KR970030555A - Needle cleaning device - Google Patents

Needle cleaning device Download PDF

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Publication number
KR970030555A
KR970030555A KR1019950041151A KR19950041151A KR970030555A KR 970030555 A KR970030555 A KR 970030555A KR 1019950041151 A KR1019950041151 A KR 1019950041151A KR 19950041151 A KR19950041151 A KR 19950041151A KR 970030555 A KR970030555 A KR 970030555A
Authority
KR
South Korea
Prior art keywords
needle
cleaning device
needle cleaning
probe card
foreign matter
Prior art date
Application number
KR1019950041151A
Other languages
Korean (ko)
Inventor
강병원
Original Assignee
문정환
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 문정환, 엘지반도체 주식회사 filed Critical 문정환
Priority to KR1019950041151A priority Critical patent/KR970030555A/en
Publication of KR970030555A publication Critical patent/KR970030555A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

본 발명은 니들 청소장치에 관한 것으로, 종래의 니들 청소장치는 이물질을 완전히 제거하지 못하고, 니들을 파손시키는 문제점이 있었으며, 청소시 프로브 카드를 분리하여야 하므로 생산성 향상에 한계가 있는 문제점 등이 있었던 바, 본 발명은 세라믹 웨이퍼(10)의 상면에 솔(11)을 설치하여, 프로브 카드(2)틀 분리하지 않고, 웨이퍼 척(4)의 상면에 본 발명의 청소장치를 올려놓는 상대로 니들(3)을 청소하는 것으로 니들을 파손시키지 않고 이물질을 완전히 제거하며, 또한 프로브 카드를 분리하지 않은 상태에서 청소를 실시하므로 생산성 향상의 효과가 있다.The present invention relates to a needle cleaning device, the conventional needle cleaning device is not able to completely remove the foreign matter, there was a problem that the needle is broken, there is a problem that there is a limit to improve the productivity because the probe card must be removed during cleaning In the present invention, the needle 3 is mounted on the upper surface of the ceramic wafer 10 so that the needle 3 is placed on the upper surface of the wafer chuck 4 without removing the probe card 2. ), The foreign matter is completely removed without damaging the needle, and cleaning is performed without removing the probe card, thereby improving productivity.

Description

니들 청소장치Needle cleaning device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명 니들 청소장치의 구성을 보인 단면도.2 is a cross-sectional view showing the configuration of the needle cleaning device of the present invention.

제3도의 (a)(b)(c)는 본 발명 니들 청소장치를 이용하여 니들을 청소하는 동작을 순차적으로 보인 단면도.Figure 3 (a) (b) (c) is a cross-sectional view showing the operation of cleaning the needle using the needle cleaning device of the present invention sequentially.

Claims (2)

세라믹 웨이퍼의 상면에 이물질 제거를 위한 솔을 설치한 것을 특징으로 하는 니들 청소장치.Needle cleaning device, characterized in that the brush for removing foreign matter on the upper surface of the ceramic wafer. 제1항에 있어서, 상기 세라믹 웨이퍼의 상면에 아세톤 수납용 단차홈이 형성되어 있는 것을 특징으로 하는 니들 청소장치.The needle cleaning apparatus according to claim 1, wherein an acetone accommodating step groove is formed on an upper surface of the ceramic wafer. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950041151A 1995-11-14 1995-11-14 Needle cleaning device KR970030555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950041151A KR970030555A (en) 1995-11-14 1995-11-14 Needle cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950041151A KR970030555A (en) 1995-11-14 1995-11-14 Needle cleaning device

Publications (1)

Publication Number Publication Date
KR970030555A true KR970030555A (en) 1997-06-26

Family

ID=66587815

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950041151A KR970030555A (en) 1995-11-14 1995-11-14 Needle cleaning device

Country Status (1)

Country Link
KR (1) KR970030555A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100435529B1 (en) * 2002-06-06 2004-06-11 삼성전자주식회사 apparatus and method for cleaning probe card contacts

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100435529B1 (en) * 2002-06-06 2004-06-11 삼성전자주식회사 apparatus and method for cleaning probe card contacts

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A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application