KR970077079A - Control device of semiconductor processing equipment - Google Patents
Control device of semiconductor processing equipment Download PDFInfo
- Publication number
- KR970077079A KR970077079A KR1019960018030A KR19960018030A KR970077079A KR 970077079 A KR970077079 A KR 970077079A KR 1019960018030 A KR1019960018030 A KR 1019960018030A KR 19960018030 A KR19960018030 A KR 19960018030A KR 970077079 A KR970077079 A KR 970077079A
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- KR
- South Korea
- Prior art keywords
- output device
- input
- control unit
- processing equipment
- semiconductor
- Prior art date
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- General Factory Administration (AREA)
- Programmable Controllers (AREA)
Abstract
공정제어부에 연결되는 하나의 출력장치만을 사용하여 반도체 공정설비를 제어하는 반도체 공정설비의 제어장치에 관한 것이다.The present invention relates to a control apparatus of a semiconductor processing equipment for controlling a semiconductor processing equipment using only one output device connected to a process control unit.
본 발명은 반도체 소자 제조공정이 진행되는 반도체 공정설비를 통합적으로 제어하는 공정제어부, 상기 공정제어부에 복수개의 라인으로 연결되어 검사 항목을 선택하는 선택스위치, 상기 선택스위치에 하나의 라인으로 연결되어 선택된 항목을 표시하는 출력장치, 및 상기 출력장치에 연결되어 제어신호를 입력하는 입력장치로 구성됨을 특징으로 한다.The present invention is a process control unit for integrally controlling the semiconductor process equipment for the semiconductor device manufacturing process proceeds, a selection switch connected to the process control unit by a plurality of lines to select an inspection item, connected to the selection switch in one line selected And an input device connected to the output device and inputting a control signal.
따라서, 입출력장치 설치비용이 절약되고, 입출력장치 설치공간 확보의 어려움을 해결할 수 있다. 그리고 작업자가 각 모니터링 대상에 따라서 입출력장치를 이동하면서 작업하여 발생하는 시간적인 손실 및 작업효율이 저하되는 문제점을 해결할 수 있는 효과가 있다.Therefore, the installation cost of the input / output device is saved, and the difficulty of securing the input / output device installation space can be solved. And there is an effect that can solve the problem that the time loss and work efficiency caused by the worker moving while moving the input and output devices according to each monitoring target is reduced.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 따른 반도체 공정설비의 제어장치의 일 실시예를 나타내는 개략적인 도면이다.2 is a schematic diagram illustrating an embodiment of a control apparatus of a semiconductor processing apparatus according to the present invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960018030A KR970077079A (en) | 1996-05-27 | 1996-05-27 | Control device of semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960018030A KR970077079A (en) | 1996-05-27 | 1996-05-27 | Control device of semiconductor processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970077079A true KR970077079A (en) | 1997-12-12 |
Family
ID=66283846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960018030A KR970077079A (en) | 1996-05-27 | 1996-05-27 | Control device of semiconductor processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970077079A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150134001A (en) | 2014-05-21 | 2015-12-01 | 세메스 주식회사 | Method for controlling a process equipment |
-
1996
- 1996-05-27 KR KR1019960018030A patent/KR970077079A/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150134001A (en) | 2014-05-21 | 2015-12-01 | 세메스 주식회사 | Method for controlling a process equipment |
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| Date | Code | Title | Description |
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| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| SUBM | Submission of document of abandonment before or after decision of registration |