KR970056072U - 반응 가스 정류장치 - Google Patents

반응 가스 정류장치

Info

Publication number
KR970056072U
KR970056072U KR2019960005696U KR19960005696U KR970056072U KR 970056072 U KR970056072 U KR 970056072U KR 2019960005696 U KR2019960005696 U KR 2019960005696U KR 19960005696 U KR19960005696 U KR 19960005696U KR 970056072 U KR970056072 U KR 970056072U
Authority
KR
South Korea
Prior art keywords
reaction gas
gas stop
stop
reaction
gas
Prior art date
Application number
KR2019960005696U
Other languages
English (en)
Other versions
KR200145099Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960005696U priority Critical patent/KR200145099Y1/ko
Publication of KR970056072U publication Critical patent/KR970056072U/ko
Application granted granted Critical
Publication of KR200145099Y1 publication Critical patent/KR200145099Y1/ko

Links

KR2019960005696U 1996-03-23 1996-03-23 반응 가스 정류장치 KR200145099Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960005696U KR200145099Y1 (ko) 1996-03-23 1996-03-23 반응 가스 정류장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960005696U KR200145099Y1 (ko) 1996-03-23 1996-03-23 반응 가스 정류장치

Publications (2)

Publication Number Publication Date
KR970056072U true KR970056072U (ko) 1997-10-13
KR200145099Y1 KR200145099Y1 (ko) 1999-06-15

Family

ID=60933333

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960005696U KR200145099Y1 (ko) 1996-03-23 1996-03-23 반응 가스 정류장치

Country Status (1)

Country Link
KR (1) KR200145099Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102215639B1 (ko) * 2014-03-05 2021-02-16 주성엔지니어링(주) 가스 분배 장치 및 이를 구비하는 기판 처리 장치

Also Published As

Publication number Publication date
KR200145099Y1 (ko) 1999-06-15

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