DE29715904U1 - Interference optical measuring device - Google Patents

Interference optical measuring device

Info

Publication number
DE29715904U1
DE29715904U1 DE29715904U DE29715904U DE29715904U1 DE 29715904 U1 DE29715904 U1 DE 29715904U1 DE 29715904 U DE29715904 U DE 29715904U DE 29715904 U DE29715904 U DE 29715904U DE 29715904 U1 DE29715904 U1 DE 29715904U1
Authority
DE
Germany
Prior art keywords
measuring device
optical measuring
interference optical
interference
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29715904U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GF MESSTECHNIK GMBH, DE
Original Assignee
OMECA MESSTECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OMECA MESSTECHNIK GmbH filed Critical OMECA MESSTECHNIK GmbH
Priority to DE29715904U priority Critical patent/DE29715904U1/en
Publication of DE29715904U1 publication Critical patent/DE29715904U1/en
Priority to DE19840725A priority patent/DE19840725B4/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
DE29715904U 1997-09-01 1997-09-01 Interference optical measuring device Expired - Lifetime DE29715904U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE29715904U DE29715904U1 (en) 1997-09-01 1997-09-01 Interference optical measuring device
DE19840725A DE19840725B4 (en) 1997-09-01 1998-08-28 Method and interference-optical measuring device for optoelectronic measurement of the microstructures of a microelectronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29715904U DE29715904U1 (en) 1997-09-01 1997-09-01 Interference optical measuring device

Publications (1)

Publication Number Publication Date
DE29715904U1 true DE29715904U1 (en) 1997-10-23

Family

ID=8045549

Family Applications (2)

Application Number Title Priority Date Filing Date
DE29715904U Expired - Lifetime DE29715904U1 (en) 1997-09-01 1997-09-01 Interference optical measuring device
DE19840725A Expired - Fee Related DE19840725B4 (en) 1997-09-01 1998-08-28 Method and interference-optical measuring device for optoelectronic measurement of the microstructures of a microelectronic component

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19840725A Expired - Fee Related DE19840725B4 (en) 1997-09-01 1998-08-28 Method and interference-optical measuring device for optoelectronic measurement of the microstructures of a microelectronic component

Country Status (1)

Country Link
DE (2) DE29715904U1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19926019A1 (en) * 1999-05-31 2000-12-21 Dieter Steinberg Process for monitoring growing layers used in vacuum coating processes comprises directing a measuring beam before starting the layer growth into a galvanic bath and onto a layer substrate
AT411496B (en) * 2002-01-25 2004-01-26 Gornik Erich Dipl Ing Dr METHOD AND DEVICE FOR OPTICALLY TESTING SEMICONDUCTOR COMPONENTS
GB2390153A (en) * 2002-06-25 2003-12-31 Denselight Semiconductors Pte Measurement of facet reflectivity

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3610530A1 (en) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo SURFACE STRUCTURE MEASURING DEVICE
DE3637477A1 (en) * 1986-11-04 1988-05-11 Wacker Chemitronic METHOD AND DEVICE FOR DETERMINING THE QUALITY OF SURFACES, IN PARTICULAR OF SEMICONDUCTOR DISC
US4848908A (en) * 1983-10-24 1989-07-18 Lockheed Missiles & Space Company, Inc. Optical heterodyne roughness measurement system
DE3906118A1 (en) * 1989-02-28 1990-08-30 Bosch Gmbh Robert DEVICE FOR INTERFEROMETRIC DETECTION OF SURFACE STRUCTURES
EP0498541A1 (en) * 1991-02-08 1992-08-12 Hughes Aircraft Company Interferometric laser profilometer
DE4108944A1 (en) * 1991-03-19 1992-09-24 Haeusler Gerd Contactless measurement of surface shape of diffusely scattering objects e.g. semiconductor wafers - using interferometric arrangement for three=dimensional measurement with minimal coherence length and illumination aperture angle less than observation aperture angle
DE19525903A1 (en) * 1995-07-06 1997-01-09 Inst Halbleiterphysik Gmbh Surface characteristics examination device - splits light ray into reference ray, produced in beam splitter cube, and measuring ray reflected by test object, and displays both beams as light points on common evaluation device, e.g. observation screen or image processing system
DE19528513A1 (en) * 1995-08-03 1997-02-06 Haeusler Gerd Process for non-contact, quick and precise detection of the surface shape of objects

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4037798A1 (en) * 1990-11-28 1992-06-11 Kasprzak Henryk Analysing surface shape, esp. of non-rigid surface cornea of human eye - superimposing reflected, focussed measurement beam derived from coherent monochromatic beam onto reference beam to produce interference
US5202748A (en) * 1991-06-07 1993-04-13 Litel Instruments In situ process control system for steppers

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4848908A (en) * 1983-10-24 1989-07-18 Lockheed Missiles & Space Company, Inc. Optical heterodyne roughness measurement system
DE3610530A1 (en) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo SURFACE STRUCTURE MEASURING DEVICE
DE3637477A1 (en) * 1986-11-04 1988-05-11 Wacker Chemitronic METHOD AND DEVICE FOR DETERMINING THE QUALITY OF SURFACES, IN PARTICULAR OF SEMICONDUCTOR DISC
DE3906118A1 (en) * 1989-02-28 1990-08-30 Bosch Gmbh Robert DEVICE FOR INTERFEROMETRIC DETECTION OF SURFACE STRUCTURES
EP0498541A1 (en) * 1991-02-08 1992-08-12 Hughes Aircraft Company Interferometric laser profilometer
DE4108944A1 (en) * 1991-03-19 1992-09-24 Haeusler Gerd Contactless measurement of surface shape of diffusely scattering objects e.g. semiconductor wafers - using interferometric arrangement for three=dimensional measurement with minimal coherence length and illumination aperture angle less than observation aperture angle
DE19525903A1 (en) * 1995-07-06 1997-01-09 Inst Halbleiterphysik Gmbh Surface characteristics examination device - splits light ray into reference ray, produced in beam splitter cube, and measuring ray reflected by test object, and displays both beams as light points on common evaluation device, e.g. observation screen or image processing system
DE19528513A1 (en) * 1995-08-03 1997-02-06 Haeusler Gerd Process for non-contact, quick and precise detection of the surface shape of objects

Also Published As

Publication number Publication date
DE19840725B4 (en) 2005-08-04
DE19840725A1 (en) 1999-03-18

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19971204

R021 Search request validly filed

Effective date: 19980114

R163 Identified publications notified

Effective date: 19980330

R081 Change of applicant/patentee

Owner name: GF MESSTECHNIK GMBH, DE

Free format text: FORMER OWNER: OMECA MESSTECHNIK GMBH, 14513 TELTOW, DE

Effective date: 19981008

R150 Term of protection extended to 6 years

Effective date: 20010116

R151 Term of protection extended to 8 years

Effective date: 20040129

R152 Term of protection extended to 10 years

Effective date: 20051223

R071 Expiry of right