KR970025794U - 파형변환기를 갖는 반응성 이온 식각장치 - Google Patents
파형변환기를 갖는 반응성 이온 식각장치Info
- Publication number
- KR970025794U KR970025794U KR2019950036228U KR19950036228U KR970025794U KR 970025794 U KR970025794 U KR 970025794U KR 2019950036228 U KR2019950036228 U KR 2019950036228U KR 19950036228 U KR19950036228 U KR 19950036228U KR 970025794 U KR970025794 U KR 970025794U
- Authority
- KR
- South Korea
- Prior art keywords
- reactive ion
- waveform converters
- ion etchers
- etchers
- converters
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036228U KR970025794U (ko) | 1995-11-28 | 1995-11-28 | 파형변환기를 갖는 반응성 이온 식각장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036228U KR970025794U (ko) | 1995-11-28 | 1995-11-28 | 파형변환기를 갖는 반응성 이온 식각장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970025794U true KR970025794U (ko) | 1997-06-20 |
Family
ID=60907090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950036228U KR970025794U (ko) | 1995-11-28 | 1995-11-28 | 파형변환기를 갖는 반응성 이온 식각장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970025794U (ko) |
-
1995
- 1995-11-28 KR KR2019950036228U patent/KR970025794U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |