KR970046727U - 반도체막도포시스템의 세정장치 - Google Patents

반도체막도포시스템의 세정장치

Info

Publication number
KR970046727U
KR970046727U KR2019950048841U KR19950048841U KR970046727U KR 970046727 U KR970046727 U KR 970046727U KR 2019950048841 U KR2019950048841 U KR 2019950048841U KR 19950048841 U KR19950048841 U KR 19950048841U KR 970046727 U KR970046727 U KR 970046727U
Authority
KR
South Korea
Prior art keywords
cleaner
semiconductor film
film coating
coating system
semiconductor
Prior art date
Application number
KR2019950048841U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950048841U priority Critical patent/KR970046727U/ko
Publication of KR970046727U publication Critical patent/KR970046727U/ko

Links

KR2019950048841U 1995-12-27 1995-12-27 반도체막도포시스템의 세정장치 KR970046727U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950048841U KR970046727U (ko) 1995-12-27 1995-12-27 반도체막도포시스템의 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950048841U KR970046727U (ko) 1995-12-27 1995-12-27 반도체막도포시스템의 세정장치

Publications (1)

Publication Number Publication Date
KR970046727U true KR970046727U (ko) 1997-07-31

Family

ID=60878361

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950048841U KR970046727U (ko) 1995-12-27 1995-12-27 반도체막도포시스템의 세정장치

Country Status (1)

Country Link
KR (1) KR970046727U (ko)

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