KR970030608A - Wafer alignment device - Google Patents
Wafer alignment device Download PDFInfo
- Publication number
- KR970030608A KR970030608A KR1019950044335A KR19950044335A KR970030608A KR 970030608 A KR970030608 A KR 970030608A KR 1019950044335 A KR1019950044335 A KR 1019950044335A KR 19950044335 A KR19950044335 A KR 19950044335A KR 970030608 A KR970030608 A KR 970030608A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- alignment device
- cap sensor
- align
- contact area
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본 발명은 반도체 제조 공정중 웨이퍼의 이송에 따라 발생되는 틀어짐 현상 등을 적절히 보상 처리하기 위해 마련되는 얼라인(ALIGN) 장치에 관한 것으로, 특히 웨이퍼의 운반 부재에 접촉 면적의 감지 기능을 갖는 캡 센서(CAP SENSOR)를 배치하여 웨이퍼의 이송(TRANSFER) 계통에서 연속적으로 얼라인이 가능하게 한 웨이퍼 얼라인(ALIGN) 장치에 관한 것으로 웨이퍼 이송 수단에 연결된 운반 부재, 상기 운반 부재 상에 배치된 캡 센서를 구비하여 웨이퍼 이송중 웨이퍼의 접촉 면적 감지에 의해 얼라인 확인이 가능함을 특징으로 하는 웨이퍼 얼라인(ALIGN) 장치.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ALIGN device, which is provided to appropriately compensate for distortion caused by the transfer of a wafer during a semiconductor manufacturing process, and in particular, a cap sensor having a function of detecting a contact area on a conveying member of a wafer. A wafer alignment device, in which a (CAP SENSOR) is arranged to continuously align in a wafer transfer system, which relates to a wafer member connected to a wafer transfer means, and a cap sensor disposed on the carrier member. Wafer alignment device (ALIGN) characterized in that the alignment can be confirmed by detecting the contact area of the wafer during wafer transfer.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제4도는 본 발명에 의해, 웨이퍼의 얼라인 상태가 감지됨을 설명하기 위한 일부 단면도.4 is a partial cross-sectional view for explaining that the alignment state of the wafer is detected by the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950044335A KR970030608A (en) | 1995-11-28 | 1995-11-28 | Wafer alignment device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950044335A KR970030608A (en) | 1995-11-28 | 1995-11-28 | Wafer alignment device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970030608A true KR970030608A (en) | 1997-06-26 |
Family
ID=66589069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950044335A KR970030608A (en) | 1995-11-28 | 1995-11-28 | Wafer alignment device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970030608A (en) |
-
1995
- 1995-11-28 KR KR1019950044335A patent/KR970030608A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |