KR970045190U - A device for measuring the spatial distribution of etchants using optical emission spectroscopy - Google Patents

A device for measuring the spatial distribution of etchants using optical emission spectroscopy

Info

Publication number
KR970045190U
KR970045190U KR2019950052640U KR19950052640U KR970045190U KR 970045190 U KR970045190 U KR 970045190U KR 2019950052640 U KR2019950052640 U KR 2019950052640U KR 19950052640 U KR19950052640 U KR 19950052640U KR 970045190 U KR970045190 U KR 970045190U
Authority
KR
South Korea
Prior art keywords
etchants
measuring
spatial distribution
optical emission
emission spectroscopy
Prior art date
Application number
KR2019950052640U
Other languages
Korean (ko)
Other versions
KR0132085Y1 (en
Inventor
최창주
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019950052640U priority Critical patent/KR0132085Y1/en
Publication of KR970045190U publication Critical patent/KR970045190U/en
Application granted granted Critical
Publication of KR0132085Y1 publication Critical patent/KR0132085Y1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
KR2019950052640U 1995-12-29 1995-12-29 Device for measuring spatial distribution of etching material using optical emission spectroscopy KR0132085Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950052640U KR0132085Y1 (en) 1995-12-29 1995-12-29 Device for measuring spatial distribution of etching material using optical emission spectroscopy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950052640U KR0132085Y1 (en) 1995-12-29 1995-12-29 Device for measuring spatial distribution of etching material using optical emission spectroscopy

Publications (2)

Publication Number Publication Date
KR970045190U true KR970045190U (en) 1997-07-31
KR0132085Y1 KR0132085Y1 (en) 1999-03-30

Family

ID=19441822

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950052640U KR0132085Y1 (en) 1995-12-29 1995-12-29 Device for measuring spatial distribution of etching material using optical emission spectroscopy

Country Status (1)

Country Link
KR (1) KR0132085Y1 (en)

Also Published As

Publication number Publication date
KR0132085Y1 (en) 1999-03-30

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