KR970046682U - Di 저장고 - Google Patents
Di 저장고Info
- Publication number
- KR970046682U KR970046682U KR2019950055243U KR19950055243U KR970046682U KR 970046682 U KR970046682 U KR 970046682U KR 2019950055243 U KR2019950055243 U KR 2019950055243U KR 19950055243 U KR19950055243 U KR 19950055243U KR 970046682 U KR970046682 U KR 970046682U
- Authority
- KR
- South Korea
- Prior art keywords
- storage
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950055243U KR0131570Y1 (ko) | 1995-12-30 | 1995-12-30 | Di 저장고 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950055243U KR0131570Y1 (ko) | 1995-12-30 | 1995-12-30 | Di 저장고 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046682U true KR970046682U (ko) | 1997-07-31 |
KR0131570Y1 KR0131570Y1 (ko) | 1999-02-01 |
Family
ID=19443665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950055243U KR0131570Y1 (ko) | 1995-12-30 | 1995-12-30 | Di 저장고 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0131570Y1 (ko) |
-
1995
- 1995-12-30 KR KR2019950055243U patent/KR0131570Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0131570Y1 (ko) | 1999-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050802 Year of fee payment: 8 |
|
LAPS | Lapse due to unpaid annual fee |