KR970025804U - 세정장치의 기체배출용 자동조절 댐퍼시스템 - Google Patents

세정장치의 기체배출용 자동조절 댐퍼시스템

Info

Publication number
KR970025804U
KR970025804U KR2019950034586U KR19950034586U KR970025804U KR 970025804 U KR970025804 U KR 970025804U KR 2019950034586 U KR2019950034586 U KR 2019950034586U KR 19950034586 U KR19950034586 U KR 19950034586U KR 970025804 U KR970025804 U KR 970025804U
Authority
KR
South Korea
Prior art keywords
cleaning device
gas discharge
automatically controlled
damper system
controlled damper
Prior art date
Application number
KR2019950034586U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950034586U priority Critical patent/KR970025804U/ko
Publication of KR970025804U publication Critical patent/KR970025804U/ko

Links

KR2019950034586U 1995-11-21 1995-11-21 세정장치의 기체배출용 자동조절 댐퍼시스템 KR970025804U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950034586U KR970025804U (ko) 1995-11-21 1995-11-21 세정장치의 기체배출용 자동조절 댐퍼시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950034586U KR970025804U (ko) 1995-11-21 1995-11-21 세정장치의 기체배출용 자동조절 댐퍼시스템

Publications (1)

Publication Number Publication Date
KR970025804U true KR970025804U (ko) 1997-06-20

Family

ID=60906433

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950034586U KR970025804U (ko) 1995-11-21 1995-11-21 세정장치의 기체배출용 자동조절 댐퍼시스템

Country Status (1)

Country Link
KR (1) KR970025804U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150076812A (ko) * 2013-12-27 2015-07-07 세메스 주식회사 기판처리장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150076812A (ko) * 2013-12-27 2015-07-07 세메스 주식회사 기판처리장치

Similar Documents

Publication Publication Date Title
ATE199660T1 (de) Rauchgasreinigungsanlage
DE69621271T2 (de) Gasentladungsröhre
DE69620485D1 (de) Spielsysteme und Zwischenverstärker dafür
DE69605614D1 (de) Durchflussregler
DE69627410D1 (de) Gasentladungsröhre
DK0755713T3 (da) Anordning til rensning af støvbelastet gas
DE69620936D1 (de) Gasentladungsröhre
DE69613766T2 (de) Gasabgabeeinrichtung
KR970027233U (ko) 집진기의 더스트 배출장치
KR970025804U (ko) 세정장치의 기체배출용 자동조절 댐퍼시스템
DE69611227D1 (de) Gasentladungs-laseroszillationsgerät
KR960038152U (ko) 공기조화 장치의 필터 교체시기 판단장치
KR970009727U (ko) 용광로 대탕도 잔선배출장치
KR960038153U (ko) 냉·난방기의 토출장치
KR970036515U (ko) 에어탱크의 이물질 배출장치
KR970001808U (ko) 혼합가스배관내의 부생물 제거하기 위한 장치
KR970015276U (ko) 브라운관의 방전장치
KR970044007U (ko) 가스레인지의 타이머장치
KR970020979U (ko) 가스배관용 이물질 제거장치
UA29U (uk) Вставний фільтр для очистки газів
DE29505032U1 (de) Rohrgasleiter
KR960026830U (ko) 청정실용 청정장치의 비임연결브라켓트
KR970010274U (ko) 가스용기의 가스 공급장치
KR970024524U (ko) 개스용기의 잔여개스 제거장치
KR0109195Y1 (en) Device for fire engine of discharging watergun

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application