KR970030472A - 액정배향막의 제조장치 및 제조방법 - Google Patents

액정배향막의 제조장치 및 제조방법 Download PDF

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Publication number
KR970030472A
KR970030472A KR1019950041949A KR19950041949A KR970030472A KR 970030472 A KR970030472 A KR 970030472A KR 1019950041949 A KR1019950041949 A KR 1019950041949A KR 19950041949 A KR19950041949 A KR 19950041949A KR 970030472 A KR970030472 A KR 970030472A
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South Korea
Prior art keywords
boat
substrate holder
substrate
vacuum chamber
thickness
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KR1019950041949A
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English (en)
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KR100297399B1 (ko
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우형석
이재경
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이우복
사단법인 고등기술연구원 연구조합
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Priority to KR1019950041949A priority Critical patent/KR100297399B1/ko
Publication of KR970030472A publication Critical patent/KR970030472A/ko
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Publication of KR100297399B1 publication Critical patent/KR100297399B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133792—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by etching

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)

Abstract

진공 증착장비를 사용하여 액정배향막을 제조하는 방법 및 장치에 있어서, 종래의 진공 증착장비에 설치되어 있는 고정된 기판의 개념에서 탈피하여 직선 왕복운동 및 회전운동을 통하여 운동방향으로 운동량을 전가시킴으로써 배향물질의 증기가 기판에 증착되는 순간부터 배향물질의 분자들을 일정한 방향으로 배향시켜 액정배향막을 제조한다. 따라서 종래의 러빙법으로 인해 발생하던 불량품의 수를 줄일 수 있으며, 증착시에 기판의 직선왕복운동 및 회전운동을 통한 배향막 분자들이 일정한 방향으로 배열되는 균일성을 얻을 수 있다.

Description

액정배향막의 제조장치 및 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른 액정배향막을 제조하기 위한 진공증착장치의 내부구조를 나타낸 단면도.

Claims (2)

  1. 진공챔버 내부의 하부에 설치되어 배향물질을 넣고 가열하여 증기를 형성하기 위한 보트와, 상기 보트의 상부에 설치되어 상기 보트로부터 발생되는 증기가 상부로 유입되는 양을 조절하는 셔터와, 상기 진공챔버 내부의 상부에 설치되어 기판을 장착할 수 있는 기판홀더와, 상기 기판홀더와 연결되어 기판홀더를 직선왕복운동 시킬 수 있는 풀-푸시 직선 공급로 및 가이드와, 상기 기판홀더와 연결되어 기판홀더를 회전운동 시킬 수 있는회전 공급로 및 가이드와, 상기 기판홀더의 측면에 설치되어 기판에 형성되는 배향막의 두께를 모니터링 하기 위한 두께측정기를 포함하는 액정배향막 제조장치.
  2. 진공챔버 내부의 기판홀더에 기판을 장착하는 단계와, 상기 진공챔버 내부의 보트에 배향물질을 채워 넣고 상기 진공챔버 내부를 진공상태로 만드는 단계와, 상기 보트에 전원을 공급하여 상기 보트를 가열하면서 상기 기판홀더를 원하는 방향으로 왕복직선운동 및 회전운동 시키는 단계와, 상기 보트에서 발생되는 증기의 양을 상기 보트 상부의 셔터로 조절하면서 기판에 증착되는 배향막의 두께를 두께측정기로 모니터링하면서 원하는 두께만큼 배향막을 증착하는 단계와, 상기 배향막이 원하는 두께 만큼 증착된 후 보트를 오프시는 단계를 포함하는 액정배향막의 제조방법.
KR1019950041949A 1995-11-17 1995-11-17 액정배향막의제조장치및제조방법 KR100297399B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950041949A KR100297399B1 (ko) 1995-11-17 1995-11-17 액정배향막의제조장치및제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950041949A KR100297399B1 (ko) 1995-11-17 1995-11-17 액정배향막의제조장치및제조방법

Publications (2)

Publication Number Publication Date
KR970030472A true KR970030472A (ko) 1997-06-26
KR100297399B1 KR100297399B1 (ko) 2001-10-22

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KR1019950041949A KR100297399B1 (ko) 1995-11-17 1995-11-17 액정배향막의제조장치및제조방법

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101874424B1 (ko) 2011-09-05 2018-07-06 삼성디스플레이 주식회사 표시 장치용 배향막, 표시 장치용 배향막을 포함하는 액정 표시 장치, 표시 장치용 배향막 처리 방법 및 처리 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941837A (ja) * 1982-08-31 1984-03-08 Mitsubishi Electric Corp フオトレジストの被着方法
JPH0239520A (ja) * 1988-07-29 1990-02-08 Tokyo Electron Ltd レジスト膜厚の測定方法

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