KR970054569A - Deformed lighting device and lighting method - Google Patents

Deformed lighting device and lighting method Download PDF

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Publication number
KR970054569A
KR970054569A KR1019950057193A KR19950057193A KR970054569A KR 970054569 A KR970054569 A KR 970054569A KR 1019950057193 A KR1019950057193 A KR 1019950057193A KR 19950057193 A KR19950057193 A KR 19950057193A KR 970054569 A KR970054569 A KR 970054569A
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KR
South Korea
Prior art keywords
reticle
condenser lens
mirror
lighting
deformed
Prior art date
Application number
KR1019950057193A
Other languages
Korean (ko)
Inventor
최용석
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950057193A priority Critical patent/KR970054569A/en
Publication of KR970054569A publication Critical patent/KR970054569A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

본 발명은 변형조명장치 및 조명방법에 관해 개시한다. 본 발명에 의한 변형조명장치는 순차적으로 정렬된 구경과 콘덴서 렌즈 및 레티클을 한 구성요소로 구비하는 변형조명장치에 있어서, 상기 구경을 제거하고 상기 콘덴서 렌즈와 레티클사이에 광을 사입사시키는 프리즘과 거울을 구비한다.The present invention discloses a modified illumination device and an illumination method. According to the present invention, there is provided a deformation lighting apparatus including a sequentially arranged aperture, a condenser lens, and a reticle as a component, including: a prism for removing the aperture and injecting light between the condenser lens and the reticle; Have a mirror.

본 발명에 의한 변형조명장치 및 조명방법을 사용할 경우 종래의 기술에 비해 간섭성이 훨씬 좋은 보다 많은 광량을 사진공정에 이용할 수 있으므로, 레티클의 패턴을 웨이퍼 상에 전사하는데 있어서 종래보다 짧은 시간이 소요되고 패턴의 콘트레스트가 우수하게 된다. 이것은 결국 형성되는 패턴의 질을 높이면서 반도체장치의 생산성을 증가시킨다.When using the modified illumination device and the illumination method according to the present invention, a larger amount of light having much better interference than that of the conventional technology can be used in the photographing process, and therefore, it takes a shorter time than before to transfer the pattern of the reticle onto the wafer. And the contrast of the pattern is excellent. This eventually increases the productivity of the semiconductor device while improving the quality of the formed pattern.

Description

변형조명장치 및 조명방법Deformed lighting device and lighting method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 의한 변형조명장치 및 조명 방법을 나타낸 도면이다.2 is a view showing a modified illumination device and an illumination method according to the present invention.

Claims (4)

순차적으로 정렬된 구경과 콘덴서 렌즈 및 레티클을 한 구성요소로 구비하는 변형조명장치에 있어서, 상기 구경을 제거하고 상기 콘덴서 렌즈와 레티클사이에 광을 사입사시키는 프리즘과 거울을 구비하는 것을 특징으로 하는 변형조명장치.A deformed illumination device having sequentially arranged apertures, a condenser lens, and a reticle as a component, comprising: a prism and a mirror for removing the aperture and injecting light between the condenser lens and the reticle; Deformed lighting device. 제1항에 있어서, 상기 거울은 상기 사입사각을 조절하는 수단인 것을 특징으로 하는 변형조명장치.The apparatus of claim 1, wherein the mirror is a means for adjusting the inclination angle. 사입사 조명을 위해 파리눈 렌즈와 콘덴서 렌즈사이에 설치된 구경스톱을 이용하는 레티클에 광을 사입사시키는 조명방법에 있어서, 상기 구경스톱을 제거하고 상기 콘덴서 렌즈다음에 프리즘과 거울을 형성하는 것을 특징으로 하는 조명방법.An illumination method of injecting light into a reticle using an aperture stop installed between a fly's eye lens and a condenser lens for illumination of an incidence, wherein the aperture stop is removed and a prism and a mirror are formed after the condenser lens. Lighting method. 제3항에 있어서, 상기 거울은 상기 사입사각을 조정하기 위한 수단으로 사용하는 것을 특징으로 하는 조명방법.4. A method according to claim 3, wherein the mirror is used as a means for adjusting the inclination angle. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950057193A 1995-12-26 1995-12-26 Deformed lighting device and lighting method KR970054569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950057193A KR970054569A (en) 1995-12-26 1995-12-26 Deformed lighting device and lighting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950057193A KR970054569A (en) 1995-12-26 1995-12-26 Deformed lighting device and lighting method

Publications (1)

Publication Number Publication Date
KR970054569A true KR970054569A (en) 1997-07-31

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ID=66619044

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950057193A KR970054569A (en) 1995-12-26 1995-12-26 Deformed lighting device and lighting method

Country Status (1)

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KR (1) KR970054569A (en)

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