KR970025850U - Temperature detection sensor in semiconductor device manufacturing facilities - Google Patents
Temperature detection sensor in semiconductor device manufacturing facilitiesInfo
- Publication number
- KR970025850U KR970025850U KR2019950036260U KR19950036260U KR970025850U KR 970025850 U KR970025850 U KR 970025850U KR 2019950036260 U KR2019950036260 U KR 2019950036260U KR 19950036260 U KR19950036260 U KR 19950036260U KR 970025850 U KR970025850 U KR 970025850U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- detection sensor
- temperature detection
- device manufacturing
- manufacturing facilities
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036260U KR200235930Y1 (en) | 1995-11-28 | 1995-11-28 | Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036260U KR200235930Y1 (en) | 1995-11-28 | 1995-11-28 | Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970025850U true KR970025850U (en) | 1997-06-20 |
KR200235930Y1 KR200235930Y1 (en) | 2001-11-30 |
Family
ID=60907125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950036260U KR200235930Y1 (en) | 1995-11-28 | 1995-11-28 | Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200235930Y1 (en) |
-
1995
- 1995-11-28 KR KR2019950036260U patent/KR200235930Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200235930Y1 (en) | 2001-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20070514 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |