KR970025794U - 파형변환기를 갖는 반응성 이온 식각장치 - Google Patents

파형변환기를 갖는 반응성 이온 식각장치

Info

Publication number
KR970025794U
KR970025794U KR2019950036228U KR19950036228U KR970025794U KR 970025794 U KR970025794 U KR 970025794U KR 2019950036228 U KR2019950036228 U KR 2019950036228U KR 19950036228 U KR19950036228 U KR 19950036228U KR 970025794 U KR970025794 U KR 970025794U
Authority
KR
South Korea
Prior art keywords
reactive ion
waveform converters
ion etchers
etchers
converters
Prior art date
Application number
KR2019950036228U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950036228U priority Critical patent/KR970025794U/ko
Publication of KR970025794U publication Critical patent/KR970025794U/ko

Links

KR2019950036228U 1995-11-28 1995-11-28 파형변환기를 갖는 반응성 이온 식각장치 KR970025794U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950036228U KR970025794U (ko) 1995-11-28 1995-11-28 파형변환기를 갖는 반응성 이온 식각장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950036228U KR970025794U (ko) 1995-11-28 1995-11-28 파형변환기를 갖는 반응성 이온 식각장치

Publications (1)

Publication Number Publication Date
KR970025794U true KR970025794U (ko) 1997-06-20

Family

ID=60907090

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950036228U KR970025794U (ko) 1995-11-28 1995-11-28 파형변환기를 갖는 반응성 이온 식각장치

Country Status (1)

Country Link
KR (1) KR970025794U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application