KR970025850U - Temperature detection sensor in semiconductor device manufacturing facilities - Google Patents

Temperature detection sensor in semiconductor device manufacturing facilities

Info

Publication number
KR970025850U
KR970025850U KR2019950036260U KR19950036260U KR970025850U KR 970025850 U KR970025850 U KR 970025850U KR 2019950036260 U KR2019950036260 U KR 2019950036260U KR 19950036260 U KR19950036260 U KR 19950036260U KR 970025850 U KR970025850 U KR 970025850U
Authority
KR
South Korea
Prior art keywords
semiconductor device
detection sensor
temperature detection
device manufacturing
manufacturing facilities
Prior art date
Application number
KR2019950036260U
Other languages
Korean (ko)
Other versions
KR200235930Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950036260U priority Critical patent/KR200235930Y1/en
Publication of KR970025850U publication Critical patent/KR970025850U/en
Application granted granted Critical
Publication of KR200235930Y1 publication Critical patent/KR200235930Y1/en

Links

KR2019950036260U 1995-11-28 1995-11-28 Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment KR200235930Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950036260U KR200235930Y1 (en) 1995-11-28 1995-11-28 Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950036260U KR200235930Y1 (en) 1995-11-28 1995-11-28 Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment

Publications (2)

Publication Number Publication Date
KR970025850U true KR970025850U (en) 1997-06-20
KR200235930Y1 KR200235930Y1 (en) 2001-11-30

Family

ID=60907125

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950036260U KR200235930Y1 (en) 1995-11-28 1995-11-28 Temperature Detection Sensor in Semiconductor Device Manufacturing Equipment

Country Status (1)

Country Link
KR (1) KR200235930Y1 (en)

Also Published As

Publication number Publication date
KR200235930Y1 (en) 2001-11-30

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