KR970046700U - Liquefied Gas Line Heating System for Etching Equipment - Google Patents

Liquefied Gas Line Heating System for Etching Equipment

Info

Publication number
KR970046700U
KR970046700U KR2019950047443U KR19950047443U KR970046700U KR 970046700 U KR970046700 U KR 970046700U KR 2019950047443 U KR2019950047443 U KR 2019950047443U KR 19950047443 U KR19950047443 U KR 19950047443U KR 970046700 U KR970046700 U KR 970046700U
Authority
KR
South Korea
Prior art keywords
heating system
liquefied gas
gas line
etching equipment
line heating
Prior art date
Application number
KR2019950047443U
Other languages
Korean (ko)
Other versions
KR200208211Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950047443U priority Critical patent/KR200208211Y1/en
Publication of KR970046700U publication Critical patent/KR970046700U/en
Application granted granted Critical
Publication of KR200208211Y1 publication Critical patent/KR200208211Y1/en

Links

KR2019950047443U 1995-12-26 1995-12-26 Liquefied Gas Line Heating Equipment for Etching Equipment KR200208211Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950047443U KR200208211Y1 (en) 1995-12-26 1995-12-26 Liquefied Gas Line Heating Equipment for Etching Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950047443U KR200208211Y1 (en) 1995-12-26 1995-12-26 Liquefied Gas Line Heating Equipment for Etching Equipment

Publications (2)

Publication Number Publication Date
KR970046700U true KR970046700U (en) 1997-07-31
KR200208211Y1 KR200208211Y1 (en) 2001-11-30

Family

ID=60843118

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950047443U KR200208211Y1 (en) 1995-12-26 1995-12-26 Liquefied Gas Line Heating Equipment for Etching Equipment

Country Status (1)

Country Link
KR (1) KR200208211Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100674476B1 (en) * 2005-04-28 2007-01-30 (주)티티에스 Block heater for gas line

Also Published As

Publication number Publication date
KR200208211Y1 (en) 2001-11-30

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090922

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee