KR970063435A

KR970063435A - Semiconductor manufacturing equipment

Info

Publication number: KR970063435A
Application number: KR1019960003400A
Authority: KR
Inventors: 이상호; 이현재
Original assignee: 김광호; 삼성전자 주식회사
Priority date: 1996-02-13
Filing date: 1996-02-13
Publication date: 1997-09-12

Abstract

본 발명은 반도체소자의 제조 공정에서 사용되는 약액을 정량공급하는 반도체 제조 장치에 관한 것으로, 공정챔버와, 상기 공정챔버와 연결된 제1공급라인을 통하여 상기 공정챔버로 혼합용액을 공급하는 혼합조, 그리고 상기 혼합조와 연결된 제2공급라인을 통하여 상기 혼합조에 약액을 공급하는 정량공급조를 구비한 반도체 제조 장치에 있어서, 상기 정량공급조에 연결되어 약액이 공급되는 제3공급라인과; 상기 정량공급조의 저면에 설치되어 상기 혼합조에 약액을 공급하는 제2공급라인과; 상기 정량공급조의 하부에 설치되어 상기 정량공급조에 공급된 약액의 양을 측정하는 약액량검출수단과; 상기 약액량검출수단과 연결되어 상기 정량공급조에 공급되는 약액의 양을 설정하고, 그리고 상기 약액량검출수단으로부터 제공된 측정치와 상기 설정치를 비교하여 약액공급여부를 제어하는 콘트롤러를 포함하고 있다. 이와 같은 장치에 의해서, 반도체소자의 제조에 사용되는 약액의 양을 미세하게 측정 ·제어하여 정량공급 할 수 있고, 아울어 웨이퍼의 불량을 방지할 수 있다.The present invention relates to a semiconductor manufacturing apparatus for supplying a chemical solution used in a semiconductor device manufacturing process in a quantitative manner and includes a process chamber, a mixing tank for supplying a mixed solution to the process chamber through a first supply line connected to the process chamber, And a fixed amount supply tank for supplying a chemical solution to the mixing tank through a second supply line connected to the mixing tank, the semiconductor manufacturing apparatus comprising: a third supply line connected to the fixed amount supply tank and supplied with a chemical solution; A second supply line provided on a bottom surface of the fixed amount supply tank for supplying a chemical solution to the mixing tank; A chemical liquid amount detecting means provided at a lower portion of the constant amount supply tank for measuring an amount of chemical liquid supplied to the constant amount supply tank; And a controller connected to the liquid medicine amount detecting means to set the amount of chemical liquid to be supplied to the constant amount supply tank and to compare whether the chemical liquid is supplied or not by comparing the measurement value provided from the liquid medicine amount detecting means with the set value. With such an apparatus, it is possible to finely measure and control the amount of the chemical liquid used for manufacturing the semiconductor device so as to supply it in a constant amount, and to prevent defects of the wafer.

Description

Semiconductor manufacturing equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도는 본 발명의 실시예에 따른 반도체 제조 장치의 구성을 개략적으로 보여주고 있는 도면.FIG. 2 schematically shows a configuration of a semiconductor manufacturing apparatus according to an embodiment of the present invention; FIG.

Claims

A mixing chamber 28 for supplying a mixed solution to the process chamber 28 through a first supply line 26 connected to the process chamber 28 and a mixing chamber 28 for supplying a mixed solution to the process chamber 28, And a fixed amount supply tank (14) for supplying a chemical solution to the mixing tank (20) through a second supply line (18) connected to the fixed supply tank (14) A third supply line 12; A second supply line 18 provided on the bottom of the fixed amount supply tank 14 for supplying a chemical solution to the mixing tank 20; A chemical liquid amount detecting means (15) installed at a lower portion of the constant amount supply tank (14) for measuring the amount of chemical liquid supplied to the constant amount supply tank (14); The amount of the chemical liquid supplied to the fixed amount supply tank 14 is set in connection with the liquid chemical quantity detection means 15 and the measured value supplied from the chemical liquid quantity detection means 15 is compared with the set value, And a controller (13) for controlling the semiconductor manufacturing apparatus.

The semiconductor manufacturing apparatus according to claim 1, wherein the semiconductor manufacturing apparatus further includes a level sensor connected to the constant amount supply tank, and the overflow signal detected by the level sensor, Wherein the supply of the chemical liquid is stopped.

[2] The apparatus according to claim 1, wherein the bottom surface of the fixed amount supply tank (14) is inclined so that a portion where the second supply line (18) is installed has a relatively low height as compared with both bottom surfaces of the fixed amount supply tank And the semiconductor manufacturing device.

2. The semiconductor manufacturing apparatus according to claim 1, wherein the chemical liquid supplied from the fixed amount supply tank (14) to the mixing tank (20) through the second supply line (18) is supplied by a free fall method.

The semiconductor manufacturing apparatus according to claim 1, wherein said weak liquid amount detection means (15) uses a balance balance.

※ Note: It is disclosed by the contents of the first application.