KR970077455A - Semiconductor module manufacturing system - Google Patents
Semiconductor module manufacturing system Download PDFInfo
- Publication number
- KR970077455A KR970077455A KR1019960017131A KR19960017131A KR970077455A KR 970077455 A KR970077455 A KR 970077455A KR 1019960017131 A KR1019960017131 A KR 1019960017131A KR 19960017131 A KR19960017131 A KR 19960017131A KR 970077455 A KR970077455 A KR 970077455A
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- KR
- South Korea
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- product
- module
- semiconductor
- wafer
- processor
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
반도체 생산 공장과 다른 호환 가능한 생산물 제조의 설계, 구성, 방법, 구조에 대한 것이다. 상기 공장은, 적어도 하나의 모듈 프로세스 장치와, 웨이퍼/생산물 이송시스템을 포함한다. 상기 모듈 웨이퍼/생산물 이송 시스템, 웨이퍼/생산물 픽업 로봇과, 컴퓨터 제어 장치와, 유지장치와 그리고 모든 필요한 파이프 시스템을 포함한다.The design, construction, method, and structure of semiconductor production plants and other compatible product manufacturing. The plant includes at least one module processing apparatus and a wafer / product transport system. The module wafer / product transport system, the wafer / product pickup robot, the computer control device, the retaining device and all the necessary pipe systems.
일 이상의 모듈 프로세스 장치가 유연하게 조립되고, 레일과 브리지 컨넥션 시스템에 의하여 서로 연결되어 다양한 생산 용량을 얻기위한 대형 생산 시스템을 형성한다.One or more module process devices are flexibly assembled and interconnected by rails and bridge connection systems to form a large production system for obtaining various production capacities.
웨이퍼/생산물 이송 시스템은 웨이퍼/생산물 카세트와, 이송 카트와, 그리고 레일과 브리지를 포함한다. 유지 장치는 수선과 유지 작업을 위한 모듈 프로세스 장치를 돕기 위하여 설치된다.The wafer / product transport system includes wafer / product cassettes, transport carts, and rails and bridges. The retaining device is installed to assist the module processing device for repair and maintenance operations.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제1도는 본 발명에 따른 모듈 프로세서 유니트의 평면도, 제2도는 본 발명에 따른 모듈 프로세스 유니트의 측면도.FIG. 1 is a plan view of a module processor unit according to the present invention; FIG. 2 is a side view of a module process unit according to the present invention; FIG.
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960017131A KR100309420B1 (en) | 1996-05-21 | 1996-05-21 | Semiconductor Module Manufacturing System |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960017131A KR100309420B1 (en) | 1996-05-21 | 1996-05-21 | Semiconductor Module Manufacturing System |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970077455A true KR970077455A (en) | 1997-12-12 |
KR100309420B1 KR100309420B1 (en) | 2001-12-17 |
Family
ID=66219536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960017131A KR100309420B1 (en) | 1996-05-21 | 1996-05-21 | Semiconductor Module Manufacturing System |
Country Status (1)
Country | Link |
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KR (1) | KR100309420B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100309458B1 (en) * | 1998-06-15 | 2001-11-22 | 김영환 | Automatic transferring system |
-
1996
- 1996-05-21 KR KR1019960017131A patent/KR100309420B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100309458B1 (en) * | 1998-06-15 | 2001-11-22 | 김영환 | Automatic transferring system |
Also Published As
Publication number | Publication date |
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KR100309420B1 (en) | 2001-12-17 |
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