KR970046603U - Photosensitive agent recovery device of photosensitive agent coating equipment - Google Patents

Photosensitive agent recovery device of photosensitive agent coating equipment

Info

Publication number
KR970046603U
KR970046603U KR2019950038947U KR19950038947U KR970046603U KR 970046603 U KR970046603 U KR 970046603U KR 2019950038947 U KR2019950038947 U KR 2019950038947U KR 19950038947 U KR19950038947 U KR 19950038947U KR 970046603 U KR970046603 U KR 970046603U
Authority
KR
South Korea
Prior art keywords
photosensitive agent
recovery device
coating equipment
agent coating
agent recovery
Prior art date
Application number
KR2019950038947U
Other languages
Korean (ko)
Other versions
KR0132208Y1 (en
Inventor
김지성
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950038947U priority Critical patent/KR0132208Y1/en
Publication of KR970046603U publication Critical patent/KR970046603U/en
Application granted granted Critical
Publication of KR0132208Y1 publication Critical patent/KR0132208Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
KR2019950038947U 1995-12-07 1995-12-07 Collection apparatus of photoresist in photoresist coating apparatus KR0132208Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038947U KR0132208Y1 (en) 1995-12-07 1995-12-07 Collection apparatus of photoresist in photoresist coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038947U KR0132208Y1 (en) 1995-12-07 1995-12-07 Collection apparatus of photoresist in photoresist coating apparatus

Publications (2)

Publication Number Publication Date
KR970046603U true KR970046603U (en) 1997-07-31
KR0132208Y1 KR0132208Y1 (en) 1999-02-01

Family

ID=19432490

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038947U KR0132208Y1 (en) 1995-12-07 1995-12-07 Collection apparatus of photoresist in photoresist coating apparatus

Country Status (1)

Country Link
KR (1) KR0132208Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100845258B1 (en) * 2002-07-13 2008-07-10 엘지디스플레이 주식회사 System and method of recovering photo resist and it's remaking method using the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100475731B1 (en) * 1997-09-13 2005-07-05 삼성전자주식회사 Photoresist Injection Control System

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100845258B1 (en) * 2002-07-13 2008-07-10 엘지디스플레이 주식회사 System and method of recovering photo resist and it's remaking method using the same

Also Published As

Publication number Publication date
KR0132208Y1 (en) 1999-02-01

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Legal Events

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E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20040820

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee