KR970023749A - 터릿 구조 - Google Patents

터릿 구조 Download PDF

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Publication number
KR970023749A
KR970023749A KR1019950037765A KR19950037765A KR970023749A KR 970023749 A KR970023749 A KR 970023749A KR 1019950037765 A KR1019950037765 A KR 1019950037765A KR 19950037765 A KR19950037765 A KR 19950037765A KR 970023749 A KR970023749 A KR 970023749A
Authority
KR
South Korea
Prior art keywords
wafer
turret
wing
wing portion
turret structure
Prior art date
Application number
KR1019950037765A
Other languages
English (en)
Other versions
KR0165460B1 (ko
Inventor
신권호
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950037765A priority Critical patent/KR0165460B1/ko
Publication of KR970023749A publication Critical patent/KR970023749A/ko
Application granted granted Critical
Publication of KR0165460B1 publication Critical patent/KR0165460B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)

Abstract

신규한 터릿 구조가 개시되어 있다. 그 위에 웨이퍼가 올려지거나 낙하되는 터릿 면과, 상기 터릿 면에 붙어있는 날개 부위를 구비하며, 상기 날개 부위의 상부를 절단하여 날개의 간격을 증가시킨다. 웨이퍼의 이동시 날개와 닿지 않아 스크래치가 유발되지 않음으로써, 미립자를 감소시킬 수 있다.

Description

터릿 구조
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 의한 터릿 구조를 나타내는 개략적인 입체도.

Claims (1)

  1. 그 위에 웨이퍼가 올려지거나 낙하되는 터릿 면; 및 상기 터릿 면에 붙어있는 날개 부위를 구비하며, 상기 날개 부위의 상부를 절단하여 날개의 간격을 증가시킨 것을 특징으로 하는 터릿 구조.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950037765A 1995-10-28 1995-10-28 터릿 구조 KR0165460B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950037765A KR0165460B1 (ko) 1995-10-28 1995-10-28 터릿 구조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950037765A KR0165460B1 (ko) 1995-10-28 1995-10-28 터릿 구조

Publications (2)

Publication Number Publication Date
KR970023749A true KR970023749A (ko) 1997-05-30
KR0165460B1 KR0165460B1 (ko) 1999-02-01

Family

ID=19431703

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950037765A KR0165460B1 (ko) 1995-10-28 1995-10-28 터릿 구조

Country Status (1)

Country Link
KR (1) KR0165460B1 (ko)

Also Published As

Publication number Publication date
KR0165460B1 (ko) 1999-02-01

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