KR970030608A - Wafer alignment device - Google Patents

Wafer alignment device Download PDF

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Publication number
KR970030608A
KR970030608A KR1019950044335A KR19950044335A KR970030608A KR 970030608 A KR970030608 A KR 970030608A KR 1019950044335 A KR1019950044335 A KR 1019950044335A KR 19950044335 A KR19950044335 A KR 19950044335A KR 970030608 A KR970030608 A KR 970030608A
Authority
KR
South Korea
Prior art keywords
wafer
alignment device
cap sensor
align
contact area
Prior art date
Application number
KR1019950044335A
Other languages
Korean (ko)
Inventor
배종선
오재영
장호선
박진호
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950044335A priority Critical patent/KR970030608A/en
Publication of KR970030608A publication Critical patent/KR970030608A/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 반도체 제조 공정중 웨이퍼의 이송에 따라 발생되는 틀어짐 현상 등을 적절히 보상 처리하기 위해 마련되는 얼라인(ALIGN) 장치에 관한 것으로, 특히 웨이퍼의 운반 부재에 접촉 면적의 감지 기능을 갖는 캡 센서(CAP SENSOR)를 배치하여 웨이퍼의 이송(TRANSFER) 계통에서 연속적으로 얼라인이 가능하게 한 웨이퍼 얼라인(ALIGN) 장치에 관한 것으로 웨이퍼 이송 수단에 연결된 운반 부재, 상기 운반 부재 상에 배치된 캡 센서를 구비하여 웨이퍼 이송중 웨이퍼의 접촉 면적 감지에 의해 얼라인 확인이 가능함을 특징으로 하는 웨이퍼 얼라인(ALIGN) 장치.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ALIGN device, which is provided to appropriately compensate for distortion caused by the transfer of a wafer during a semiconductor manufacturing process, and in particular, a cap sensor having a function of detecting a contact area on a conveying member of a wafer. A wafer alignment device, in which a (CAP SENSOR) is arranged to continuously align in a wafer transfer system, which relates to a wafer member connected to a wafer transfer means, and a cap sensor disposed on the carrier member. Wafer alignment device (ALIGN) characterized in that the alignment can be confirmed by detecting the contact area of the wafer during wafer transfer.

Description

웨이퍼 얼라인(ALIGN) 장치Wafer alignment device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제4도는 본 발명에 의해, 웨이퍼의 얼라인 상태가 감지됨을 설명하기 위한 일부 단면도.4 is a partial cross-sectional view for explaining that the alignment state of the wafer is detected by the present invention.

Claims (2)

웨이퍼 이송 수단에 연결된 운반 부재, 상기 운반 부재 상에 배치된 캡 센서를 구비하여 웨이퍼 이송중 웨이퍼의 접촉 면적 감지에 의해 얼라인 확인이 가능함을 특징으로 하는 웨이퍼 얼라인(ALIGN) 장치.And a carrying member connected to the wafer transfer means and a cap sensor disposed on the carrying member so that alignment can be checked by sensing the contact area of the wafer during wafer transfer. 제1항에 있어서, 상기 운반부재 상의 캡 센서는 웨이퍼의 외각부에 대하여 적어도 3점이상의 감지가 가능하도록 배치됨을 특징으로 하는 웨이퍼 얼라인(ALIGN) 장치.The wafer alignment device according to claim 1, wherein the cap sensor on the carrying member is arranged to enable at least three points of sensing with respect to an outer portion of the wafer. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950044335A 1995-11-28 1995-11-28 Wafer alignment device KR970030608A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950044335A KR970030608A (en) 1995-11-28 1995-11-28 Wafer alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950044335A KR970030608A (en) 1995-11-28 1995-11-28 Wafer alignment device

Publications (1)

Publication Number Publication Date
KR970030608A true KR970030608A (en) 1997-06-26

Family

ID=66589069

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950044335A KR970030608A (en) 1995-11-28 1995-11-28 Wafer alignment device

Country Status (1)

Country Link
KR (1) KR970030608A (en)

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