KR970052009A - N_2 level sensor with beacon - Google Patents
N_2 level sensor with beacon Download PDFInfo
- Publication number
- KR970052009A KR970052009A KR1019950065730A KR19950065730A KR970052009A KR 970052009 A KR970052009 A KR 970052009A KR 1019950065730 A KR1019950065730 A KR 1019950065730A KR 19950065730 A KR19950065730 A KR 19950065730A KR 970052009 A KR970052009 A KR 970052009A
- Authority
- KR
- South Korea
- Prior art keywords
- level sensor
- sensor
- nitrogen gas
- level
- warning lamp
- Prior art date
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
본 발명은 반도체 제조 설비(SUGAI WET STATION)에서 사용되고 있는 질소 가스(N2GAS)의 레벨 확인용 센서에 관한 것으로써, 특히 센서 내부의 인식과 동시에 외부 작업자에게도 그 감지 여부가 인식되게 하여 감도 조정을 용이하게 한 경광등이 부착된 N2레벨 센서에 관한 것으로 반도체 웨이퍼의 세정 액조에 투입되는 질소 가스의 공급량을 인식하기 위한 N2레벨 센서에 있어서, N2압력에 따라 작동되는 마이크로 접점 스위치와 연결되어, 외부로의 식별이 가능하도록 온/오프 동작될 수 있는 경광등을 구비하여 센서 자체와 작업자에 의한 N2의 정량 관리가 이루어짐을 특징으로 하는 경광등이 부착된 N2레벨 센서.The present invention relates to a sensor for checking the level of nitrogen gas (N 2 GAS) used in semiconductor manufacturing facilities (SUGAI WET STATION), in particular, the sensitivity is adjusted by allowing the external operator to be recognized as well as the inside of the sensor according to the N 2 level sensor easily one by flashing light on the N 2 level sensor is attached to recognize the amount of supply of the nitrogen gas to be introduced to Article washing solution of a semiconductor wafer, and connected to the micro-contact switch is operated according to the N 2 pressure And an N 2 level sensor equipped with a warning lamp, characterized in that the sensor itself and a quantitative management of N 2 are made by a warning lamp that can be turned on / off to enable identification to the outside.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명에 따라 경광등이 부착된 N2레벨 센서의 구성을 도시한 사시도.1 is a perspective view showing the configuration of a N 2 level sensor with a warning light according to the present invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950065730A KR970052009A (en) | 1995-12-29 | 1995-12-29 | N_2 level sensor with beacon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950065730A KR970052009A (en) | 1995-12-29 | 1995-12-29 | N_2 level sensor with beacon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970052009A true KR970052009A (en) | 1997-07-29 |
Family
ID=66624112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950065730A KR970052009A (en) | 1995-12-29 | 1995-12-29 | N_2 level sensor with beacon |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970052009A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920003034A (en) * | 1990-07-03 | 1992-02-29 | 김진희 | Gas General Monitor and Meter |
| KR920004683U (en) * | 1990-08-29 | 1992-03-26 | 삼성전자 주식회사 | Gas piping display device |
| KR940023193U (en) * | 1993-03-16 | 1994-10-22 | 주식회사 공영종합시스템 | Gas supply flow measurement device |
| JPH0758071A (en) * | 1993-08-20 | 1995-03-03 | Tokico Ltd | Liquid controlling apparatus |
| KR950009234A (en) * | 1993-09-07 | 1995-04-21 | 문정환 | High pressure gas pressure measuring device |
-
1995
- 1995-12-29 KR KR1019950065730A patent/KR970052009A/en not_active Application Discontinuation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920003034A (en) * | 1990-07-03 | 1992-02-29 | 김진희 | Gas General Monitor and Meter |
| KR920004683U (en) * | 1990-08-29 | 1992-03-26 | 삼성전자 주식회사 | Gas piping display device |
| KR940023193U (en) * | 1993-03-16 | 1994-10-22 | 주식회사 공영종합시스템 | Gas supply flow measurement device |
| JPH0758071A (en) * | 1993-08-20 | 1995-03-03 | Tokico Ltd | Liquid controlling apparatus |
| KR950009234A (en) * | 1993-09-07 | 1995-04-21 | 문정환 | High pressure gas pressure measuring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69813841T2 (en) | RIBBED PRESSURE TANKS OF IMPROVED DURABILITY | |
| CY1106364T1 (en) | NEP REFINERY WITH EVAPORATION MEMBRANE AND METHOD OF OPERATION THEREOF | |
| ES2059421T3 (en) | PROCEDURE FOR THE DETECTION OF SURFACE DEFECTS AND DEVICE FOR THE REALIZATION OF THE SAME. | |
| DE69701230D1 (en) | ONE-PIECE CAP FOR LIQUID DISPENSER | |
| ES2156999T3 (en) | DETACHING A CLEANING, VENTILATION AND / OR DISINFECTION PROCESS. | |
| KR970052009A (en) | N_2 level sensor with beacon | |
| ATE298017T1 (en) | MARKING ELEMENT FOR ROADS | |
| ATE332012T1 (en) | INSTALLATION SWITCH FOR BUILDING INSTALLATION | |
| FR2674063B1 (en) | CIRCUIT FOR DETECTING THE STATE OF A SWITCH, PARTICULARLY A KEY IN A GENERATOR VOLTAGE REGULATOR. | |
| ATE272976T1 (en) | ARRANGEMENT FOR MEASURING THE PROPERTIES OF A LIQUID IN A TUBE | |
| ATE336770T1 (en) | HAZARD DETECTION SYSTEM | |
| DE60015028D1 (en) | Diaphragm pump for containers | |
| ATE210583T1 (en) | SPRAY DEVICE | |
| ES2121501B1 (en) | FLEXIBLE PLUG FOR BOTTLES WITH LAMINAR SEAL. | |
| ATE195397T1 (en) | SWITCHING DEVICE FOR STAIRwell LIGHTING | |
| DE50014588D1 (en) | FLAT LIGHTING DEVICE | |
| JPS63105824U (en) | ||
| KR950003546A (en) | Opening and closing detection device of washing machine cover | |
| KR840002159Y1 (en) | Burglarproof device for purse | |
| JPH04319639A (en) | Liquid sensor | |
| DE29618587U1 (en) | Street cap | |
| KR970047944A (en) | Car Liquid Level Detection Device | |
| KR970033999A (en) | Tire puncture detector of wheel | |
| ATE395519T1 (en) | SANITARY TUB | |
| KR880002009A (en) | Humidity measurement device using dew point |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |