JPH04319639A - Liquid sensor - Google Patents
Liquid sensorInfo
- Publication number
- JPH04319639A JPH04319639A JP8822891A JP8822891A JPH04319639A JP H04319639 A JPH04319639 A JP H04319639A JP 8822891 A JP8822891 A JP 8822891A JP 8822891 A JP8822891 A JP 8822891A JP H04319639 A JPH04319639 A JP H04319639A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- sensor
- absorbing material
- leakage
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 120
- 239000011344 liquid material Substances 0.000 claims 1
- 239000011358 absorbing material Substances 0.000 abstract description 29
- 239000000463 material Substances 0.000 abstract description 22
- 238000012423 maintenance Methods 0.000 abstract 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 12
- 230000002745 absorbent Effects 0.000 description 8
- 239000002250 absorbent Substances 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- -1 WO4 or ZnCr2O4 Chemical class 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は液体センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to liquid sensors.
【０００２】0002
【従来の技術】従来から液体収納容器からの液体を検出
するセンサＢは図２に示すようなものにが実用されてい
る。これは投受光素子を備えた反射型のセンス部１の底
面に吸液紙２を介在させ固定具３により一体化したもの
で、センサＢはセンス部１に電源等の接続線７が接続さ
れておりそのまま設置したのでは横転しやすいため、例
えば接着テープ４で液体収納容器５の受台６に固定させ
ていた。そして液体収納容器５から漏液８が漏れ出し吸
液紙２が漏液８を吸収すると投光素子から照射された光
の固定具３部分で反射される反射率が変化し、受光素子
に入射する光の量が変化することによりため漏液８を検
出していた。2. Description of the Related Art Conventionally, a sensor B for detecting liquid from a liquid storage container as shown in FIG. 2 has been put into practical use. This is a reflective sensing section 1 equipped with a light emitting/receiving element, with a liquid-absorbing paper 2 interposed on the bottom surface and integrated with a fixture 3. Sensor B is connected to the sensing section 1 with a connection line 7 for a power source, etc. If it is installed as is, it is likely to tip over, so it is fixed to the pedestal 6 of the liquid storage container 5 with adhesive tape 4, for example. When the liquid 8 leaks from the liquid storage container 5 and the liquid absorbent paper 2 absorbs the liquid 8, the reflectance of the light emitted from the light emitting element reflected by the fixture 3 changes, and the light enters the light receiving element. The liquid leakage 8 was detected based on the change in the amount of light emitted.
【０００３】0003
【発明が解決しようとする課題】しかしながら、このよ
うなセンサを用いると、漏液の種類によってはセンサＢ
を受台６に固定する接着テープ４が溶解されたり、漏液
が多量になると、センス部１まで漏液中に浸漬してしま
いセンサの耐久性が悪くなつてしまった。本発明は上記
欠点を解消するためになされたものであって、検出しよ
うとする液体にセンス部が浸漬されることがなく精度よ
く検知でき、耐久性が向上し、しかも所望の位置に簡単
に移動配置可能な液体センサを提供することを目的とす
る。[Problems to be Solved by the Invention] However, when such a sensor is used, depending on the type of leakage, sensor B
If the adhesive tape 4 that fixes the sensor to the pedestal 6 is dissolved or a large amount of liquid leaks, even the sense part 1 is immersed in the leaked liquid, resulting in poor durability of the sensor. The present invention has been made in order to eliminate the above-mentioned drawbacks.The present invention enables accurate detection without immersing the sense part in the liquid to be detected, has improved durability, and can be easily positioned at a desired position. An object of the present invention is to provide a liquid sensor that can be moved and arranged.
【０００４】0004
【課題を解決するための手段】上記目的を達成するため
、本発明の液体センサは、液体の有無を検知する液体セ
ンサであって、液体を検知するセンス部と、前記センス
部のセンシングエリアに少なくとも一部が存在し、液体
の有無被検知位置まで延伸された吸液材とを設けたもの
である。[Means for Solving the Problems] In order to achieve the above object, the liquid sensor of the present invention is a liquid sensor that detects the presence or absence of liquid, and includes a sensing section for detecting liquid, and a sensing area of the sensing section. At least a portion of the liquid-absorbing material is present and extends to a position where the presence or absence of liquid is detected.
【０００５】[0005]
【作用】本発明の液体センサのセンス部は光センサや湿
度センサ等であり、液体を吸取る吸液材の一部を液体セ
ンサのセンシングエリアに有し、被検出液体検知位置ま
で吸液材を延伸されている。そのためセンス部本体は液
体に直接接触せず、漏液が発生した場合受台の底面に延
伸された吸液材により毛細管現象でセンス部まで漏液の
一部を導いてセンスする。従って多量の漏液があった場
合でもセンス部本体が液中に浸漬することはなく吸液材
の交換のみで再びセンス可能状態となり、センス部の耐
久性を向上させ、吸液材の面積を大きくすることにより
早期にしかも精度よく検出できる。[Operation] The sensing part of the liquid sensor of the present invention is an optical sensor, a humidity sensor, etc., and has a part of the liquid-absorbing material that absorbs liquid in the sensing area of the liquid sensor, and the liquid-absorbing material reaches the detection position of the liquid to be detected. has been stretched. Therefore, the sensing part main body does not come into direct contact with the liquid, and when liquid leaks, a part of the leaked liquid is guided to the sensing part by capillary action by the liquid-absorbing material stretched on the bottom of the pedestal and sensed. Therefore, even if a large amount of liquid leaks, the sensing part itself will not be immersed in the liquid and will be able to sense again just by replacing the liquid absorbing material, improving the durability of the sensing part and reducing the area of the liquid absorbing material. By increasing the size, early and accurate detection is possible.
【０００６】[0006]
【実施例】本発明の液体センサを漏液センサに適用した
一実施例を図面を参照して説明する。図１に示す漏液セ
ンサＡのセンス部９は、例えば光反射型の光センサであ
り、センス部９の下方面にＬＥＤ等の投光素子９ａおよ
びフォトトランジスタ等の受光素子９ｂが設けられてお
り、反射光を検出する。センス部９の内部には半導体素
子等からなる電子回路が内蔵され、また、このセンス部
９に電源を供給したり出力信号を送出するための接続線
１１が取着され、この接続線１１の他端は図示しない電
源・制御部等に電気的に接続されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the liquid sensor of the present invention is applied to a liquid leakage sensor will be described with reference to the drawings. The sensing part 9 of the leakage sensor A shown in FIG. 1 is, for example, a light reflection type optical sensor, and a light emitting element 9a such as an LED and a light receiving element 9b such as a phototransistor are provided on the lower surface of the sensing part 9. and detects reflected light. An electronic circuit consisting of a semiconductor element, etc. is built into the sensing section 9, and a connecting wire 11 for supplying power to the sensing section 9 and transmitting an output signal is attached to the sensing section 9. The other end is electrically connected to a power supply/control unit, etc. (not shown).
【０００７】一方、センス部９の下面側には、その一部
分がセンス部９の光電検出の可能領域（センシングエリ
ア）例えば下面に接触し、この実施例では液漏れ液体の
流出可能位置すなわちセンス部９外部に向って延伸する
帯状の広い面積例えば８０ｃｍ２程度の吸液材１０が設
けられている。この吸液材１０は、通常は光を十分に反
射するが吸液すると光を反射しにくくなるような性質を
有するもの例えば市販されている白色の吸取紙を使用す
る。On the other hand, a portion of the lower surface side of the sensing section 9 contacts the photoelectrically detectable area (sensing area) of the sensing section 9, for example, the lower surface, and in this embodiment, the sensing section 9. A liquid-absorbing material 10 with a wide band-like area, for example, about 80 cm2, extending outward is provided. As the liquid-absorbing material 10, a material having a property that normally reflects light sufficiently but becomes difficult to reflect light when liquid is absorbed, such as a commercially available white absorbent paper, is used.
【０００８】次に、前記吸液材１０の下面には、その表
面が光を反射しにくいように形成されたもの、例えば少
なくとも表面が黒色の平板状の反射材１３が密着して取
り付けられている。そして、前記センス部９、吸液材１
０、反射材１３は、固定具１４により圧接するごとく固
定されている。さらにこの固定具１４の下面側にはセン
ス部９を支持する平板状の部材スペーサ１６が接着テー
プ１５によって装着されている。前記構成の漏液センサ
Ａは、液体収納容器５が載置され、かつ、漏液１２を貯
留するための容器をなす受台６の内側底面に載置される
。そして、漏液１２が有った場合、吸液材１０が漏液１
２の一部を吸取ることにより漏液有りを検知し、図示し
ない制御部等により例えば警報を発生する。[0008] Next, on the lower surface of the liquid absorbing material 10, a material whose surface is formed so as not to easily reflect light, for example, a reflective material 13 in the form of a flat plate with at least a black surface is closely attached. There is. Then, the sense part 9, the liquid absorbing material 1
0. The reflective material 13 is fixed by a fixture 14 so as to be pressed against it. Furthermore, a flat member spacer 16 for supporting the sense section 9 is attached to the lower surface side of the fixture 14 with an adhesive tape 15. The liquid leakage sensor A having the above configuration is placed on the inner bottom surface of a pedestal 6, on which the liquid storage container 5 is placed and which forms a container for storing the leaked liquid 12. If there is a liquid leakage 12, the liquid absorbing material 10
The presence of liquid leakage is detected by sucking up a portion of 2, and a control unit (not shown) or the like generates an alarm, for example.
【０００９】なお、前記吸液材１０は、少なくとも受台
６の底部上面接触する長さに延伸され、さらに延伸され
る長さ・面積・形状等は検出したいエリアや吸液材１０
の毛細管現象によりセンス部９に漏液が達する時間、セ
ンス部９の応答時間等の関連で最適のものが選定される
。また、前記スペーサ１６は、漏液１２に溶解されない
耐液性を有する材質のものであり、漏液１２の種類によ
って種々選定され、例えば、金属、セラミックあるいは
プラスチック製等の材料が採用される。スペーサ１６の
長さ、すなわちセンス部９などを受台６の底面上から支
持し持ち上げる高さは、センス部９が漏液１２中に浸漬
されない程度に適宜設定される。The liquid absorbent material 10 is stretched to at least a length that makes contact with the top surface of the bottom of the pedestal 6, and the length, area, shape, etc. of the stretched material are determined according to the area to be detected and the liquid absorbent material 10.
The optimum one is selected in relation to the time required for the leaked liquid to reach the sensing section 9 due to capillary action, the response time of the sensing section 9, etc. The spacer 16 is made of a liquid-resistant material that is not dissolved in the leaked liquid 12, and is selected from various materials depending on the type of the leaked liquid 12. For example, materials such as metal, ceramic, or plastic are used. The length of the spacer 16, that is, the height at which the sense part 9 and the like are supported and lifted from the bottom surface of the pedestal 6, is appropriately set to such an extent that the sense part 9 is not immersed in the leaking liquid 12.
【００１０】このような構成の液体センサＡにより漏液
を検出する動作について説明する。液体収納容器５から
液漏れが発生し、受台６に漏液１２が広がると延伸して
設けられた吸液材１０の遊端により吸液し毛細管現象で
センス部９の下面部分に液体が導かれる。このようにし
て吸液したことにより吸液材１０である吸取紙の色は吸
液前は白色であり、光を良好に反射するが、吸液後は変
色して半透明状態になり、吸取紙の光の透過率が変化し
て良好に透過するようになる。この時、この吸取紙の下
面には黒色の反射材１３が配置されているので、それに
伴い投光素子から投光され吸液材１０を透過した光は反
射材１３により反射される光量が激減変化して受光素子
では検知されない。このような受光素子の出力信号の変
化により、漏液１２が有ったことが検知される。これら
の漏液検知により出力される信号により、ブサーやラン
プの点滅等の警報手段により漏液が表示される。The operation of detecting liquid leakage using the liquid sensor A having such a configuration will be explained. When a liquid leaks from the liquid storage container 5 and spreads to the pedestal 6, the liquid is absorbed by the free end of the extended liquid-absorbing material 10, and the liquid flows to the lower surface of the sense part 9 due to capillary action. be guided. As a result of absorbing the liquid in this way, the color of the absorbent paper, which is the liquid absorbing material 10, is white before absorbing the liquid and reflects light well, but after absorbing the liquid, it changes color and becomes translucent. The light transmittance of the paper changes and becomes better. At this time, since a black reflective material 13 is placed on the bottom surface of the absorbent paper, the amount of light that is emitted from the light projecting element and transmitted through the liquid absorbing material 10 is drastically reduced by the reflective material 13. changes and is not detected by the light receiving element. The presence of liquid leakage 12 is detected by such a change in the output signal of the light receiving element. Based on the signals outputted by these liquid leakage detections, liquid leakage is indicated by alarm means such as a buzzer or a flashing lamp.
【００１１】そして、一旦漏液を検出センサＡは、吸液
材１０が吸液状態となり、そのままでは再使用が不可能
なため、例えば固定具１４を外して新しい吸液材１０と
交換することにより、容易に再使用が可能になる。また
、スペーサ１６により受台６底面からセンス部９を持ち
上げた状態にして配置しているので、たとえ一度に多量
の漏液１２が発生したとしても、従来のようにセンス部
９を受台６に直接固定する構成のものと比較して、セン
ス部９が漏液１２中に浸漬されてしまう可能性は極めて
低い。したがって、センス部９が漏液１２によってダメ
ージを受けにくくなり、耐久性を向上させることができ
る。さらに、最適位置に容易に移動できる。かつ、従来
のように、接着テープ１５が漏液１２によって溶解し、
センス部９等がスペーサ１６から脱落転倒することもな
い。[0011] Once the liquid leakage detection sensor A detects the liquid, the liquid absorbing material 10 becomes liquid absorbing and cannot be reused as it is. This allows for easy reuse. In addition, since the sense part 9 is raised from the bottom of the pedestal 6 by the spacer 16, even if a large amount of liquid leaks 12 at once, the sense part 9 can be moved from the pedestal 6 as in the conventional case. The possibility that the sense part 9 will be immersed in the leaking liquid 12 is extremely low compared to a structure in which the sense part 9 is directly fixed to the liquid. Therefore, the sense part 9 is less likely to be damaged by the liquid leakage 12, and its durability can be improved. Furthermore, it can be easily moved to the optimum position. Moreover, as in the conventional case, the adhesive tape 15 is dissolved by the leakage liquid 12,
The sense section 9 and the like will not fall off from the spacer 16 and fall down.
【００１２】また、吸液材１０のセンス部９外に延伸し
た部分の形状、構造は、受台６等の形状や漏液１２の量
等に対応して最適に設定できるので、漏液１２を的確に
検知できる。なお、前記実施例では、センス部９として
光反射型の光センサを使用した例について説明したが、
反射光を検出するタイプのものであればよいので、例え
ば、前記センス部９に投光用および受光用の光ファイバ
ーの一端を配置し、他端に発光素子および受光素子を配
置するように構成してもよい。Furthermore, the shape and structure of the portion of the liquid-absorbing material 10 extending outside the sensing portion 9 can be optimally set depending on the shape of the pedestal 6, etc., the amount of liquid leakage 12, etc. can be detected accurately. In the above embodiment, an example in which a light reflection type optical sensor was used as the sense section 9 was explained.
Any type that detects reflected light may be used. For example, one end of an optical fiber for projecting and receiving light may be disposed in the sense section 9, and a light emitting element and a light receiving element may be disposed at the other end. You can.
【００１３】また、吸液材１０の吸液を光センサ等の光
学的手段で検出する代りに、他の手段、例えば、湿度に
よってその比抵抗が著しく変化する。ＭｎＷＯ４、Ｎｉ
ＷＯ４、ＺｎＣｒ２Ｏ４等の繊維金属酸化物を用いた湿
度センサ、あるいは、静電容量型センサ等、吸液材１０
が吸液したことを検知できるセンサであれば使用できる
。Further, instead of detecting the liquid absorbed by the liquid absorbing material 10 by optical means such as an optical sensor, the specific resistance of the liquid absorbing material 10 changes significantly depending on other means, for example, humidity. MnWO4, Ni
Liquid absorbing material 10, such as a humidity sensor using fiber metal oxide such as WO4 or ZnCr2O4, or a capacitance type sensor
Any sensor that can detect that liquid has been absorbed can be used.
【００１４】また、吸液材１０として、市販の吸取紙を
使用した例について説明したが、漏液１２を吸取り吸上
げられるものであればよく、例えば和紙、樹脂等の不織
布あるいはセラミック系のもの多孔性の材料等、毛細管
現象効果により吸液効果を有するものであれば使用でき
る。また、漏液１２が着色しており光透過率が低く、吸
液材１０が吸液していない時と吸液した時とを判別でき
る場合には、前記反射材１３を省略することもできる。
また、吸液材１０が吸液することにより光透過率が低く
なるように変色する場合には、前記同様に反射材１３を
省略できる。[0014] Furthermore, although an example has been described in which commercially available absorbent paper is used as the liquid absorbing material 10, any material that can absorb and absorb the leaked liquid 12 may be used, such as Japanese paper, non-woven fabric made of resin, or ceramic material. Any material that has a liquid-absorbing effect due to capillary action, such as porous materials, can be used. Further, if the leaking liquid 12 is colored and has low light transmittance, and it is possible to distinguish when the liquid absorbing material 10 is not absorbing liquid and when it is absorbing liquid, the reflective material 13 may be omitted. . Further, in the case where the liquid-absorbing material 10 changes color so that the light transmittance decreases due to liquid absorption, the reflective material 13 can be omitted as described above.
【００１５】さらに、反射材１３の色は、黒いろに限定
されるものではなく、吸液材１０の吸液による変色に対
応して選定し、光の透過率の変化がなるべく大となるよ
うにしておけばよい。さらに、漏液センサＡの他の例と
しては、センス部９などを受台６の外部に設置し、吸液
材１０を受台６内部の底面まで達するように延伸して設
けてもよい。Furthermore, the color of the reflective material 13 is not limited to black, but is selected in accordance with the discoloration of the liquid absorbing material 10 due to liquid absorption, so that the change in light transmittance is as large as possible. Just leave it as . Furthermore, as another example of the liquid leakage sensor A, the sensing portion 9 or the like may be installed outside the pedestal 6, and the liquid absorbing material 10 may be extended and provided so as to reach the bottom surface inside the pedestal 6.
【００１６】なお、検出する液体としては、吸液材１０
に吸液されるものであれば全んど漏液検出が可能であり
、例えば、シンナー、水、現像液、その他の処理薬液等
が検出できる。従って、本発明液体センサは、次のよう
な装置に適用可能である。例えば、半導体製造装置で、
シンナーで溶かしたフォトレジスト液を半導体ウェハ面
に塗布するレジスト塗布装置内に設置してシンナー液漏
れを迅速に検出したり、また、現像装置の現像液やリン
ス用純水の漏液を検出する。[0016] The liquid to be detected is the liquid absorbing material 10.
It is possible to detect liquid leakage from anything that is absorbed by the liquid, such as thinner, water, developer, and other processing chemicals. Therefore, the liquid sensor of the present invention is applicable to the following devices. For example, in semiconductor manufacturing equipment,
Installed in a resist coating device that applies photoresist solution dissolved with thinner to the semiconductor wafer surface, it can quickly detect leakage of thinner solution, or detect leakage of developer solution or deionized water for rinsing from a developing device. .
【００１７】さらに、薬液や純水等により半導体ウェハ
面を処理、洗浄するための洗浄装置等に使用できる。Furthermore, the present invention can be used in a cleaning device for processing and cleaning the surface of a semiconductor wafer using a chemical solution, pure water, or the like.
【００１８】[0018]
【発明の効果】以上の説明からも明らかなように、本発
明の液体センサによれば、吸液材を延伸して設けたため
、多量の漏液が発生してもセンス部が漏液によって浸漬
されることを防止できる。そのため漏液があった場合で
も吸液材のみを交換すればよいため、非常に経済的であ
る。また、吸液材を延伸することにより広い範囲を精度
よく検知することができ、さらにスペーサを移動するこ
とでセンス部の位置を簡単に変更することができる。[Effects of the Invention] As is clear from the above explanation, according to the liquid sensor of the present invention, since the liquid absorbing material is provided in an extended manner, even if a large amount of liquid leaks, the sensing portion will not be immersed due to the liquid leakage. You can prevent this from happening. Therefore, even if there is liquid leakage, only the liquid absorbing material needs to be replaced, which is very economical. Furthermore, by stretching the liquid absorbent material, a wide range can be detected with high accuracy, and furthermore, by moving the spacer, the position of the sensing portion can be easily changed.
【図１】本発明の液体センサを適用した一実施例側面図
[Fig. 1] Side view of an embodiment to which the liquid sensor of the present invention is applied.
【図２】従来例の側面図[Figure 2] Side view of conventional example
５・・・・・・液体収納容器 ６・・・・・・受台 ８・・・・・・漏液（液体） ９・・・・・・センス部 １０・・・・・・吸液材 Ａ・・・・・・液体センサ 5...Liquid storage container 6...cradle 8...Leakage (liquid) 9...Sense section 10...Liquid absorbing material A...Liquid sensor
Claims (1)
、液体を検知するセンス部と、前記センス部のセンシン
グエリアに少なくとも一部が存在し、液体の有無被検査
位置まで延伸された吸液材とを備えたことを特徴とする
液体センサ。1. A liquid sensor for detecting the presence or absence of a liquid, the sensor comprising: a sense part for detecting liquid; and a suction element, at least a part of which is present in the sensing area of the sense part, and which extends to a position to be inspected for the presence or absence of liquid. A liquid sensor characterized by comprising a liquid material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3088228A JP3031735B2 (en) | 1991-04-19 | 1991-04-19 | Liquid processing equipment for semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3088228A JP3031735B2 (en) | 1991-04-19 | 1991-04-19 | Liquid processing equipment for semiconductor manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04319639A true JPH04319639A (en) | 1992-11-10 |
| JP3031735B2 JP3031735B2 (en) | 2000-04-10 |
Family
ID=13937013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3088228A Expired - Fee Related JP3031735B2 (en) | 1991-04-19 | 1991-04-19 | Liquid processing equipment for semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3031735B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007125846A (en) * | 2005-11-07 | 2007-05-24 | Matsushita Electric Ind Co Ltd | Screen printing equipment |
| JP2011067729A (en) * | 2009-09-24 | 2011-04-07 | Kirin Brewery Co Ltd | Liquid leakage detection device and cask cleaning system provided with the same |
-
1991
- 1991-04-19 JP JP3088228A patent/JP3031735B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007125846A (en) * | 2005-11-07 | 2007-05-24 | Matsushita Electric Ind Co Ltd | Screen printing equipment |
| JP4640117B2 (en) * | 2005-11-07 | 2011-03-02 | パナソニック株式会社 | Screen printing device |
| JP2011067729A (en) * | 2009-09-24 | 2011-04-07 | Kirin Brewery Co Ltd | Liquid leakage detection device and cask cleaning system provided with the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3031735B2 (en) | 2000-04-10 |
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