KR970053335A - Wafer carrier box - Google Patents

Wafer carrier box Download PDF

Info

Publication number
KR970053335A
KR970053335A KR1019950067539A KR19950067539A KR970053335A KR 970053335 A KR970053335 A KR 970053335A KR 1019950067539 A KR1019950067539 A KR 1019950067539A KR 19950067539 A KR19950067539 A KR 19950067539A KR 970053335 A KR970053335 A KR 970053335A
Authority
KR
South Korea
Prior art keywords
carrier
box
wafer
carrier box
fixing
Prior art date
Application number
KR1019950067539A
Other languages
Korean (ko)
Other versions
KR100203405B1 (en
Inventor
홍형식
최규상
전상수
정병효
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950067539A priority Critical patent/KR100203405B1/en
Publication of KR970053335A publication Critical patent/KR970053335A/en
Application granted granted Critical
Publication of KR100203405B1 publication Critical patent/KR100203405B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

본 발명은 반도체소자의 제조공정중 웨이퍼를 이송장비에 관한 것으로 특히 웨이퍼가 장착된 캐리어 카셋을 안전하게 이동 또는 보관을 위하여 사용되는 캐리어 박스에 관한 것이다. 종래의 캐리어 박스는 캐리어의 유동으로 파티클을 유발하여 웨이퍼를 가장 안전하게 보관하거나 이송해야할 자체가 오염소스가 되고 외관이 쉽게 손상되어 장비의 수명이 단축되는 문제점들이 있었다.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a wafer transfer device during a manufacturing process of a semiconductor device, and more particularly to a carrier box used for safely moving or storing a carrier cassette on which a wafer is mounted. Conventional carrier boxes cause particles by the flow of carriers, so that the wafers are most likely to be stored or transported as a source of contamination and the appearance is easily damaged, thereby reducing the life of equipment.

본 발명은 상술한 문제점들을 극복하기 위한 것으로 박스내의 바닥과 측면에 보강한 리브와, 커버에 캐리어를 고정하는 고정핀과, 캐리어 박스 손잡이를 보강한 보강판과, 커버에 분리되도록 형성한 봉투고정핀으로 구성하여, 캐리어의 유동을 방지하고 파손되기 쉬운 부위를 교체가능하도록 형성하여 웨이퍼의 오염을 막고 장비의 수명을 연장할 수 있도록 한 것이다.The present invention is to overcome the above-mentioned problems, ribs reinforced on the bottom and side of the box, fixing pins for fixing the carrier to the cover, reinforcement plate reinforced with the carrier box handle, and envelopes formed to be separated from the cover Consists of fins, to prevent the flow of carriers and to replace the fragile parts to prevent the contamination of the wafer and to extend the life of the equipment.

Description

웨이퍼 캐리어 박스Wafer carrier box

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 종래의 웨이퍼 캐리어 박스의 전체적인 구성 단면도.3 is an overall configuration cross-sectional view of a conventional wafer carrier box.

Claims (4)

복수장의 웨이퍼가 삽입되는 캐리어를 운반하거나 보관하기 위하여 사용되는 용기와 이 용기를 덮어주는 커버를 구비한 캐리어 박스에 있어서, 캐리어 박스내에 캐리어의 좌우 유동을 방지하는 좌우 유동방지수단과, 박스내 캐리어의 상하 흔들림을 방지하는 캐리어 고정수단을 포함하는 것을 특징으로 하는 웨이퍼 캐리어 박스.A carrier box having a container used for carrying or storing a carrier into which a plurality of wafers are inserted, and a cover covering the container, comprising: left and right flow preventing means for preventing left and right flow of the carrier in the carrier box, and a carrier in the box Wafer carrier box, characterized in that it comprises a carrier fixing means for preventing the shaking up and down. 제1항에 있어서, 상기 좌우 유동 방지수단은 캐리어 바닥부위에 형성되어 있는 리브를 소정길이 길게 형성하고 바닥면과 리브 사이에 좌우로 덧살을 붙여 형성하고, 측면에도 소정길이 리브를 형성한 것을 특징으로 하는 웨이퍼 캐리어 박스.The method of claim 1, wherein the left and right flow preventing means is formed by forming a rib formed on the bottom of the carrier to a predetermined length long, and is attached to the left and right between the bottom surface and the rib, and a predetermined length rib formed on the side. Wafer carrier box. 제1항에 있어서, 상기 캐리어 고정수단은 캐리어 박스의 커버 내측에 캐리어의 상부를 눌러 고정하는 멈춤판이 형성된 것을 특징으로 하는 웨이퍼 캐리어 박스.The wafer carrier box according to claim 1, wherein the carrier fixing means has a stop plate formed by pressing an upper portion of the carrier inside the cover of the carrier box. 복수장의 웨이퍼가 삽입되는 캐리어를 운반하거나 보관하기 위하여 사용되는 캐리어 박스의 커버 상부에 웨이퍼의 공정과정을 기록하는 런시트를 고정하기 위하여 소정길이 돌출된 4개의 시트 고정핀을 구비한 캐리어 박스에 있어서, 상기 시트가 고정될 위치에 형성된 고정홈과, 상기 고정홈에 체결되는 소정길이를 갖고 고정핀을 삽입고정한 것을 특징으로 하는 웨이퍼 캐리어 박스.In a carrier box having four sheet fixing pins protruding a predetermined length to fix a run sheet for recording a wafer's process on a cover of a carrier box used for carrying or storing a carrier into which a plurality of wafers are inserted. And a fixing groove formed at a position at which the sheet is to be fixed, and having a predetermined length fastened to the fixing groove, to which the fixing pin is inserted and fixed. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950067539A 1995-12-29 1995-12-29 Wafer carrier box KR100203405B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950067539A KR100203405B1 (en) 1995-12-29 1995-12-29 Wafer carrier box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067539A KR100203405B1 (en) 1995-12-29 1995-12-29 Wafer carrier box

Publications (2)

Publication Number Publication Date
KR970053335A true KR970053335A (en) 1997-07-31
KR100203405B1 KR100203405B1 (en) 1999-06-15

Family

ID=19447779

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950067539A KR100203405B1 (en) 1995-12-29 1995-12-29 Wafer carrier box

Country Status (1)

Country Link
KR (1) KR100203405B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100513154B1 (en) * 1997-10-27 2005-11-03 삼성전자주식회사 Transport box structure for semiconductor package

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000003260A (en) * 1998-06-26 2000-01-15 윤종용 Cassette box

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100513154B1 (en) * 1997-10-27 2005-11-03 삼성전자주식회사 Transport box structure for semiconductor package

Also Published As

Publication number Publication date
KR100203405B1 (en) 1999-06-15

Similar Documents

Publication Publication Date Title
US3695424A (en) Package for fragile articles
EP0789393A4 (en) Container for housing semiconductor wafers, structure for housing semiconductor wafers, and method of putting in and taking out semiconductor wafers
ITTO970606A1 (en) SUPPORT FOR SLICES OF SEMICONDUCTOR MATERIAL FOR THE ETHTRONIC MICROEL INDUSTRY.
MX9300024A (en) LAUNDRY BASKET.
KR930020626A (en) Wafer Carrying Method and Wafer Carrier
US20020005371A1 (en) Embossed carrier tape for electronic devices
USD277891S (en) Cuvette tray
KR970053335A (en) Wafer carrier box
US5402890A (en) Box container for rigid sheet bodies
JPS6233436A (en) Wafer case for transport
KR970008461A (en) Wafer cassette with box function
SE8203257L (en) BOTTLE BACK
KR200211054Y1 (en) Semiconductor Wafer Carrier Transport Box
JPH11154699A (en) Sealing structure for receptacle
US7971722B2 (en) Wafer container with restrainer
SG47002A1 (en) Container for sound carriers
JPH06139623A (en) Magazine for housing optical disk substrate and carrier for transporting magazine
JPH0864669A (en) Wafer box
ATE65472T1 (en) PACKAGING CARRIER.
KR200159981Y1 (en) A pad for mask custody case
JPH10139089A (en) Transporting container for square chip part
JP3681454B2 (en) Embossed carrier tape and IC conveying method using the same
KR200195515Y1 (en) Wafer carrier container
JPH06336241A (en) Packaging container
KR0127235Y1 (en) Slit magazine

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20070228

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee