KR970046607U - 공정용액 교환수단을 구비한 공정챔버 - Google Patents

공정용액 교환수단을 구비한 공정챔버

Info

Publication number
KR970046607U
KR970046607U KR2019950044453U KR19950044453U KR970046607U KR 970046607 U KR970046607 U KR 970046607U KR 2019950044453 U KR2019950044453 U KR 2019950044453U KR 19950044453 U KR19950044453 U KR 19950044453U KR 970046607 U KR970046607 U KR 970046607U
Authority
KR
South Korea
Prior art keywords
exchange means
solution exchange
process chamber
chamber
process solution
Prior art date
Application number
KR2019950044453U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950044453U priority Critical patent/KR970046607U/ko
Publication of KR970046607U publication Critical patent/KR970046607U/ko

Links

KR2019950044453U 1995-12-20 1995-12-20 공정용액 교환수단을 구비한 공정챔버 KR970046607U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950044453U KR970046607U (ko) 1995-12-20 1995-12-20 공정용액 교환수단을 구비한 공정챔버

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950044453U KR970046607U (ko) 1995-12-20 1995-12-20 공정용액 교환수단을 구비한 공정챔버

Publications (1)

Publication Number Publication Date
KR970046607U true KR970046607U (ko) 1997-07-31

Family

ID=60833626

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950044453U KR970046607U (ko) 1995-12-20 1995-12-20 공정용액 교환수단을 구비한 공정챔버

Country Status (1)

Country Link
KR (1) KR970046607U (ko)

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Legal Events

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WITN Withdrawal due to no request for examination