KR970052081A - Semiconductor manufacturing equipment - Google Patents

Semiconductor manufacturing equipment Download PDF

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Publication number
KR970052081A
KR970052081A KR1019950062046A KR19950062046A KR970052081A KR 970052081 A KR970052081 A KR 970052081A KR 1019950062046 A KR1019950062046 A KR 1019950062046A KR 19950062046 A KR19950062046 A KR 19950062046A KR 970052081 A KR970052081 A KR 970052081A
Authority
KR
South Korea
Prior art keywords
gas
gas control
control valve
pressure
control system
Prior art date
Application number
KR1019950062046A
Other languages
Korean (ko)
Inventor
최황규
심상철
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950062046A priority Critical patent/KR970052081A/en
Publication of KR970052081A publication Critical patent/KR970052081A/en

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Abstract

본 발명은 개스 제어 밸브의 전압을 모니터 할 수 있는 반도체 제조 설비에 관한 것이다.The present invention relates to a semiconductor manufacturing facility capable of monitoring the voltage of a gas control valve.

개스 압력을 나타내는 액정 어셈블리(11) 및 개스 제어 밸브의 전압을 모니터 할 수 있는 전압모니터수단(12)을 가지고 있으며 개스의 양 및 압력을 제어하는 개스 제어 시스템(13), 유입된 개스에 따라 식각 또는 금속증차공정등을 하는 챔버(14), 챔버(14)로 유입되는 개스의 양 및 압력을 조정하는 개스 제어 밸브(15) 및 개스 제어 시스템(13)과 개스 제어 밸브(15)를 연결하는 연결부(16) 및 케이블로 구성된다.It has a liquid crystal assembly 11 indicating the gas pressure and a voltage monitor means 12 for monitoring the voltage of the gas control valve, the gas control system 13 for controlling the amount and pressure of the gas, the etching according to the introduced gas Or connecting the gas control valve 15 and the gas control system 13 to the gas control valve 15 for adjusting the amount and pressure of the gas flowing into the chamber 14 and the chamber 14 performing the metal steaming process. It consists of a connection 16 and a cable.

Description

반도체 제조 설비Semiconductor manufacturing equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명의 반도체 제조 설비이다.2 is a semiconductor manufacturing equipment of the present invention.

Claims (1)

개스를 사용하여 제품을 생산하는 반도체 제조 설비에 있어서, 개스 압력을 나타내는 액정 어셈블리 및 개스 제어 밸브의 전압을 모니터할 수 있는 전압모니터수단을 가지고 있으며 개스의 양 및 압력을 제어하는 개스 제어 시스템; 유입된 개스에 따라 식각 또는 금속증차공정등을 하는 챔버; 상기의 챔버로 유입되는 개스의 양 및 압력을 조정하는 개스 제어밸브; 및 상기의 개스 제어 시스템과 개스 제어 밸브를 연결하는 연결부와 케이블을 구비한 것을 특징으로 하는 반도체 제조 설비.A semiconductor manufacturing facility for producing a product using gas, comprising: a gas control system having a liquid crystal assembly indicative of gas pressure and a voltage monitor means for monitoring a voltage of a gas control valve, the gas control system controlling a quantity and pressure of gas; A chamber which performs an etching or a metal steaming process according to the introduced gas; A gas control valve for adjusting the amount and pressure of gas flowing into the chamber; And a connection part and a cable connecting the gas control system and the gas control valve. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950062046A 1995-12-28 1995-12-28 Semiconductor manufacturing equipment KR970052081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950062046A KR970052081A (en) 1995-12-28 1995-12-28 Semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950062046A KR970052081A (en) 1995-12-28 1995-12-28 Semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
KR970052081A true KR970052081A (en) 1997-07-29

Family

ID=66620645

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950062046A KR970052081A (en) 1995-12-28 1995-12-28 Semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR970052081A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100732348B1 (en) * 2004-12-29 2007-06-27 주식회사 에이디피엔지니어링 Apparatus for fabricating flat panel display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100732348B1 (en) * 2004-12-29 2007-06-27 주식회사 에이디피엔지니어링 Apparatus for fabricating flat panel display

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