KR970019758U - Wafer position sensing device - Google Patents

Wafer position sensing device

Info

Publication number
KR970019758U
KR970019758U KR2019950028907U KR19950028907U KR970019758U KR 970019758 U KR970019758 U KR 970019758U KR 2019950028907 U KR2019950028907 U KR 2019950028907U KR 19950028907 U KR19950028907 U KR 19950028907U KR 970019758 U KR970019758 U KR 970019758U
Authority
KR
South Korea
Prior art keywords
sensing device
position sensing
wafer position
wafer
sensing
Prior art date
Application number
KR2019950028907U
Other languages
Korean (ko)
Other versions
KR0140084Y1 (en
Inventor
윤태갑
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950028907U priority Critical patent/KR0140084Y1/en
Publication of KR970019758U publication Critical patent/KR970019758U/en
Application granted granted Critical
Publication of KR0140084Y1 publication Critical patent/KR0140084Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950028907U 1995-10-16 1995-10-16 Wafer sensing apparatus KR0140084Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950028907U KR0140084Y1 (en) 1995-10-16 1995-10-16 Wafer sensing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950028907U KR0140084Y1 (en) 1995-10-16 1995-10-16 Wafer sensing apparatus

Publications (2)

Publication Number Publication Date
KR970019758U true KR970019758U (en) 1997-05-26
KR0140084Y1 KR0140084Y1 (en) 1999-04-15

Family

ID=19426061

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950028907U KR0140084Y1 (en) 1995-10-16 1995-10-16 Wafer sensing apparatus

Country Status (1)

Country Link
KR (1) KR0140084Y1 (en)

Also Published As

Publication number Publication date
KR0140084Y1 (en) 1999-04-15

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Legal Events

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Year of fee payment: 7

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