KR970030312A - Clamping Posts for Semiconductor Ion Implantation Equipment - Google Patents

Clamping Posts for Semiconductor Ion Implantation Equipment Download PDF

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Publication number
KR970030312A
KR970030312A KR1019950041919A KR19950041919A KR970030312A KR 970030312 A KR970030312 A KR 970030312A KR 1019950041919 A KR1019950041919 A KR 1019950041919A KR 19950041919 A KR19950041919 A KR 19950041919A KR 970030312 A KR970030312 A KR 970030312A
Authority
KR
South Korea
Prior art keywords
ion implantation
screw
clamping post
groove
hole
Prior art date
Application number
KR1019950041919A
Other languages
Korean (ko)
Other versions
KR0156315B1 (en
Inventor
송호기
최기철
옥경하
허장무
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950041919A priority Critical patent/KR0156315B1/en
Publication of KR970030312A publication Critical patent/KR970030312A/en
Application granted granted Critical
Publication of KR0156315B1 publication Critical patent/KR0156315B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Clamps And Clips (AREA)

Abstract

반도체 이온주입장비의 클램핑 포스트가 개시되어 있다. 본 발명은 도전성 재질의 물체에 다른 물건이 끼워지도록 탄성적으로 확대될 수 있는 홈이 형성되어 이루어진 반도체 이온주입장비의 클램핑 포스트에, 상기 홈을 통해 분리된 상기 물체의 부분들을 밀착시킬 수 있는 수단이 구비되어 있는 것을 특징으로 한다. 따라서, 클램핑 포스트에 전원을 인가해야 할 다른 물체를 단단히 지지하고 안정된 전기적 접촉을 유지할 수 있는 효과가 있다.A clamping post of a semiconductor ion implantation apparatus is disclosed. The present invention is a means for contacting the parts of the object separated through the groove to the clamping post of the semiconductor ion implantation device is formed by forming a groove that can be elastically enlarged to fit another object to the object of the conductive material It is characterized by being provided. Therefore, there is an effect that can firmly support another object to be applied to the clamping post and maintain a stable electrical contact.

Description

반도체의 이온 주입장비의 클램핑 포스트Clamping Posts for Semiconductor Ion Implantation Equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명의 일실시예에 따른 클램핑 포스트를 나타낸 사시도이다.3 is a perspective view showing a clamping post according to an embodiment of the present invention.

Claims (5)

탄성적으로 확대되고 복원되어 다른 물건이 삽입되고 고정될 수 있도록 형성된 홈에 의하여 일 단부가 대향하는 두 부분으로 분리되어 이루어지는 도전성 재질의 반도체 이온주입장비의 클램핑 포스트에 있어서, 상기 홈에 의해 분리된 두 부분 사이의 거리를 좁힐 수 있는 밀착수단이 더 구비되어 이루어지는 것을 특징으로 하는 반도체의 이온 주입장비의 클램핑 포스트.In a clamping post of a conductive ion-conducting device of a conductive material formed by separating the two ends facing each other by a groove formed to be elastically enlarged and restored so that another object can be inserted and fixed, separated by the groove The clamping post of the ion implantation device of a semiconductor, characterized in that the contact is further provided to narrow the distance between the two parts. 제1항에 있어서, 상기 밀착수단은 상기 분리된 두 부분중 한 부분에 형성된 스크류 홀 및 다른 한 부분에 형성된 스크류 탭과 상기 스크류 홀을 통하여 상기 스크류 탭에 결합되는 스크류를 구비하여 이루어지는 것을 특징으로 하는 반도체의 이온 주입장비의 클램핑 포스트.The method of claim 1, wherein the contact means comprises a screw hole formed in one of the two separated portions and a screw tab formed in the other portion and the screw coupled to the screw tab through the screw hole Clamping post of ion implantation equipment of semiconductor. 제1항에 있어서, 상기 홈의 일부에 삽입되는 특정 물건을 지지하기에 특히 적합한 형태로 지지홀이 형성된 것을 특징으로 하는 상기 반도체의 이온 주입장비의 클램핑 포스트.The clamping post of claim 1, wherein the support hole is formed in a shape particularly suitable for supporting a specific object inserted into a portion of the groove. 제2항 또는 제3항에 있어서, 상기 홈을 탄성적으로 확대시키기 위한 확대수단이 구비되어 이루어지는 것을 특징으로 하는 상기 반도체의 이온 주입장비의 클램핑 포스트.4. The clamping post of claim 2 or 3, wherein an enlargement means for elastically expanding the groove is provided. 제4항에 있어서, 상기 확대수단은 상기 분리된 두 부분중 한 부분에만 형성되는 홀 및 스크류를 구비하여 상기 홀을 통해 상기 스크류를 끼워 다른 부분의 벽체를 밀 수 있도록 이루어지는 것을 특징으로 하는 상기 반도체 이온주입장비의 클램핑 포스트.The semiconductor device as claimed in claim 4, wherein the enlargement means comprises a hole and a screw formed only in one of the two separated parts so that the screw can be pushed through the hole to push the wall of the other part. Clamping posts for ion implantation equipment.
KR1019950041919A 1995-11-17 1995-11-17 Clamping post of ion implant apparatus for semiconductor KR0156315B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950041919A KR0156315B1 (en) 1995-11-17 1995-11-17 Clamping post of ion implant apparatus for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950041919A KR0156315B1 (en) 1995-11-17 1995-11-17 Clamping post of ion implant apparatus for semiconductor

Publications (2)

Publication Number Publication Date
KR970030312A true KR970030312A (en) 1997-06-26
KR0156315B1 KR0156315B1 (en) 1998-12-01

Family

ID=19434478

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950041919A KR0156315B1 (en) 1995-11-17 1995-11-17 Clamping post of ion implant apparatus for semiconductor

Country Status (1)

Country Link
KR (1) KR0156315B1 (en)

Also Published As

Publication number Publication date
KR0156315B1 (en) 1998-12-01

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