KR970052823U - 반도체소자 생산라인의 밸브 조립체 - Google Patents
반도체소자 생산라인의 밸브 조립체Info
- Publication number
- KR970052823U KR970052823U KR2019960002796U KR19960002796U KR970052823U KR 970052823 U KR970052823 U KR 970052823U KR 2019960002796 U KR2019960002796 U KR 2019960002796U KR 19960002796 U KR19960002796 U KR 19960002796U KR 970052823 U KR970052823 U KR 970052823U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- production line
- valve assembly
- device production
- valve
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanically-Actuated Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960002796U KR0135805Y1 (ko) | 1996-02-23 | 1996-02-23 | 반도체소자 생산라인의 밸브 조립체 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960002796U KR0135805Y1 (ko) | 1996-02-23 | 1996-02-23 | 반도체소자 생산라인의 밸브 조립체 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970052823U true KR970052823U (ko) | 1997-09-08 |
KR0135805Y1 KR0135805Y1 (ko) | 1999-03-20 |
Family
ID=19450812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960002796U KR0135805Y1 (ko) | 1996-02-23 | 1996-02-23 | 반도체소자 생산라인의 밸브 조립체 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0135805Y1 (ko) |
-
1996
- 1996-02-23 KR KR2019960002796U patent/KR0135805Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0135805Y1 (ko) | 1999-03-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20051007 Year of fee payment: 8 |
|
LAPS | Lapse due to unpaid annual fee |