame and the filter material, and collecting suspended particulate matter in the air. An air filter, wherein the main component of the oxidizing fat agent contained in the treatment agent is a phenol compound having a molecular weight of 300 or more. 제6항에 있어서, 상기 처리제에 함유되는 산화방지제의 주성분은, 스테아릴- β-(3,5-디-t-부틸-4-히드록시페닐) 프로피오네이트, 2,2'-메틸렌-비스-(4-메틸-6-t-부틸페놀),2,2'-메티렌-비스-(4-에틸-6-t-부틸페놀), 4,4'-티오비스-(3-메틸-6-t-부틸페놀), 4,4'-부틸리덴-비스-(3-메틸-6-t-부틸페놀), 1,1,3-트리스-(2-메틸-4-히드록시-5-t-부틸페닐)부탄, 1,3,5-트리메틸-2,4,6-트리스-(3,5-디-t-부틸-4-히드록시베질)벤젠, 테트라키스(메틸렌-3-(3',5'-디-t-부틸-4'-히드록시페닐) 프로피오네이트)메탄, 비스-[3,3'-비스-(4'-히드록시-3'-t-부틸페닐)부틸릭크아시드]글리콜에스테르, 및 토코페놀 중 적어도 어느 하나인 것을 특징으로 하는 에어필더.The main component of the antioxidant contained in the said treating agent is stearyl-(beta)-(3, 5- di- t- butyl- 4-hydroxyphenyl) propionate, 2, 2'- methylene- Bis- (4-methyl-6-t-butylphenol), 2,2'-methylene-bis- (4-ethyl-6-t-butylphenol), 4,4'-thiobis- (3-methyl -6-t-butylphenol), 4,4'-butylidene-bis- (3-methyl-6-t-butylphenol), 1,1,3-tris- (2-methyl-4-hydroxy -5-t-butylphenyl) butane, 1,3,5-trimethyl-2,4,6-tris- (3,5-di-t-butyl-4-hydroxybenzyl) benzene, tetrakis (methylene- 3- (3 ', 5'-di-t-butyl-4'-hydroxyphenyl) propionate) methane, bis- [3,3'-bis- (4'-hydroxy-3'-t- Butylphenyl) butyllic acid] glycol ester, and tocophenol at least one of the air filter. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일제로 구성되고, 공기중의 부유입자형상물질을 포함하는 에어필터에 있어서, 상기 시일재에 함유되는 가소제의 주성분이, 분자량 400이상인 카르본산 에스테르, 폴리에스테르, 에폭시계 화합물 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.An air filter comprising a filter medium formed by treating a fiber with a treating agent, a frame in which the filter medium is placed, and a sealing agent sealing the space between the frame and the filter medium, the air filter comprising suspended particulate matter in the air. An air filter, wherein the main component of the plasticizer contained in the seal material is at least one of a carboxylic acid ester, a polyester, and an epoxy compound having a molecular weight of 400 or more. 제8항에 있어서, 상기 시일재에 함유되는 가소제의 주성분은, 후탈산 이소노닐, 후탈산 옥틸데실, 후탈산 디이소데실, 후탈산 라우릴, 후탈산 미리스티릴, 아제라인산 디-2-에틸헥실, 세바틴산 디-2-에틸헥실, 트리메릿트산 트리스-2-에틱헥실, 트리메릿트산 트리옥틸, 트리메릿트산 트리노닐, 트리메릿트산 트리데실, 아디핀산 또는 아제라인산 또는 세바틴산 또는 후탈산과 글리콜 또는 글리세린과의 중축합에 의해 얻어지는 폴리에스테르, 에폭시 지방산 에스테르, 및 에폭시화유 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.The main component of the plasticizer contained in the said seal material is futalate isononyl, futalate octyldecyl, futalate diisodecyl, futalate lauryl, futalate myrityryl, azeline di-2- Ethylhexyl, di-2-ethylhexyl sebatinic acid tris-2-ethoxyl, trimellitic acid trioctyl, trimellitic acid trinonyl, trimellitic acid tridecyl, adipic acid or azeline acid or sebacic acid or after At least one of polyester, epoxy fatty acid ester, and epoxidized oil obtained by polycondensation of deoxidation with glycol or glycerin. 섬유를 처리제로 처리하여 직물형상으로 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과제와의 사이를 밀봉하는 시일재로 구성되고, 공기중의 부유입자형상물질을 포집하는 에어필터에 있어서, 상기 시일제에 함유되는 산화방지제의 주성분이 분자량 300이상인 페놀계 화합물인 것을 특징으로 하는 에어필터.In an air filter for treating fibers with a treatment agent, the filter material in the form of a fabric, a frame in which the filter material is put, and a seal member sealing the space between the frame and the filter agent and collecting suspended particulate matter in the air. And an phenolic compound having a molecular weight of 300 or more as a main component of the antioxidant contained in the sealing agent. 제10항에 있어서, 상기 시일재에 함유되는 산화방지제의 주성분은 스테아릴- β-(3,5-디-t-부틸-4-히드록시페닐) 프로피오네이트, 2,2'-메틸렌-비스-(4-메틸-6-t-부틸페놀),2,2'-메티렌-비스-(4-에틸-6-t-부틸페놀), 4,4'-티오비스-(3-메틸-6-t-부틸페놀), 4,4'-부틸리덴-비스-(3-메틸-6-t-부틸페놀), 1,1,3-트리스-(2-메틸-4-히드록시-5-t-부틸페닐)부탄, 1,3,5-트리메틸-2,4,6-트리스-(3,5-디-t-부틸-4-히드록시베질)벤젠, 테트라키스[(메틸렌-3-(3',5'-디-t-부틸-4'-히드록시페닐) 프로피오네이트)]메탄, 비스-[3,3'-비스(4'-히드록시-3'-t-부틸페닐)부틸릭크아시드]글리콜에스테르, 및 토코페놀 중 적어도 어느 하나인 것을 특징으로 하는 에어필더.The main component of the antioxidant contained in the said sealing material is stearyl- (beta)-(3, 5- di- t- butyl- 4-hydroxyphenyl) propionate, 2, 2'- methylene- Bis- (4-methyl-6-t-butylphenol), 2,2'-methylene-bis- (4-ethyl-6-t-butylphenol), 4,4'-thiobis- (3-methyl -6-t-butylphenol), 4,4'-butylidene-bis- (3-methyl-6-t-butylphenol), 1,1,3-tris- (2-methyl-4-hydroxy -5-t-butylphenyl) butane, 1,3,5-trimethyl-2,4,6-tris- (3,5-di-t-butyl-4-hydroxybenzyl) benzene, tetrakis [(methylene -3- (3 ', 5'-di-t-butyl-4'-hydroxyphenyl) propionate)] methane, bis- [3,3'-bis (4'-hydroxy-3'-t -Butylphenyl) butylic acid] glycol ester, and tocophenol. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일재로 구성되고, 공기 중의 부유입자형상물질을 포집하는 에어필터에 있어서, 상기 시일재에 함유되는 윤활제의 주성분이, 탄소수 20이상인 지방족 탄화수소 및 탄소 수 18이상인 고급알콜 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.An air filter comprising a filter material formed by treating a fiber with a treating agent, a frame in which the filter material is put, and a seal member sealing the space between the frame and the filter medium, and collecting suspended particulate matter in the air. An air filter, wherein the main component of the lubricant contained in the seal material is at least one of an aliphatic hydrocarbon having 20 or more carbon atoms and a higher alcohol having 18 or more carbon atoms. 제12항에 있어서, 상기 시일재에 함유되는 윤활제의 주성분은, 카이크로 크리스탈린왁스, 천연파라핀, 합성 파라핀, 폴리올레핀왁스, 탄소수 18,20,24의 분기알콜, 및 오레일알콜 중 적어도 어느 하나인 것을 특징으로 하는 에어필터.The main component of the lubricant contained in the seal material is at least one of cyclocrystalline wax, natural paraffin, synthetic paraffin, polyolefin wax, branched alcohol having 18, 20, 24 carbon atoms, and oleyl alcohol. Air filter, characterized in that the. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사일르 밀봉하는 시일재로 구성되고, 공기 중의 부유입자형상물질을 포집하는 에어필터의 제조방법에 있어서, 상기 처리제에 함유되는 가소제의 주성분으로서, 분자량 400이상인 카르본산 에스테르, 폴리에스테르, 에폭시계 화합물 중 적어도 어느 하나를 선택하여 사용하는 것을 특징으로 하는 에어필터의 제조방법.The manufacturing method of the air filter which consists of the filter medium formed by processing a fiber with the processing agent, the frame which put this filter medium, and the sealing material which seals between this frame and the filter medium, and collects suspended particulate matter in air. The manufacturing method of the air filter of Claim 1 which uses at least any one of a carboxylic acid ester, polyester, and an epoxy type compound which has a molecular weight of 400 or more as a main component of the plasticizer contained in the said processing agent. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일재로 구성되고, 공기중의 부유임자형상물질을 포집하는 에어필터의 제조방법에 있어서, 상기 처리제에 함유되는 산화방지제의 주요성분으로서, 분자량 300이상인 페놀계 화합물을 선택하여 사용하는 것을 특징으로 하는 에어필터의 제조방법.Manufacture of an air filter which comprises a filter medium formed by treating a fiber with a treatment agent, a frame in which the filter medium is placed, and a seal member sealing the space between the frame and the filter medium, and collecting suspended solids in the air. A method for producing an air filter, characterized in that a phenolic compound having a molecular weight of 300 or more is selected and used as a main component of the antioxidant contained in the treatment agent. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과재와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일재로 구성되고, 공기 중의 분자량 400이상인 카르본산 에스테르, 폴리에스테르, 에폭시계 화합물 중 적어도 어느 하나를 선택하여 사용하는 것을 특징으로 하는 에어필터의 제조방법.It is composed of a filter material formed by treating the fibers with a treatment agent and formed into a fabric shape, a frame in which the filter material is put, and a seal material sealing the space between the frame and the filter medium, and having a molecular weight of 400 or more in the air, a carboxylic acid ester, polyester or epoxy type. Method for producing an air filter, characterized in that at least one selected from the compound used. 섬유를 처리제로 처리하여 직물형상으로 형성된 여과제와, 이 여과재를 넣는 프레임과, 이 프레임과 여과재와의 사이를 밀봉하는 시일제로 구성되고, 공기중의 부유입자형상물질을 포집하는 에어필터의 제조방법에 있어서, 상기 시일재에 함유되는 산화방지제의 주성분으로서, 분자량 300이상인 페놀계 화합물을 선택하여 사용하는것을 특징으로 하는 에어필터의 제조방법.Manufacture of an air filter comprising a filter agent formed into a fabric shape by treating a fiber with a treatment agent, a frame in which the filter medium is placed, and a sealing agent sealing the space between the frame and the filter medium, and collecting airborne particulate matter in the air. A method for producing an air filter, characterized in that a phenolic compound having a molecular weight of 300 or more is selected and used as a main component of the antioxidant contained in the sealing material. 제1항 내지 제13항중의 어느 한 항에 있어서, 상기 시일재의 주성분은, 이소시아네이트로 이루어지는 주제와 경제화제와의 반응으로 형성되는 2액형의 폴레우레탄수지이며, 경화제의 활성수소의 당량의 주제의 이소시아네이트기의 당량보다 많고, 또한 인산 에스테르를 함유하지 않는 것을 특징으로 하는 에어필터.The main component of the said sealing material is a 2-component polyurethane resin formed by reaction of the main material which consists of an isocyanate, and an economic agent, The main component of the equivalent of the active hydrogen of a hardening | curing agent is a thing. An air filter comprising more than the equivalent of isocyanate group and containing no phosphate ester. 제1항 내지 제13항중의 어느 한 항에 있어서, 상기 시일재의 주성분은, 주제와 경화제와의 반응으로 형성되는 2액형의 에폭시수지이며, 경화제가 산성 또는 중성인 것인 것을 특징으로 하는 에어필터.The air filter according to any one of claims 1 to 13, wherein the main component of the sealing material is a two-component epoxy resin formed by a reaction between a main material and a curing agent, and the curing agent is acidic or neutral. . 제1항 내지 제13항 중의 어느 한 항에 있어서, 상기 시일재의 주성분은, 주제와 경화제와의 반응으로 형성되는2액형의 에폭시수지로, 경화제는 아민계이며, 자존 아민 저감수단이 구비되어 있는 것을 특징으로 하는 에어필터.The main component of the said sealing material is a 2-component epoxy resin formed by reaction of a main material and a hardening | curing agent, The hardening | curing agent is amine type and the self-existing amine reducing means is provided in any one of Claims 1-13. Air filter, characterized in that. 제18항 내지 제13항 및 제18항 내지 제20항중의 어느 한항에 있어서, 상기 여과재는 실리콘 오일이 부착한 유리섬유를 처리제로 처리하여 직물형상으로 형성되는 것이며, 해당 실리콘 오일 규소수 10이하의 고리형상 실록산을 함유하지 않는 것인 것을 특징으로 하는 에어필터.21. The filter medium according to any one of claims 18 to 13 and 18 to 20, wherein the filter medium is formed into a fabric shape by treating a glass fiber with silicone oil with a treatment agent, and the silicon oil number of silicon is 10 or less. Air filter, characterized in that it does not contain a cyclic siloxane. 실리콘오일을 유리섬유에 부착시키는 제1공정과, 해당 제1공정의 후에 해당 유리섬유를 처리제로 처리하여 직물형상의 여과재를 형성하는 제2공정을 포함하는 에어필터의 제조방법에 있어서, 상기 제1공정후의 유리섬유를 청정한 공기 기류하에서 가열처리하고, 해당 유리섬유에 부착되어 있는 실리콘 오일로부터 규소 수 10이하의 실록산을 충분히 제거한 후에, 가스 형태 유기물을 발생시키지 않는 처리제로 처리하는 것을 특징으로 하는 에어필터의 제조방법.A method of manufacturing an air filter, comprising: a first step of attaching silicon oil to glass fibers; and a second step of treating the glass fibers with a treating agent after the first step to form a fabric-like filter medium. The glass fiber after one process is heat-processed under the clean air stream, and after removing enough siloxane of 10 or less silicon from the silicone oil adhering to this glass fiber, it is processed by the processing agent which does not generate | occur | produce a gaseous organic substance, It is characterized by the above-mentioned. Method of manufacturing an air filter. 실리콘오일의 유리섬유에 부착시키는 제1공정과, 해당 제1공정의 후에 해당 유리섬유를 처리제로 처리하여 직물형상의 여과제를 형성하는 제2공정을 포함하는 에어필터의 제조방법에 있어서, 상기 제1공정에서 사용하는 실리콘 오일로서 규소 수 10이하의 고리형상 실록산이 제거된 것을 이용하고, 가스 형태 유기물을 발생시키지 않는 처리제로 처리하는 것을 특징을 하는 에어필터의 제조방법.1. A method of manufacturing an air filter, comprising: a first step of adhering to a glass fiber of silicon oil; and a second step of treating the glass fiber with a treatment agent after the first step to form a fabric-like filter agent; A process for producing an air filter, characterized by treating with a treating agent which does not generate gaseous organic substances by using a silicone oil used in the first step, in which a cyclic siloxane having a silicon number of 10 or less is removed. 청구의 범위 제1~13항 및 제18항~21항중 어느 한 항에 기재된 에어필터를 구비하고 있는 것을 특징으로 하는 크린룸.Claims 1-13 and the air filter as described in any one of Claims 18-21 is provided, The clean room characterized by the above-mentioned. 청구의 범위 제1~13항 및 제18항~21항중 어느 한 항에 기재된 에어필터를 구비하고 있는 것을 특징으로 하는 국소설비.Claims 1 to 13 and 18 to 21, characterized in that provided with the air filter according to any one of the local facilities. 벽 및 바닥을, 파지앤드트랩법에 의한 가스형태 유기물 발생량이 1g당 1㎍이하인 건축재료로 구축함과 동시에, 청구의 범위 제1~13항 및 18~21항의 어느 한 항에 기재된 에어필터를, 해당 에어필터와 그 부착용의 개구부와의 사이에, 파지앤드트랩법에 의한 가스형태 유기물 발생량이 1g당50㎍이하인 가스켓을 끼워 부착한 것을 특징으로 하는 크린룸.The air filter according to any one of claims 1 to 13 and 18 to 21, while the walls and floors are constructed of a building material having a gas-like organic matter generation amount of 1 μg or less per 1 g by the phage and trap method, A clean room comprising a gasket having an amount of generation of gaseous organic matter by 1 g / g between the air filter and the opening part for attachment thereof, which is 50 µg or less per g. 섬유를 직물형상으로 형성하여 에어필터용의 여과재로 하기 위해 해당 섬유에 스며들게 하는 처리제에 있어서, 비실리콘계 발수제의 주성분이, 탄소 수 20이상인 지방족 탄수화물 및 탄소 수 18이상인 고급알콜 중 적어도 어느 하나인 것을 특징으로 하는 처리제.In the treatment agent for forming the fabric into a fabric and permeating the fiber to form a filter medium for an air filter, the main component of the non-silicone water repellent is at least one of aliphatic carbohydrates having 20 or more carbon atoms and higher alcohols having 18 or more carbon atoms. Treatment agent characterized by the above-mentioned. 섬유를 직물형상으로 혀엉하여 에어필터용의 여과재로 하기 위해 해당 섬유에 스며들게 하는 처리제에 있어서, 가소제의 주성분이, 분자량 400이상인 카르본산 에스테르, 폴리에스테르, 에폭시계 화합물 중의 적어도 어느 하나인 것을 특징으로 하는 처리제.A treatment agent in which a fiber is tangled into a fabric to penetrate the fiber to form a filter medium for an air filter, wherein the main component of the plasticizer is at least one of a carboxylic acid ester, a polyester, and an epoxy compound having a molecular weight of 400 or more. Treatment agent. 섬유를 직물형상으로 형상하여 에어필터용의 여과재로 하기 위해 해당 섬유에 스며들게 하는 처리제에 있어서, 산화방지제의 주성분이 분자량 30이상인 페놀게 화합물인 것을 특징으로 하는 처리제.A processing agent for forming a fiber into a fabric to penetrate the fiber to form a filter medium for an air filter, wherein the main component of the antioxidant is a phenol crab compound having a molecular weight of 30 or more. 섬유를 처리제에 스며들게 함 직물형상으로 형성함으로써 에어필터 용의 여과재를 제조하는 영과재의 제조방법에 있어서, 상기 처리제에 함유되는 가소제의 주성분으로서, 분자량 400이상인 카르본산 에스테르, 폴리에스테르, 에폭시계 화합물 중의 적어도 어느 하나의 선택하여 사용하는 것을 특징으로 하는 여과재의 제조방법.Infiltrating the fiber with a treatment agent In the method for producing a fruit material for producing a filter medium for an air filter by forming a fabric, the main component of the plasticizer contained in the treatment agent is a carboxylic acid ester, a polyester, or an epoxy compound having a molecular weight of 400 or more. Method for producing a filter medium characterized in that at least one of the selected. 섬유를 처리재에 스며들게 하여 직물형상으로 형성함으로써 에어필터 용의 여과재를 제조하는 여과재의 제조방법에 이어서, 상기 처리제에 함유되는 산화방지제의 주성분으로서 분자량 300이상인 페놀계 화합물을 선택하여 사용하는 것을 특징으로 하는 여과재의 제조방법.A method of producing a filter medium for preparing a filter medium for an air filter by infiltrating the fiber with a processing material to form a fabric, followed by selecting and using a phenolic compound having a molecular weight of 300 or more as a main component of the antioxidant contained in the treatment agent. Method for producing a filter medium. 벽 및 바닥의 적어도 표면재와, 에어필터의 여과재 및 여과재와 프레임과의 사이를 밀봉하는 시일재를, 공기중의 유기 인화합물 및 붕소화합물을 방출하지 않는 재료로 형성한 것을 특징으로 하는 크린룸.A clean room, wherein at least the surface material on the walls and the floor, and the sealing material for sealing the filter material of the air filter and the filter material and the frame are formed of a material which does not release organic phosphorus compounds and boron compounds in the air. 상기 재료는, 파지앤드트랩법에 의한 가스형태 유기 인화합물의 발생량이 재료 1g 당 10㎍이하며, 또한 초순수에 28일간 침지하여 용출시킨 붕소화합물이 재료 1g당 20㎍이하인 것을 특징으로 하는 크린룸.The material is a clean room, characterized in that the amount of gaseous organophosphorus compound produced by the phage and trap method is less than 10 µg per 1 g of material, and the boron compound eluted by immersion in ultrapure water for 28 days is 20 µg or less per 1 g of material. 제32항 또는 33항에 있어서, 상기 시일재는 폴리우레탄수지계시일재료, 주성분을 구성하는 디이쇠아 네이트로서 디페닐메탄 디이소시아네이트를 함유하며, 그 액상화제로서 인산 에스테르를 함유하는 경우에, 해당인산 에스테르를 분자량이 300이상인 것으로 한 것을 특징으로 하는 크린룸.The phosphoric acid ester according to claim 32 or 33, wherein the sealant contains a diphenylmethane diisocyanate as the disulfonate constituting the polyurethane resin-based sealing material and a main component, and a phosphoric acid ester as the liquidating agent. Clean room characterized in that the molecular weight of 300 or more. 제34항에 있어서, 상기 액상화제로서 사용하는 인산 에스테르는, 안산트리-2-에틸헥실, 안산 트리부톡시에틸, 인산트리오레일, 인산트리페닐, 인산트리크레졸, 인산트리크시레닐, 인산 크레질디페닐, 인산크시레닐 디페닐, 인산-2-에틸헥실 디페닐, 방향족 축합 인산 에스테르, 아인산 트리스트리데실, 및 안산 트리페닐 중 적어도 어느 하나인 것을 특징으로 하는 크린룸.35. The phosphoric acid ester used as the liquidating agent according to claim 34 is tri-2-ethylhexyl acrylate, tributoxyethyl phosphate, trioleyl phosphate, triphenyl phosphate, tricresol phosphate, trixyrenil phosphate or cresyl phosphate. A clean room, characterized in that at least one of phenyl, xyrenyl diphenyl phosphate, 2-ethylhexyl diphenyl phosphate, aromatic condensed phosphate ester, phosphorous tristridecyl, and triphenyl ansan. 벽의 적어도 표면재와, 에어필터의 여과재 및 여과재와 프레임과의 사이를 밀봉하는 시일재를, 공기 중에 유기 인화합물 및 붕소화합물을 방출하지 않는 재료로 형성한 것을 특징으로 하는 국소설비.A local installation comprising at least a surface material of a wall, a filter material of an air filter, and a sealing material for sealing between the filter material and the frame made of a material which does not release organic phosphorus compounds and boron compounds in the air. 상기 재료는, 피자앤드트랩법에 의한 가스형태 유기 인화합물의 발생량이 재료 1g당 10㎍이하이며, 또한 초순수에 28일간 침지하여 용출시킨 붕소화합물이 재료 1g당 20㎍이하 인것을 특징으로 하는 국소설비.The material is characterized in that the amount of gaseous organophosphorus compound produced by the pizza and trap method is 10 µg or less per 1 g of material, and the boron compound eluted by immersion in ultrapure water for 28 days is 20 µg or less per 1 g of material. equipment. 제38항에 있어서, 상기 액상화제로서 사용하는 인산 에스테르는, 인트리-2-에틸헥실, 인산 트리부톡시에틸, 인산트리오레일, 인산트리페닐, 인산트리크레졸, 인산트리크시레닐, 인산 크레질디페닐, 인산크시레닐 디페닐, 인산-2-에틸헥실 디페닐, 방향족 축합 인산 에스테르, 아인산 트리스트리데실, 및 아이난 트리페닐 중 적어도 어느 하나인것을 특징으로 하는 국소설비.The phosphate ester to be used as the liquidating agent according to claim 38, wherein the phosphate ester is used as intri-2-ethylhexyl, tributoxyethyl phosphate, trioleyl phosphate, triphenyl phosphate, tricresol phosphate, trixyrenil phosphate or cresyl di phosphate. And at least one of phenyl, xyrenyl diphenyl phosphate, 2-ethylhexyl diphenyl phosphate, aromatic condensed phosphate ester, phosphorous tristridecyl, and inan triphenyl. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960707515A 1995-07-27 1996-07-25 Airfilter,method of manufacturing air filter,local facility,clean room and method of manufacturing filter medium KR100240264B1 (en)

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