KR970046700U - Liquefied Gas Line Heating System for Etching Equipment - Google Patents
Liquefied Gas Line Heating System for Etching EquipmentInfo
- Publication number
- KR970046700U KR970046700U KR2019950047443U KR19950047443U KR970046700U KR 970046700 U KR970046700 U KR 970046700U KR 2019950047443 U KR2019950047443 U KR 2019950047443U KR 19950047443 U KR19950047443 U KR 19950047443U KR 970046700 U KR970046700 U KR 970046700U
- Authority
- KR
- South Korea
- Prior art keywords
- heating system
- liquefied gas
- gas line
- etching equipment
- line heating
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950047443U KR200208211Y1 (en) | 1995-12-26 | 1995-12-26 | Liquefied Gas Line Heating Equipment for Etching Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950047443U KR200208211Y1 (en) | 1995-12-26 | 1995-12-26 | Liquefied Gas Line Heating Equipment for Etching Equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046700U true KR970046700U (en) | 1997-07-31 |
KR200208211Y1 KR200208211Y1 (en) | 2001-11-30 |
Family
ID=60843118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950047443U KR200208211Y1 (en) | 1995-12-26 | 1995-12-26 | Liquefied Gas Line Heating Equipment for Etching Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200208211Y1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100674476B1 (en) * | 2005-04-28 | 2007-01-30 | (주)티티에스 | Block heater for gas line |
-
1995
- 1995-12-26 KR KR2019950047443U patent/KR200208211Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200208211Y1 (en) | 2001-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20090922 Year of fee payment: 10 |
|
LAPS | Lapse due to unpaid annual fee |