KR970063608A - Statistical process control system and its method for semiconductor equipment - Google Patents

Statistical process control system and its method for semiconductor equipment Download PDF

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KR970063608A
KR970063608A KR1019960004392A KR19960004392A KR970063608A KR 970063608 A KR970063608 A KR 970063608A KR 1019960004392 A KR1019960004392 A KR 1019960004392A KR 19960004392 A KR19960004392 A KR 19960004392A KR 970063608 A KR970063608 A KR 970063608A
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facility
data
servo
abnormal
outputting
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KR1019960004392A
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KR0174993B1 (en
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한진후
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김광호
삼성전자 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Multi-Process Working Machines And Systems (AREA)

Abstract

공정관리의 효율화를 위하여 각 공정설비를 통계적 공정관리 방식으로 설비 및 공정이상이 자동제어되도록 개선시킨 반도체 설비의 통계적 공정관리 시스템 및 그 방법에 관한 것이다.The present invention relates to a statistical process management system and method for a semiconductor facility in which each process facility is improved to be automatically controlled by a statistical process control method in order to make process control more efficient.

본 발명은 공정수행전에 공정 및 시간 데이터를 설비별로 구분가능하도록 출력하는 복수의 공정설비, 이에 연결된 계측기, 공정설비의 출력데이타와 상기 계측기의 계측데이터를 이력으로 저장하는 저장수단, 및 상기 저장수단에 저장된 데이터의 이력사항을 분석하여 공정 및 설비 이상으로 판단되면 상기 공정 설비의 동작을 출력시키는 공정관리서보를 포함하여 구성되어, 공정관리서보에서 입력된 데이터를 미리 설정된 기준데이터와 통계적 공정관리 방식으로 비교 및 판단하여 공정 및 설비 이상에 대한 자동제어를 수행하도록 이루어진다.The present invention relates to an apparatus and a method for controlling a plurality of process facilities for outputting process and time data to be distinguishable by equipment before a process is performed, a measuring device connected thereto, a storage means for storing measurement data of the measuring device, And outputting the operation of the process facility when it is determined that the process and the facility are abnormal. The data input from the process control servo is converted into a predetermined standard data and a statistical process management method So as to perform automatic control of the process and equipment abnormality.

따라서, 본 발명에 의하면, 공정이상인지 설비이상인지 즉각적인 판단이 가능하도록 통계적 공정관리 방식에 의한 판단결과를 확보할 수 있고, 자동제어가 수행되어 공정의 관리 및 생산성의 극대화를 꾀할 수 있는 효과가 있다.Therefore, according to the present invention, it is possible to secure a judgment result by a statistical process management method so that an immediate judgment can be made as to whether or not a process abnormality or a facility abnormality is present, and an automatic control is performed to maximize process management and productivity have.

Description

반도체 설비의 통계적 공정관리 시스템 및 그 방법Statistical process control system and its method for semiconductor equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도는 본 발명에 따른 반도체 설비의 통계적 공정관리 시스템의 실시예를 나타내는 블록도이다.FIG. 2 is a block diagram illustrating an embodiment of a statistical process management system for a semiconductor facility according to the present invention.

Claims (10)

반도체 공정을 수행하는 복수의 공정설비를 관리하는 반도체 설비의 통계적 공정관리 시스템에 있어서, 상기 각 공정설비 별로 연결되어 해당 공정설비의 제조물을 계측하는 복수의 계측기; 상기 각 계측기의 계측결과를 분석하여 상기 제조물이 이상공정으로 판단되면 이상상태 데이터를 출력하는 공정관리서보; 및 상기 공정 관리서보의 이상상태 데이터를 출력하는 출력수단을 포함하여 구성됨을 특징으로 하는 반도체 설비의 통계적 공정간리 시스템1. A statistical process management system for a semiconductor facility for managing a plurality of process facilities for performing a semiconductor process, the system comprising: a plurality of meters connected to each process facility to measure a product of the process facility; A process management servo for analyzing measurement results of the respective meters and outputting abnormal state data when the product is determined as an abnormal process; And an output means for outputting abnormal state data of the process control servo. 제1항에 있어서, 상기 공정관리서보는 이상공정으로 판단되면 상기 해당 공정설비의 동작을 중지시키도록 구성됨을 특징으로 하는 상기 반도체 설비의 통계적 공정관리 시스템.The system according to claim 1, wherein the process control servo stops the operation of the process facility if it is determined to be an abnormal process. 제1항에 있어서, 상기 계측기에 출력수단이 연결되고, 상기 공정관리서보에서 이상데이터를 상기 계측기를 경유하여 상기 출력수단으로 출력시키도록 구성됨을 특징으로 하는 상기 반도체 설비의 통계적 공정관리시스템.The system according to claim 1, wherein the output means is connected to the meter, and the process management servo outputs the abnormal data to the output means via the meter. 특정 반도체 제조 공정 전에 공정수행을 위하여 설정되는 해당 공정 및 시간 데이터를 설비별로 구분가능하도록 출력하는 복수의 공정설비; 상기 각 공정설비 별로 연결되어 해당 제조물을 계측하는 복수의 계측기; 상기 공정설비의 출력데이터와 상기 계측기의 계측데이터를 저장하는 저장수단; 및 상기 저장수단에 저장된 설비별 해당 공정 및 시간 데이터를 상기 계측기의 계측 결과로 분석하여 상기 공정설비의 이상유무를 판단하는 공정관리서보를 포함하여 구성됨을 특징으로 하는 반도체 설비의 통계적 공정관리 시스템.A plurality of process equipments for outputting corresponding process and time data set for process execution before a specific semiconductor manufacturing process so as to be distinguishable by equipment; A plurality of meters connected to each of the process equipments and measuring the corresponding products; Storage means for storing output data of the process facility and measurement data of the meter; And a process management servo for analyzing the corresponding process and time data for each facility stored in the storage means as a measurement result of the meter to determine whether or not the process facility is abnormal. 제4항에 있어서, 상기 공정관리서보는 상기 공정설비의 이상이 확인되면 상기 공정설비의 동작을 중지시키도록 구성됨을 특징으로 하는 상기 반도체 설비의 통계적 공정관리 시스템.5. The system according to claim 4, wherein the process control servo stops operation of the process facility when an abnormality of the process facility is confirmed. 제4항에 있어서, 상기 공정관리서보는 상기 계측결과가 계측기로부터 입력되도록 구성됨을 특징으로 하는 상기 반도체 설비의 통계적 공정관리 시스템.5. The system according to claim 4, wherein the process control servo is configured to input the measurement result from a meter. 제4항에 있어서, 상기 계측기는 계측결과를 상기 저장수단으로 저장시키고, 상기 공정관리서보는 상기 저장수단에 저장된 계측결과로 분석동작을 수행하도록 구성됨을 특징으로하는 상기 반도체 설비의 통계적 공정관리 시스템.5. The statistical process management system according to claim 4, wherein the measuring instrument stores the measurement result in the storage means, and the process management servo is configured to perform an analysis operation as a measurement result stored in the storage means . 제4항에 있어서, 상기 공정관리서보에 출력수단이 더 연결됨으로써 상기 공정설비 이상이 확인되면 그 결과를 상기 출력단으로 출력하도록 구성됨을 특징으로 하는 상기 반도체 설비의 통계적 공정관리 시스템.5. The system according to claim 4, further comprising output means connected to the process control servo to output the result to the output terminal if the process facility abnormality is confirmed. 특정 반도체 제조 공정 전에 공정수행을 위하여 설정되는 해당 공정 및 시간 데이터를 설비별로 구분가능하도록 출력하는 복수의 공정설비; 상기 각 공정설비 별로 연결되어 해당 제조물을 계측하는 복수의 계측기; 상기 공정설비의 출력데이타와 상기 계측기의 계측데이터를 이력으로 저장하는 저장수단; 및 상기 저장수단에 저장된 데이터의 이력사항을 분석하여 공정 및 설비이상으로 판단되면 상기 공정설비의 동작을 출력시키는 공정관리서보를 포함하여 구성됨을 특징으로 하는 반도체 설비의 통계적 공정관리 시스템.A plurality of process equipments for outputting corresponding process and time data set for process execution before a specific semiconductor manufacturing process so as to be distinguishable by equipment; A plurality of meters connected to each of the process equipments and measuring the corresponding products; Storage means for storing the output data of the process facility and the measurement data of the meter as history; And a process control servo for analyzing a history of data stored in the storage means and outputting an operation of the process facility when it is determined that the process and equipment are abnormal. 공정수행을 위하여 공정설비에 설정되는 데이타와 상기 공정 수행 후 계측한 데이터가 제어용 공정관리 서보로 입력되면 상기 공정관리서보에서 입력된 데이터를 미리 설정된 기준데이타와 통계적 공정관리 방식으로 비교 및 판단하는 단계; 및 상기 비교 및 판단된 결과가 공정 및 설비이상으로 판단되면 상기 공정관리서보가 그에 대한 내용을 출력하고 상기 공정설비의 동작을 중지시키는 단계를 포함하여 구성됨을 특징으로 하는 반도체 설비의 통계적 공정관리 방법.A step of comparing and judging the data input from the process control servo with the preset reference data by a statistical process management method when the data set in the process facility and the data measured after the process are input to the control process control servo ; And a step of outputting contents of the process management servo and stopping the operation of the process facility if it is determined that the comparison and determination result is abnormal in process and equipment. . ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960004392A 1996-02-23 1996-02-23 Statistical Process Control System and Method for Semiconductor Equipment KR0174993B1 (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100242954B1 (en) * 1997-03-31 2000-02-01 윤종용 Method for controlling a semiconductor fabricating equipment
KR100303321B1 (en) * 1999-05-20 2001-09-26 박종섭 Appratus for controlling abnormal lot in automization system to produce semiconductor and control method using the same
KR100538812B1 (en) * 1999-06-22 2005-12-23 주식회사 하이닉스반도체 Method for solving problem when generating queue of auto guide vehicle in diffusion area for manufacturing semiconductor and computer readable medium
KR100928205B1 (en) * 2007-06-05 2009-11-25 삼성전자주식회사 Semiconductor manufacturing facility management system and its statistical process control method
US7689315B2 (en) 2006-10-23 2010-03-30 Samsung Electronics Co., Ltd. Semiconductor equipment control system and method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6470230B1 (en) * 2000-01-04 2002-10-22 Advanced Micro Devices, Inc. Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication
US6449524B1 (en) * 2000-01-04 2002-09-10 Advanced Micro Devices, Inc. Method and apparatus for using equipment state data for run-to-run control of manufacturing tools
KR102432069B1 (en) * 2015-08-13 2022-08-16 세메스 주식회사 Apparatus and method for managing data

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100242954B1 (en) * 1997-03-31 2000-02-01 윤종용 Method for controlling a semiconductor fabricating equipment
KR100303321B1 (en) * 1999-05-20 2001-09-26 박종섭 Appratus for controlling abnormal lot in automization system to produce semiconductor and control method using the same
KR100538812B1 (en) * 1999-06-22 2005-12-23 주식회사 하이닉스반도체 Method for solving problem when generating queue of auto guide vehicle in diffusion area for manufacturing semiconductor and computer readable medium
US7689315B2 (en) 2006-10-23 2010-03-30 Samsung Electronics Co., Ltd. Semiconductor equipment control system and method
KR100928205B1 (en) * 2007-06-05 2009-11-25 삼성전자주식회사 Semiconductor manufacturing facility management system and its statistical process control method

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