KR970048943A - Phase reversal mask and its manufacturing method - Google Patents
Phase reversal mask and its manufacturing method Download PDFInfo
- Publication number
- KR970048943A KR970048943A KR1019950048042A KR19950048042A KR970048943A KR 970048943 A KR970048943 A KR 970048943A KR 1019950048042 A KR1019950048042 A KR 1019950048042A KR 19950048042 A KR19950048042 A KR 19950048042A KR 970048943 A KR970048943 A KR 970048943A
- Authority
- KR
- South Korea
- Prior art keywords
- pattern
- phase inversion
- layer
- mask
- chromium
- Prior art date
Links
Abstract
본 발명은 반도체 제조 기술중 패턴을 형성하는 리소그래픽 공정에 사용되는 림형 위상반전 마스크에 관한 것으로, 투명기판 상부에 크롬패턴이 구비되고, 상기 크롬패턴의 측면에 공기층에 제거되도록 투명기판의 일정부분까지 위상반전막 패턴을 구비시켜 웨이퍼상의 패턴의 프로파일과 촛점 여유도를 향상 시킬 수 있는 기술이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rim type phase reversal mask used in a lithographic process for forming a pattern in a semiconductor manufacturing technology. It is a technology that can improve the profile and focus margin of the pattern on the wafer by providing the phase inversion film pattern.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제3도는 제1도의 크롬패턴과 위상반전막 패턴을 확대하여 도시한 단면도,3 is an enlarged cross-sectional view of the chromium pattern and the phase inversion film pattern of FIG.
제4도는 본 발명에 의해 제조한 위상반전 마스크를 도시한 단면도.4 is a cross-sectional view showing a phase inversion mask manufactured by the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950048042A KR970048943A (en) | 1995-12-08 | 1995-12-08 | Phase reversal mask and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950048042A KR970048943A (en) | 1995-12-08 | 1995-12-08 | Phase reversal mask and its manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970048943A true KR970048943A (en) | 1997-07-29 |
Family
ID=66593870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950048042A KR970048943A (en) | 1995-12-08 | 1995-12-08 | Phase reversal mask and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970048943A (en) |
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1995
- 1995-12-08 KR KR1019950048042A patent/KR970048943A/en not_active Application Discontinuation
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Legal Events
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |