KR970052081A - Semiconductor manufacturing equipment - Google Patents
Semiconductor manufacturing equipment Download PDFInfo
- Publication number
- KR970052081A KR970052081A KR1019950062046A KR19950062046A KR970052081A KR 970052081 A KR970052081 A KR 970052081A KR 1019950062046 A KR1019950062046 A KR 1019950062046A KR 19950062046 A KR19950062046 A KR 19950062046A KR 970052081 A KR970052081 A KR 970052081A
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- gas control
- control valve
- pressure
- control system
- Prior art date
Links
Abstract
본 발명은 개스 제어 밸브의 전압을 모니터 할 수 있는 반도체 제조 설비에 관한 것이다.The present invention relates to a semiconductor manufacturing facility capable of monitoring the voltage of a gas control valve.
개스 압력을 나타내는 액정 어셈블리(11) 및 개스 제어 밸브의 전압을 모니터 할 수 있는 전압모니터수단(12)을 가지고 있으며 개스의 양 및 압력을 제어하는 개스 제어 시스템(13), 유입된 개스에 따라 식각 또는 금속증차공정등을 하는 챔버(14), 챔버(14)로 유입되는 개스의 양 및 압력을 조정하는 개스 제어 밸브(15) 및 개스 제어 시스템(13)과 개스 제어 밸브(15)를 연결하는 연결부(16) 및 케이블로 구성된다.It has a liquid crystal assembly 11 indicating the gas pressure and a voltage monitor means 12 for monitoring the voltage of the gas control valve, the gas control system 13 for controlling the amount and pressure of the gas, the etching according to the introduced gas Or connecting the gas control valve 15 and the gas control system 13 to the gas control valve 15 for adjusting the amount and pressure of the gas flowing into the chamber 14 and the chamber 14 performing the metal steaming process. It consists of a connection 16 and a cable.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명의 반도체 제조 설비이다.2 is a semiconductor manufacturing equipment of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950062046A KR970052081A (en) | 1995-12-28 | 1995-12-28 | Semiconductor manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950062046A KR970052081A (en) | 1995-12-28 | 1995-12-28 | Semiconductor manufacturing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970052081A true KR970052081A (en) | 1997-07-29 |
Family
ID=66620645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950062046A KR970052081A (en) | 1995-12-28 | 1995-12-28 | Semiconductor manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970052081A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100732348B1 (en) * | 2004-12-29 | 2007-06-27 | 주식회사 에이디피엔지니어링 | Apparatus for fabricating flat panel display |
-
1995
- 1995-12-28 KR KR1019950062046A patent/KR970052081A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100732348B1 (en) * | 2004-12-29 | 2007-06-27 | 주식회사 에이디피엔지니어링 | Apparatus for fabricating flat panel display |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |