KR970077066A - Method of Fixing Glass Substrate and Silicon Substrate - Google Patents

Method of Fixing Glass Substrate and Silicon Substrate Download PDF

Info

Publication number
KR970077066A
KR970077066A KR1019960018798A KR19960018798A KR970077066A KR 970077066 A KR970077066 A KR 970077066A KR 1019960018798 A KR1019960018798 A KR 1019960018798A KR 19960018798 A KR19960018798 A KR 19960018798A KR 970077066 A KR970077066 A KR 970077066A
Authority
KR
South Korea
Prior art keywords
silicon substrate
substrate
fixing glass
glass piece
glass
Prior art date
Application number
KR1019960018798A
Other languages
Korean (ko)
Other versions
KR100246196B1 (en
Inventor
이남양
Original Assignee
엄길용
오리온전기 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엄길용, 오리온전기 주식회사 filed Critical 엄길용
Priority to KR1019960018798A priority Critical patent/KR100246196B1/en
Publication of KR970077066A publication Critical patent/KR970077066A/en
Application granted granted Critical
Publication of KR100246196B1 publication Critical patent/KR100246196B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
    • H01J2209/264—Materials for sealing vessels, e.g. frit glass compounds, resins or structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

본 발명에서는 유리의 하판상에 실리콘 기판을 고정시키기 위하여 종래의 양극 접합 또는 페이스트를 사용하는 대신에 쐐기형의 유리를 사용하여 실리콘 기판을 간접적으로 고정시키는 방법을 제공하여, 직접 접합에 의하여 실리콘 기판 또는 하판 유리가 깨어지는 종래의 단점을 극복할 수 있다.The present invention provides a method of indirectly fixing a silicon substrate by using wedge-shaped glass instead of using a conventional anode bonding or paste to fix the silicon substrate on the lower plate of the glass. Or it can overcome the conventional disadvantage that the lower glass is broken.

Description

유리 기판과 실리콘 기판의 고정 방법Method of Fixing Glass Substrate and Silicon Substrate

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 쐐기형 유리 조각에 의하여 유리 하판상에 고정되는 실리콘 기판을 도시한 본 발명의 평면도, 제2도는 쐐기형 유리 조각에 의하여 유리 하판상에 고정되는 실리콘 기판을 도시한 본 발명의 단면도.1 is a plan view of the present invention showing a silicon substrate fixed on a glass lower plate by a wedge glass piece, and FIG. 2 is a cross-sectional view of the present invention showing a silicon substrate fixed on a glass lower plate by a wedge glass piece.

Claims (3)

실리콘 기판(2)을 고정시키기 위하여 유리 조각(3)의 하단부를 하판(1)과 접합시키고, 상기 유리 조각(3)의 상단부를 상기 실리콘 기판(2)의 가장자리부와 밀착시켜 상기 실리콘 기판(2)을 고정시키는 실리콘 기판 고정 방법.In order to fix the silicon substrate 2, the lower end of the glass piece 3 is bonded to the lower plate 1, and the upper end of the glass piece 3 is brought into close contact with the edge portion of the silicon substrate 2. 2) A method of fixing a silicon substrate to fix it. 제1항에 있어서, 상기 유리 조각(3)은 쐐기형인 것을 특징으로 하는 실리콘 기판 고정 방법.2. Method according to claim 1, characterized in that the glass piece (3) is wedge shaped. 제1항 또는 제2항에 있어서, 상기 유리 조각(3)은 하단부에서 상단부로 향할수록 두께가 얇아지도록 형성된 것을 특징으로 하는 실리콘 기판 고정 방법.3. Method according to claim 1 or 2, characterized in that the glass piece (3) is formed so that its thickness becomes thinner from the lower end to the upper end. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960018798A 1996-05-30 1996-05-30 Manufacture of fed KR100246196B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960018798A KR100246196B1 (en) 1996-05-30 1996-05-30 Manufacture of fed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960018798A KR100246196B1 (en) 1996-05-30 1996-05-30 Manufacture of fed

Publications (2)

Publication Number Publication Date
KR970077066A true KR970077066A (en) 1997-12-12
KR100246196B1 KR100246196B1 (en) 2000-03-15

Family

ID=19460217

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960018798A KR100246196B1 (en) 1996-05-30 1996-05-30 Manufacture of fed

Country Status (1)

Country Link
KR (1) KR100246196B1 (en)

Also Published As

Publication number Publication date
KR100246196B1 (en) 2000-03-15

Similar Documents

Publication Publication Date Title
EP2369636A3 (en) Transparent substrate equipped with an electrode
KR960030541A (en) Surface acoustic wave device
KR910005382A (en) Bonding Method and Bonding Device for Semiconductor Substrate
KR900010994A (en) Semiconductor devices
KR850006341A (en) Weather strip
EP0680663A4 (en) Method of mounting a piezoelectric element to a substrate.
KR970070241A (en) Plasma etching electrode
KR910010756A (en) Receiver
KR900700302A (en) IC card and its manufacturing method
KR960024548A (en) Active matrix substrate
KR970077066A (en) Method of Fixing Glass Substrate and Silicon Substrate
KR880013255A (en) Bipolar transistor
KR850006796A (en) Light emitting device
EP1237204A3 (en) Piezoelectric/electrostrictive film element
KR830010409A (en) Watch case (1)
KR840006786A (en) Gin ball bottle
FR2435131A1 (en) CAPACITIVE DIODE
KR910013567A (en) Semiconductor device having junction structure of heteromorphic device isolation region
KR860009588A (en) Method of manufacturing projection type cathode ray tube
KR920020241A (en) Manufacturing method of liquid crystal display device
KR960043140A (en) TCP structure
KR970077056A (en) NEG getter body and FED device using the same
KR970048728A (en) Liquid crystal display
KR970052481A (en) Bottom electrode of semiconductor manufacturing apparatus
KR920007159A (en) Press-contact semiconductor device

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee