KR970025851U - 웨이퍼 절단용 톱날 - Google Patents

웨이퍼 절단용 톱날

Info

Publication number
KR970025851U
KR970025851U KR2019950037701U KR19950037701U KR970025851U KR 970025851 U KR970025851 U KR 970025851U KR 2019950037701 U KR2019950037701 U KR 2019950037701U KR 19950037701 U KR19950037701 U KR 19950037701U KR 970025851 U KR970025851 U KR 970025851U
Authority
KR
South Korea
Prior art keywords
saw blade
cutting saw
wafer cutting
wafer
blade
Prior art date
Application number
KR2019950037701U
Other languages
English (en)
Other versions
KR0127356Y1 (ko
Inventor
김철홍
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950037701U priority Critical patent/KR0127356Y1/ko
Publication of KR970025851U publication Critical patent/KR970025851U/ko
Application granted granted Critical
Publication of KR0127356Y1 publication Critical patent/KR0127356Y1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
KR2019950037701U 1995-11-30 1995-11-30 웨이퍼 절단용 톱날 KR0127356Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950037701U KR0127356Y1 (ko) 1995-11-30 1995-11-30 웨이퍼 절단용 톱날

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950037701U KR0127356Y1 (ko) 1995-11-30 1995-11-30 웨이퍼 절단용 톱날

Publications (2)

Publication Number Publication Date
KR970025851U true KR970025851U (ko) 1997-06-20
KR0127356Y1 KR0127356Y1 (ko) 1998-12-01

Family

ID=19431656

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950037701U KR0127356Y1 (ko) 1995-11-30 1995-11-30 웨이퍼 절단용 톱날

Country Status (1)

Country Link
KR (1) KR0127356Y1 (ko)

Also Published As

Publication number Publication date
KR0127356Y1 (ko) 1998-12-01

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20090624

Year of fee payment: 12

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