KR970054569A - Deformed lighting device and lighting method - Google Patents
Deformed lighting device and lighting method Download PDFInfo
- Publication number
- KR970054569A KR970054569A KR1019950057193A KR19950057193A KR970054569A KR 970054569 A KR970054569 A KR 970054569A KR 1019950057193 A KR1019950057193 A KR 1019950057193A KR 19950057193 A KR19950057193 A KR 19950057193A KR 970054569 A KR970054569 A KR 970054569A
- Authority
- KR
- South Korea
- Prior art keywords
- reticle
- condenser lens
- mirror
- lighting
- deformed
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본 발명은 변형조명장치 및 조명방법에 관해 개시한다. 본 발명에 의한 변형조명장치는 순차적으로 정렬된 구경과 콘덴서 렌즈 및 레티클을 한 구성요소로 구비하는 변형조명장치에 있어서, 상기 구경을 제거하고 상기 콘덴서 렌즈와 레티클사이에 광을 사입사시키는 프리즘과 거울을 구비한다.The present invention discloses a modified illumination device and an illumination method. According to the present invention, there is provided a deformation lighting apparatus including a sequentially arranged aperture, a condenser lens, and a reticle as a component, including: a prism for removing the aperture and injecting light between the condenser lens and the reticle; Have a mirror.
본 발명에 의한 변형조명장치 및 조명방법을 사용할 경우 종래의 기술에 비해 간섭성이 훨씬 좋은 보다 많은 광량을 사진공정에 이용할 수 있으므로, 레티클의 패턴을 웨이퍼 상에 전사하는데 있어서 종래보다 짧은 시간이 소요되고 패턴의 콘트레스트가 우수하게 된다. 이것은 결국 형성되는 패턴의 질을 높이면서 반도체장치의 생산성을 증가시킨다.When using the modified illumination device and the illumination method according to the present invention, a larger amount of light having much better interference than that of the conventional technology can be used in the photographing process, and therefore, it takes a shorter time than before to transfer the pattern of the reticle onto the wafer. And the contrast of the pattern is excellent. This eventually increases the productivity of the semiconductor device while improving the quality of the formed pattern.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 의한 변형조명장치 및 조명 방법을 나타낸 도면이다.2 is a view showing a modified illumination device and an illumination method according to the present invention.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950057193A KR970054569A (en) | 1995-12-26 | 1995-12-26 | Deformed lighting device and lighting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950057193A KR970054569A (en) | 1995-12-26 | 1995-12-26 | Deformed lighting device and lighting method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970054569A true KR970054569A (en) | 1997-07-31 |
Family
ID=66619044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950057193A KR970054569A (en) | 1995-12-26 | 1995-12-26 | Deformed lighting device and lighting method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970054569A (en) |
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1995
- 1995-12-26 KR KR1019950057193A patent/KR970054569A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |