KR970056072U - 반응 가스 정류장치 - Google Patents
반응 가스 정류장치Info
- Publication number
- KR970056072U KR970056072U KR2019960005696U KR19960005696U KR970056072U KR 970056072 U KR970056072 U KR 970056072U KR 2019960005696 U KR2019960005696 U KR 2019960005696U KR 19960005696 U KR19960005696 U KR 19960005696U KR 970056072 U KR970056072 U KR 970056072U
- Authority
- KR
- South Korea
- Prior art keywords
- reaction gas
- gas stop
- stop
- reaction
- gas
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960005696U KR200145099Y1 (ko) | 1996-03-23 | 1996-03-23 | 반응 가스 정류장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960005696U KR200145099Y1 (ko) | 1996-03-23 | 1996-03-23 | 반응 가스 정류장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970056072U true KR970056072U (ko) | 1997-10-13 |
KR200145099Y1 KR200145099Y1 (ko) | 1999-06-15 |
Family
ID=60933333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960005696U KR200145099Y1 (ko) | 1996-03-23 | 1996-03-23 | 반응 가스 정류장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200145099Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102215639B1 (ko) * | 2014-03-05 | 2021-02-16 | 주성엔지니어링(주) | 가스 분배 장치 및 이를 구비하는 기판 처리 장치 |
-
1996
- 1996-03-23 KR KR2019960005696U patent/KR200145099Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200145099Y1 (ko) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050120 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |