KR970071998A - Preliminary inspection system of semiconductor manufacturing equipment - Google Patents

Preliminary inspection system of semiconductor manufacturing equipment Download PDF

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Publication number
KR970071998A
KR970071998A KR1019960009719A KR19960009719A KR970071998A KR 970071998 A KR970071998 A KR 970071998A KR 1019960009719 A KR1019960009719 A KR 1019960009719A KR 19960009719 A KR19960009719 A KR 19960009719A KR 970071998 A KR970071998 A KR 970071998A
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
microcomputer
manufacturing equipment
control signal
electronic component
Prior art date
Application number
KR1019960009719A
Other languages
Korean (ko)
Inventor
이영춘
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960009719A priority Critical patent/KR970071998A/en
Publication of KR970071998A publication Critical patent/KR970071998A/en

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Emergency Alarm Devices (AREA)

Abstract

본 발명은 반도체 제조장비에서 고장이 있는 상태에서 동작하는 것을 방지하기 위하여 각 장비가 동작되기 전에 먼저 그 상황을 알려줄 수 있는 반도체 제조장비의 예비점검 시스템에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a preliminary inspection system for semiconductor manufacturing equipment capable of informing a situation of each equipment before operation thereof in order to prevent the semiconductor manufacturing equipment from operating in a faulty state.

본 발명은 반도체 제조장비를 구성하는 각 전자부품과 연결되어 그 동작 상태를 판단하고 그 결과에 따라 시스템을 제어하는 마이컴과, 상기 마이컴의 제어신호에 따라 각 전자부품의 동작시간을 카운트하는 카운터와, 상기 마이컴에서 출력되는 제어신호에 따라 각 전자부품의 상태를 외부로 표시하는 디스플레이 패널과, 상기 마이컴에서 출력되는 제어신호에 따라 알람(alarm)을 발생시키는 스피커를 포함하여 구성되어 작업성 및 신뢰성을 향상시키는 것을 특징으로 한다.The present invention relates to a semiconductor manufacturing apparatus, which comprises a microcomputer connected to each electronic component constituting a semiconductor manufacturing equipment to determine the operation state thereof and to control the system according to the result, a counter for counting the operation time of each electronic component according to a control signal of the microcomputer, A display panel for externally displaying the state of each electronic component according to a control signal output from the microcomputer and a speaker for generating an alarm according to a control signal output from the microcomputer, Is improved.

Description

반도체 제조장비의 예비점검 시스템Preliminary inspection system of semiconductor manufacturing equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명에 의한 점검동작을 나타내는 흐름도이다.FIG. 1 is a flowchart showing a checking operation according to the present invention.

Claims (1)

복수의 전자부품을 포함하여 이루어지는 반도체 제조장비의 고장을 방지하기 위한 점검시스템에 있어서, 상기 각 전자부품과 연결되어 동작 상태를 판단하고 그에 따라 시스템을 제어하는 마이컴과, 상기 마이컴의 제어신호에 따라 각 전자부품의 동작시간을 카운트하는 카운터와, 상기 마이컴에서 출력되는 제어신호에 따라 각 전자부품의 상태를 외부로 표시하는 디스플레이 패널과, 상기 마이컴에서 출력되는 제어신호에 따라 알람(alarm)을 발생시키는 스피커를 포함하여 구성된 것을 특징으로 하는 반도체 제조장비의 점검시스템.An inspection system for preventing failure of semiconductor manufacturing equipment including a plurality of electronic components, comprising: a microcomputer connected to each of the electronic components to determine an operation state and to control the system according to the microcomputer; A counter for counting the operating time of each electronic component; a display panel for externally displaying the state of each electronic component according to a control signal output from the microcomputer; and an alarm is generated according to a control signal output from the microcomputer And a speaker for controlling the semiconductor manufacturing equipment. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960009719A 1996-04-01 1996-04-01 Preliminary inspection system of semiconductor manufacturing equipment KR970071998A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960009719A KR970071998A (en) 1996-04-01 1996-04-01 Preliminary inspection system of semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960009719A KR970071998A (en) 1996-04-01 1996-04-01 Preliminary inspection system of semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
KR970071998A true KR970071998A (en) 1997-11-07

Family

ID=66222895

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960009719A KR970071998A (en) 1996-04-01 1996-04-01 Preliminary inspection system of semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR970071998A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230020466A (en) * 2016-03-29 2023-02-10 가부시키가이샤 코쿠사이 엘렉트릭 Substrate processing apparatus, device management controller, and program

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230020466A (en) * 2016-03-29 2023-02-10 가부시키가이샤 코쿠사이 엘렉트릭 Substrate processing apparatus, device management controller, and program

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