KR970047023U - Thermocouples in bell furnace - Google Patents

Thermocouples in bell furnace

Info

Publication number
KR970047023U
KR970047023U KR2019950038257U KR19950038257U KR970047023U KR 970047023 U KR970047023 U KR 970047023U KR 2019950038257 U KR2019950038257 U KR 2019950038257U KR 19950038257 U KR19950038257 U KR 19950038257U KR 970047023 U KR970047023 U KR 970047023U
Authority
KR
South Korea
Prior art keywords
thermocouples
bell furnace
bell
furnace
Prior art date
Application number
KR2019950038257U
Other languages
Korean (ko)
Other versions
KR200235611Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950038257U priority Critical patent/KR200235611Y1/en
Publication of KR970047023U publication Critical patent/KR970047023U/en
Application granted granted Critical
Publication of KR200235611Y1 publication Critical patent/KR200235611Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
KR2019950038257U 1995-12-05 1995-12-05 Thermocouples for semiconductor manufacturing vertical furnace KR200235611Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038257U KR200235611Y1 (en) 1995-12-05 1995-12-05 Thermocouples for semiconductor manufacturing vertical furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038257U KR200235611Y1 (en) 1995-12-05 1995-12-05 Thermocouples for semiconductor manufacturing vertical furnace

Publications (2)

Publication Number Publication Date
KR970047023U true KR970047023U (en) 1997-07-31
KR200235611Y1 KR200235611Y1 (en) 2001-10-25

Family

ID=60874393

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038257U KR200235611Y1 (en) 1995-12-05 1995-12-05 Thermocouples for semiconductor manufacturing vertical furnace

Country Status (1)

Country Link
KR (1) KR200235611Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040003885A (en) * 2002-07-04 2004-01-13 삼성전자주식회사 Temperature detecting device of a diffusion furnace

Also Published As

Publication number Publication date
KR200235611Y1 (en) 2001-10-25

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090526

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee