KR970019758U - Wafer position sensing device - Google Patents
Wafer position sensing deviceInfo
- Publication number
- KR970019758U KR970019758U KR2019950028907U KR19950028907U KR970019758U KR 970019758 U KR970019758 U KR 970019758U KR 2019950028907 U KR2019950028907 U KR 2019950028907U KR 19950028907 U KR19950028907 U KR 19950028907U KR 970019758 U KR970019758 U KR 970019758U
- Authority
- KR
- South Korea
- Prior art keywords
- sensing device
- position sensing
- wafer position
- wafer
- sensing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950028907U KR0140084Y1 (en) | 1995-10-16 | 1995-10-16 | Wafer sensing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950028907U KR0140084Y1 (en) | 1995-10-16 | 1995-10-16 | Wafer sensing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970019758U true KR970019758U (en) | 1997-05-26 |
KR0140084Y1 KR0140084Y1 (en) | 1999-04-15 |
Family
ID=19426061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950028907U KR0140084Y1 (en) | 1995-10-16 | 1995-10-16 | Wafer sensing apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0140084Y1 (en) |
-
1995
- 1995-10-16 KR KR2019950028907U patent/KR0140084Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0140084Y1 (en) | 1999-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69610457D1 (en) | Semiconductor device | |
KR970004020A (en) | Semiconductor device | |
KR970005998A (en) | Semiconductor device | |
DE69510357D1 (en) | POSITION DETECTING DEVICE | |
DE19680786T1 (en) | Semiconductor device test device | |
DE59506991D1 (en) | Magnetic position sensor device | |
DE69631750D1 (en) | OBJECT DETECTION DEVICE | |
DE69623539D1 (en) | Position detection device | |
DE69631940D1 (en) | Semiconductor device | |
DE59606841D1 (en) | Position measuring device | |
DE59607521D1 (en) | Semiconductor device configuration | |
DK0732046T3 (en) | location device | |
DE69637939D1 (en) | A semiconductor device | |
KR970002263A (en) | Distance measuring device | |
DE59610542D1 (en) | MEASURING DEVICE | |
DE59608134D1 (en) | Position detection device | |
DE19681689T1 (en) | Secured semiconductor device | |
DE59609428D1 (en) | Photoelectric position measuring device | |
DE69622292D1 (en) | A semiconductor device | |
DE59508231D1 (en) | Position measuring device | |
DE59604109D1 (en) | Angle measuring device | |
DE69635334D1 (en) | SEMICONDUCTOR DEVICE | |
KR970045025U (en) | Moving object position detection device | |
KR970019758U (en) | Wafer position sensing device | |
KR970025773U (en) | Semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20041119 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |