KR970025116U - Plasma etching device - Google Patents

Plasma etching device

Info

Publication number
KR970025116U
KR970025116U KR2019950032277U KR19950032277U KR970025116U KR 970025116 U KR970025116 U KR 970025116U KR 2019950032277 U KR2019950032277 U KR 2019950032277U KR 19950032277 U KR19950032277 U KR 19950032277U KR 970025116 U KR970025116 U KR 970025116U
Authority
KR
South Korea
Prior art keywords
plasma etching
etching device
plasma
etching
Prior art date
Application number
KR2019950032277U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950032277U priority Critical patent/KR970025116U/en
Publication of KR970025116U publication Critical patent/KR970025116U/en

Links

KR2019950032277U 1995-11-03 1995-11-03 Plasma etching device KR970025116U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950032277U KR970025116U (en) 1995-11-03 1995-11-03 Plasma etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950032277U KR970025116U (en) 1995-11-03 1995-11-03 Plasma etching device

Publications (1)

Publication Number Publication Date
KR970025116U true KR970025116U (en) 1997-06-20

Family

ID=60906103

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950032277U KR970025116U (en) 1995-11-03 1995-11-03 Plasma etching device

Country Status (1)

Country Link
KR (1) KR970025116U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination