KR970077149A - A target fixing section of a pulsed laser deposition apparatus using an ultra-high vacuum composite rotary motion transfer apparatus - Google Patents

A target fixing section of a pulsed laser deposition apparatus using an ultra-high vacuum composite rotary motion transfer apparatus Download PDF

Info

Publication number
KR970077149A
KR970077149A KR1019960014634A KR19960014634A KR970077149A KR 970077149 A KR970077149 A KR 970077149A KR 1019960014634 A KR1019960014634 A KR 1019960014634A KR 19960014634 A KR19960014634 A KR 19960014634A KR 970077149 A KR970077149 A KR 970077149A
Authority
KR
South Korea
Prior art keywords
ball
stencil
pulsed laser
rotary motion
high vacuum
Prior art date
Application number
KR1019960014634A
Other languages
Korean (ko)
Other versions
KR100192129B1 (en
Inventor
허윤성
박광서
이순걸
김인선
박용기
박종철
Original Assignee
정명세
한국표준과학연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 정명세, 한국표준과학연구원 filed Critical 정명세
Priority to KR1019960014634A priority Critical patent/KR100192129B1/en
Publication of KR970077149A publication Critical patent/KR970077149A/en
Application granted granted Critical
Publication of KR100192129B1 publication Critical patent/KR100192129B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

본 발명은 초 고진공용 복합 회전운동 전달 장치를 이용한 펄스형 레이저 증착장치의 타겟고정부에 관한 것으로 이를 더욱 구체적으로 설명하면 펄스형 레이저 증착을 수행하기 위해서 단일 회전축을 사용하여 자전과 공전의 두가지 기능을 할 수 있는 간편한 초 고진공용 복합 회전운동 전달 장치에 관한 것으로서 타겟의 서로 독립적인 자전과 공전 운동의 두가지 기능을 원활하게 수행하고 박막의 질을 향상시키기 위하여 4개의 원판으로 형성된 타겟 부착부와 타겟 홀더를 지지해 주고 하단부에 테이퍼진 홈이 형성되어 있는 턴 테이블과 모터의 작동에 의해 회전운동을 하는 단일 회전축인 주축과 주축에서 전달되는 회전운동을 각 타겟 부착부에 전달시켜 주는 회전운동 분배기와 스텐볼이 내부에 삽입되고 주축과 동일하게 움직이도록 고정되는 스텐볼 가이드와 스텐볼 가이드에 삽입되어 있는 스텐볼의 이탈을 방지하고 턴 테이블과 연결·고정되어 있는 스텐볼 가이드 덮개와 턴테이블의 하단부에 형성된 홈에 삽입되는 스텐볼 볼 지지대를 포함하여 구성되어 단일 회전축에 의해 타겟이 공전과 자전운동을 하도록 하여 초 고진공 용기의 외부에서 내부로 서로 다른 두가지의 운동을 전달할 수 있으며 4개의 타겟이 서로 독립적으로 자전 및 공전 운동으로 원활한 증착기능을 수행할 수 있고 대면적 증착에 용이하며 펄스형 레이저 증착장치뿐이 아닌 다른 여러 장비에서도 널리 응용하여 사용할 수 있는 매우 효율적인 것이다.　[0001] The present invention relates to a target fixing unit of a pulsed laser deposition apparatus using an ultra-high vacuum compound rotary motion transfer apparatus. More specifically, in order to perform pulsed laser deposition, a single rotation axis is used to perform two functions The present invention relates to a simple and complex rotary motion transfer device for a high vacuum, which is capable of performing two functions of independently rotating and revolving motions independently of each other and enhancing the quality of a thin film, A turntable in which a holder is supported and a tapered groove is formed at a lower end thereof, a main shaft which is a single rotary shaft which rotates by the operation of the motor, and a rotary motion distributor which transmits rotary motion transmitted from the main shaft to each target attachment portion The stencil ball is inserted inside and fixed so as to move in the same manner as the main shaft A stencil ball guide cover which is connected to and fixed to the turntable, and a stern ball ball support which is inserted into a groove formed at a lower end of the turntable to prevent the stencil guide inserted into the stencil guide, So that two different motions can be transmitted from the outside to the inside of the ultra-high vacuum container, and the four targets can independently perform the function of performing the deposition independently by rotating and orbital motion, It is easy to deposit, and it is very efficient that it can be widely applied to various equipment other than pulsed laser deposition apparatus.

Description

초 고진공용 복합 회전운동 전달장치를 이용한 펄스형 레이저 증착장치의 타겟고정부A target fixing section of a pulsed laser deposition apparatus using an ultra-high vacuum composite rotary motion transfer apparatus

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명에 따른 구성을 보인 초 고진공용을 복합 회전운동 전달장치의 개략도.FIG. 1 is a schematic view of a composite rotary motion transmission device for ultra-high vacuum having a configuration according to the present invention. FIG.

Claims (1)

펄스형 레이저 박막 증착장치에 있어서; 4개의 원판으로 형성된 타겟 부착부와 타겟 홀더를 지지해 주고 하단부에 테이퍼진 홈이 형성되어 잇는 턴 테이블과 모터의 작동에 의해 회전운동을 하는 단일 회전축인 주축과 주축에서 전달되는 회전운동을 각 타겟 부착부에 전달시켜 주는 회전운동 분배기와 스텐볼이 내부에 삽입되고 주축과 동일하게 움직이도록 고정되는 스텐볼 가이드와 스텐볼 가이드에 삽입되어 있는 스텐볼의 이탈을 방지하고 턴 테이블과 연결·고정되어 있는 스텐볼 가이드 덮개와 턴테이블의 하단부에 형성된 홈에 삽입되는 스텐볼 볼 지지대를 포함하여 구성되어 단일 회전축에 의해 타겟이 공전과 자전운동을 하는 것을 특징으로 하는 초 고진공용 복합 회전운동 전달장치를 이용한 펄스형레이저 증착장치의 타겟고정부.A pulsed laser thin film deposition apparatus comprising: A turntable having a target attachment portion formed of four discs and a target holder, a turntable having a tapered groove formed at a lower end thereof, and a main shaft, which is a single rotation shaft that rotates by the operation of the motor, A rotating motion distributor for transferring the stencil ball to the attaching portion, a stencil ball guide which is inserted so that the stencil ball is inserted therein and moves in the same manner as the main shaft, and the stent ball inserted in the stencil guide is prevented from being detached, And a stent ball ball support which is inserted into a groove formed at a lower end of the turntable, wherein the target rotates and revolves by a single rotation shaft. A target fixing section of a pulsed laser deposition apparatus. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960014634A 1996-05-06 1996-05-06 Target fixing part of pulse laser deposition system using complex rotation motion transferring apparatus for high vacuum KR100192129B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960014634A KR100192129B1 (en) 1996-05-06 1996-05-06 Target fixing part of pulse laser deposition system using complex rotation motion transferring apparatus for high vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960014634A KR100192129B1 (en) 1996-05-06 1996-05-06 Target fixing part of pulse laser deposition system using complex rotation motion transferring apparatus for high vacuum

Publications (2)

Publication Number Publication Date
KR970077149A true KR970077149A (en) 1997-12-12
KR100192129B1 KR100192129B1 (en) 1999-06-15

Family

ID=19457778

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960014634A KR100192129B1 (en) 1996-05-06 1996-05-06 Target fixing part of pulse laser deposition system using complex rotation motion transferring apparatus for high vacuum

Country Status (1)

Country Link
KR (1) KR100192129B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100459880B1 (en) * 1998-05-07 2005-01-15 삼성전기주식회사 Target fixture for apparatus of manufacturing pulsed laser depositon
KR100908032B1 (en) * 2007-12-18 2009-07-15 한국원자력연구원 Target mounts and grooves for fixing ultra-thin plastic targets for laser-induced particle generation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100459880B1 (en) * 1998-05-07 2005-01-15 삼성전기주식회사 Target fixture for apparatus of manufacturing pulsed laser depositon
KR100908032B1 (en) * 2007-12-18 2009-07-15 한국원자력연구원 Target mounts and grooves for fixing ultra-thin plastic targets for laser-induced particle generation

Also Published As

Publication number Publication date
KR100192129B1 (en) 1999-06-15

Similar Documents

Publication Publication Date Title
CA2023816A1 (en) Rotary pad turner
EP1614475A3 (en) Device for agitating the fluid contents of a container
AU587749B2 (en) Manipulator head assembly
CA2253137A1 (en) Radially oriented motor for a fluid balance ring
BR8103263A (en) GAS TURBINE ENGINE FOR THE PROPULSION OF A ROTATING ATOMIZER MECHANISM; COMBINATION OF A GAS TURBINE ENGINE, AN ATOMIZER MECHANISM FOR HIGH SPEED ROTATION BY THE ENGINE AND A DEVICE FOR THE SUPPLY OF MATERIAL OF MATERIAL OF TESTING MATERIAL.
KR970077149A (en) A target fixing section of a pulsed laser deposition apparatus using an ultra-high vacuum composite rotary motion transfer apparatus
CA2104671A1 (en) Apparatus and method for finishing a blow molding
DK161286A (en) Apparatus for reception of data sent in data packets at high transmission speed
ES2127797T3 (en) FIXING SYSTEM FOR CENTRIFUGAL CHAMBER.
SE8207486D0 (en) PROCEDURE AND APPLIANCES FOR THE TRANSMISSION OF SOLID AND LIQUID PHASES
GR3030848T3 (en) Rotary case for lipstick and the like with axial clearance adjustment
JPH0796295B2 (en) Equipment for ink transfer in printing machines
IT8022394A0 (en) SAFETY MECHANISM FOR HIGH SPEED MACHINE GUN WITH MULTIPLE ROTATING BARRELS.
KR920008385A (en) Two gears and their connecting arms and crank units
EP0794699A3 (en) Electronic component transferring apparatus
GB2019522A (en) Rotary to Oscillatory Drive Converter
ES286092U (en) Apparatus to enclose a liquid between a wall and a revolving piece passing therethrough.
JPS6476724A (en) High pressure jet cleaning apparatus
US5178066A (en) Speed match ductor assembly
SU1465357A1 (en) Glue applicator roller of labelling machine
JPS55135026A (en) Container feeder
KR200160918Y1 (en) Substrate rotation unit
JPS5578850A (en) Rolling contact mechanism
CA2096167A1 (en) Apparatus for Manipulating a Workpiece in a Machining Operation
FR2670257B1 (en) UNIVERSAL SUPPORT FOR ROTATING SHAFTS, PARTICULARLY FOR RECEIVING AN OSCILLATING BEARING.

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20050127

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee