KR970031123A - High power laser diode - Google Patents

High power laser diode Download PDF

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Publication number
KR970031123A
KR970031123A KR1019950042601A KR19950042601A KR970031123A KR 970031123 A KR970031123 A KR 970031123A KR 1019950042601 A KR1019950042601 A KR 1019950042601A KR 19950042601 A KR19950042601 A KR 19950042601A KR 970031123 A KR970031123 A KR 970031123A
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KR
South Korea
Prior art keywords
layer
optical waveguide
ridge
semiconductor substrate
cladding layer
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KR1019950042601A
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Korean (ko)
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KR0155513B1 (en
Inventor
박경현
장동훈
이중기
박철순
조호성
Original Assignee
양승택
한국전자통신연구원
이준
한국전기통신공사
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Priority to KR1019950042601A priority Critical patent/KR0155513B1/en
Publication of KR970031123A publication Critical patent/KR970031123A/en
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Publication of KR0155513B1 publication Critical patent/KR0155513B1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/2202Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure by making a groove in the upper laser structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Semiconductor Lasers (AREA)

Abstract

본 발명은 고출력 레이저 다이오드에 관한 것으로서, 상부 및 하부 표면을 갖는 제 1 도전형의 반도체 기판과, 상기 반도체 기판의 상부 표면에 형성된 제 1 도전형의 제 1 클래드층과, 상기 제 1 클래드층의 상부에 불순물이 도핑되지 않고 형성된 제 1 광도파로층과, 상기 제 1 광도파로드층의 상부에 불순물이 도핑되지 않은 상기 제 1 광도파로층 보다 광굴절률이 큰 물질이 양자우물 구조로 형성된 활성층과, 상기 활성층의 상부에 불순물이 도핑되지 않은 상기 활성층 보다 광굴절률이 작은 상기 제 1 광도파로층과 동일한 물질로 형성된 제 2 클래드층과, 상기 제 2 광도파로층 상부에 소정 폭을 갖고 길이 방향으로 길게 형성되며 광굴절률이 제 2 광도파로 보다 작은 서브 릿지와, 상기 서브 릿지의 상부에 서브 릿지 보다 좁은 폭을 갖고 길이 방향으로 길게 형성된 제 2 도전형의 제 2 클래드층과, 상기 제 2 클래드층의 상부에 형성된 불순물이 고농도로 도핑된 제 2 도전형의 오믹접촉층과, 상기 반도체 기판의 하부 표면과 상기 릿지의 오믹접촉층에 형성된 제 1 및 제 2 도전형 전극을 포함한다. 따라서, 고출력 동작시 공진기 내의 광출력 밀도를 낮게하여 고차 모드 발생에 의한 방사 패턴의 변화를 방지하여 레이저 다이오드 모듈에서 출력되는 광량과 광출력의 안정도를 향상시킬 수 있다.The present invention relates to a high power laser diode, comprising: a first conductive semiconductor substrate having upper and lower surfaces, a first cladding layer of a first conductive type formed on an upper surface of the semiconductor substrate, and a first cladding layer; A first optical waveguide layer formed without impurities at an upper portion thereof, and an active layer formed of a quantum well structure with a material having a larger optical refractive index than the first optical waveguide layer having no impurities doped at an upper portion of the first optical waveguide layer; A second cladding layer formed of the same material as the first optical waveguide layer having a smaller optical refractive index than the active layer without impurities doped on the active layer, and having a predetermined width on the second optical waveguide layer in a length direction; A sub-ridge having an elongation and having a smaller optical refractive index than the second optical waveguide, and having a width narrower than that of the sub-ridge on the upper portion of the sub-ridge. A second cladding layer having a second conductivity type, an ohmic contact layer of a second conductivity type doped with a high concentration of impurities formed on the second cladding layer, and an ohmic contact between the lower surface of the semiconductor substrate and the ridge. And first and second conductivity type electrodes formed in the layer. Therefore, the light output density in the resonator may be lowered during the high output operation to prevent a change in the radiation pattern caused by the generation of the higher order mode, thereby improving the light quantity and the stability of the light output from the laser diode module.

Description

고출력 레이저 다이오드High power laser diode

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 2 도는 본 발명에 따른 고출력 레이저 다이오드의 사시도.2 is a perspective view of a high power laser diode according to the present invention;

Claims (5)

상부 및 하부 표면을 갖는 제 1 도전형의 반도체 기판과, 상기 반도체 기판의 상부 표면에 형성된 제 1 도전형의 제 1 클래드층과, 상기 제 1 클래드층의 상부에 불순물이 도핑되지 않고 형성된 제 1 광도파로층과, 상기 제 1 광도파로드층의 상부에 불순물이 도핑되지 않은 상기 제 1 광도파로층 보다 광굴절률이 큰 물질이 양자우물 구조로 형성된 활성층과, 상기 활성층의 상부에 불순물이 도핑되지 않은 상기 활성층 보다 광굴절률이 작은 상기 제 1 광도파로층과 동일한 물질로 형성된 제 2 클래드층과, 상기 제 2 광도파로층 상부에 소정 폭을 갖고 길이 방향으로 길게 형성되며 광굴절률이 제 2 광도파로 보다 작은 서브 릿지와, 상기 서브 릿지의 상부에 서브 릿지 보다 좁은 폭을 갖고 길이 방향으로 길게 형성된 제 2 도전형의 제 2 클래드층과, 상기 제 2 클래드층의 상부에 형성된 불순물이 고농도로 도핑된 제 2 도전형의 오믹접촉층과, 상기 반도체 기판의 하부 표면과 상기 릿지의 오믹접촉층에 형성된 제 1 및 제 2 도전형 전극을 포함하는 고출력 레이저 다이오드.A first conductive semiconductor substrate having an upper and a lower surface, a first cladding layer of a first conductivity type formed on an upper surface of the semiconductor substrate, and a first non-doped impurity formed on the first cladding layer An optical waveguide layer, an active layer having a larger optical refractive index than the first optical waveguide layer, in which impurities are not doped on the first optical waveguide layer, is formed in a quantum well structure, and impurities are not doped in the upper portion of the active layer. A second cladding layer formed of the same material as the first optical waveguide layer having a smaller optical refractive index than that of the active layer, and having a predetermined width on the second optical waveguide layer and extending in a length direction, and having a second optical waveguide. A smaller sub ridge, a second cladding layer of a second conductivity type formed on the upper portion of the sub ridge and having a narrower width than the sub ridge and extending in a longitudinal direction, and the second A high power laser including a second conductive ohmic contact layer doped with a high concentration of impurities formed on the clad layer, and first and second conductive electrodes formed on the lower surface of the semiconductor substrate and the ohmic contact layer of the ridge. diode. 제 1 항에 있어서, 상기 반도체 기판 상부의 상기 서브 릿지와 대응하도록 동일한 폭을 가지며 길이 방향으로 길게 형성된 그루브를 더 포함하는 고출력 레이저 다이오드.The high power laser diode of claim 1, further comprising a groove having a same width and extending in a length direction to correspond to the sub ridge on the semiconductor substrate. 제 2 항에 있어서, 상기 그루브는 상기 서브 릿지와 동일한 폭을 갖는 고출력 레이저 다이오드.The high power laser diode of claim 2, wherein the groove has the same width as the sub ridge. 제 1 항에 있어서, 상기 서브 릿지는 상기 제 2 광도파로층 보다 얇은 두께를 갖는 고출력 레이저 다이오드.The high power laser diode of claim 1, wherein the sub ridge has a thickness thinner than that of the second optical waveguide layer. 제 4 항에 있어서, 상기 서브 릿지는 광굴절률이 제 2 클래드층과 같거나 제 2 광도파로층 보다 작은 고출력 레이저 다이오드.5. The high power laser diode of claim 4, wherein the sub ridge has a refractive index equal to or less than a second cladding layer. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950042601A 1995-11-21 1995-11-21 High power laser diode KR0155513B1 (en)

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Application Number Priority Date Filing Date Title
KR1019950042601A KR0155513B1 (en) 1995-11-21 1995-11-21 High power laser diode

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Application Number Priority Date Filing Date Title
KR1019950042601A KR0155513B1 (en) 1995-11-21 1995-11-21 High power laser diode

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KR970031123A true KR970031123A (en) 1997-06-26
KR0155513B1 KR0155513B1 (en) 1998-12-01

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KR101274206B1 (en) * 2006-02-21 2013-06-14 삼성전자주식회사 Semiconductor laser diode having ridge

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