KR970023890A - - Google Patents
Info
- Publication number
- KR970023890A KR970023890A KR19960044069A KR19960044069A KR970023890A KR 970023890 A KR970023890 A KR 970023890A KR 19960044069 A KR19960044069 A KR 19960044069A KR 19960044069 A KR19960044069 A KR 19960044069A KR 970023890 A KR970023890 A KR 970023890A
- Authority
- KR
- South Korea
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US481995P | 1995-10-05 | 1995-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970023890A true KR970023890A (US20020128544A1-20020912-P00008.png) | 1997-05-30 |
Family
ID=21712687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR19960044069A KR970023890A (US20020128544A1-20020912-P00008.png) | 1995-10-05 | 1996-10-05 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0767487A1 (US20020128544A1-20020912-P00008.png) |
| JP (1) | JPH09190994A (US20020128544A1-20020912-P00008.png) |
| KR (1) | KR970023890A (US20020128544A1-20020912-P00008.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100526453B1 (ko) * | 1998-12-31 | 2005-12-21 | 주식회사 하이닉스반도체 | 반도체 플래쉬 이이피롬 소자 제조방법 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1107970C (zh) | 1997-12-10 | 2003-05-07 | Cfmt公司 | 电子元件制造用的湿法处理方法 |
| KR100483037B1 (ko) * | 1997-12-27 | 2005-07-29 | 주식회사 하이닉스반도체 | 반도체웨이퍼세정방법 |
| US6848455B1 (en) | 2002-04-22 | 2005-02-01 | Novellus Systems, Inc. | Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4749640A (en) * | 1986-09-02 | 1988-06-07 | Monsanto Company | Integrated circuit manufacturing process |
| JP3261683B2 (ja) * | 1991-05-31 | 2002-03-04 | 忠弘 大見 | 半導体の洗浄方法及び洗浄装置 |
| US5516730A (en) * | 1994-08-26 | 1996-05-14 | Memc Electronic Materials, Inc. | Pre-thermal treatment cleaning process of wafers |
| DE4432738A1 (de) * | 1994-09-14 | 1996-03-21 | Siemens Ag | Verfahren zum naßchemischen Entfernen von Kontaminationen auf Halbleiterkristalloberflächen |
-
1996
- 1996-10-05 KR KR19960044069A patent/KR970023890A/ko not_active Application Discontinuation
- 1996-10-07 JP JP8300785A patent/JPH09190994A/ja active Pending
- 1996-10-07 EP EP96116032A patent/EP0767487A1/en not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100526453B1 (ko) * | 1998-12-31 | 2005-12-21 | 주식회사 하이닉스반도체 | 반도체 플래쉬 이이피롬 소자 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0767487A1 (en) | 1997-04-09 |
| JPH09190994A (ja) | 1997-07-22 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |