KR970031123A - High power laser diode - Google Patents
High power laser diode Download PDFInfo
- Publication number
- KR970031123A KR970031123A KR1019950042601A KR19950042601A KR970031123A KR 970031123 A KR970031123 A KR 970031123A KR 1019950042601 A KR1019950042601 A KR 1019950042601A KR 19950042601 A KR19950042601 A KR 19950042601A KR 970031123 A KR970031123 A KR 970031123A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- optical waveguide
- ridge
- semiconductor substrate
- cladding layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2202—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure by making a groove in the upper laser structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Semiconductor Lasers (AREA)
Abstract
본 발명은 고출력 레이저 다이오드에 관한 것으로서, 상부 및 하부 표면을 갖는 제 1 도전형의 반도체 기판과, 상기 반도체 기판의 상부 표면에 형성된 제 1 도전형의 제 1 클래드층과, 상기 제 1 클래드층의 상부에 불순물이 도핑되지 않고 형성된 제 1 광도파로층과, 상기 제 1 광도파로드층의 상부에 불순물이 도핑되지 않은 상기 제 1 광도파로층 보다 광굴절률이 큰 물질이 양자우물 구조로 형성된 활성층과, 상기 활성층의 상부에 불순물이 도핑되지 않은 상기 활성층 보다 광굴절률이 작은 상기 제 1 광도파로층과 동일한 물질로 형성된 제 2 클래드층과, 상기 제 2 광도파로층 상부에 소정 폭을 갖고 길이 방향으로 길게 형성되며 광굴절률이 제 2 광도파로 보다 작은 서브 릿지와, 상기 서브 릿지의 상부에 서브 릿지 보다 좁은 폭을 갖고 길이 방향으로 길게 형성된 제 2 도전형의 제 2 클래드층과, 상기 제 2 클래드층의 상부에 형성된 불순물이 고농도로 도핑된 제 2 도전형의 오믹접촉층과, 상기 반도체 기판의 하부 표면과 상기 릿지의 오믹접촉층에 형성된 제 1 및 제 2 도전형 전극을 포함한다. 따라서, 고출력 동작시 공진기 내의 광출력 밀도를 낮게하여 고차 모드 발생에 의한 방사 패턴의 변화를 방지하여 레이저 다이오드 모듈에서 출력되는 광량과 광출력의 안정도를 향상시킬 수 있다.The present invention relates to a high power laser diode, comprising: a first conductive semiconductor substrate having upper and lower surfaces, a first cladding layer of a first conductive type formed on an upper surface of the semiconductor substrate, and a first cladding layer; A first optical waveguide layer formed without impurities at an upper portion thereof, and an active layer formed of a quantum well structure with a material having a larger optical refractive index than the first optical waveguide layer having no impurities doped at an upper portion of the first optical waveguide layer; A second cladding layer formed of the same material as the first optical waveguide layer having a smaller optical refractive index than the active layer without impurities doped on the active layer, and having a predetermined width on the second optical waveguide layer in a length direction; A sub-ridge having an elongation and having a smaller optical refractive index than the second optical waveguide, and having a width narrower than that of the sub-ridge on the upper portion of the sub-ridge. A second cladding layer having a second conductivity type, an ohmic contact layer of a second conductivity type doped with a high concentration of impurities formed on the second cladding layer, and an ohmic contact between the lower surface of the semiconductor substrate and the ridge. And first and second conductivity type electrodes formed in the layer. Therefore, the light output density in the resonator may be lowered during the high output operation to prevent a change in the radiation pattern caused by the generation of the higher order mode, thereby improving the light quantity and the stability of the light output from the laser diode module.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 2 도는 본 발명에 따른 고출력 레이저 다이오드의 사시도.2 is a perspective view of a high power laser diode according to the present invention;
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950042601A KR0155513B1 (en) | 1995-11-21 | 1995-11-21 | High power laser diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950042601A KR0155513B1 (en) | 1995-11-21 | 1995-11-21 | High power laser diode |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970031123A true KR970031123A (en) | 1997-06-26 |
KR0155513B1 KR0155513B1 (en) | 1998-12-01 |
Family
ID=19435003
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950042601A KR0155513B1 (en) | 1995-11-21 | 1995-11-21 | High power laser diode |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0155513B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101274206B1 (en) * | 2006-02-21 | 2013-06-14 | 삼성전자주식회사 | Semiconductor laser diode having ridge |
-
1995
- 1995-11-21 KR KR1019950042601A patent/KR0155513B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0155513B1 (en) | 1998-12-01 |
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