KR970023614A - Decontamination device for workers in semiconductor processing line - Google Patents
Decontamination device for workers in semiconductor processing line Download PDFInfo
- Publication number
- KR970023614A KR970023614A KR1019950037279A KR19950037279A KR970023614A KR 970023614 A KR970023614 A KR 970023614A KR 1019950037279 A KR1019950037279 A KR 1019950037279A KR 19950037279 A KR19950037279 A KR 19950037279A KR 970023614 A KR970023614 A KR 970023614A
- Authority
- KR
- South Korea
- Prior art keywords
- workers
- vacuum
- suction port
- semiconductor processing
- processing line
- Prior art date
Links
Abstract
본 발명은 반도체소자의 제조공정중 오염원을 제거하기 위한 것으로 특히 작업자인 사람으로 부터의 오염을 제거하는 반도체 공정라인에서 작업자용 오염제거장치에 대한 것이다.The present invention relates to the removal of contaminants during the manufacturing process of semiconductor devices, and more particularly, to a decontamination apparatus for workers in a semiconductor processing line for removing contamination from human workers.
종래의 방진복은 신체에서 발생되는 이온이나 불순물들이 밖으로 나오지 않는 구조를 가지고 있으나, 작업중 땀이나 기타 불순물들이 방진복 밖으로 빠져나와 라인을 오염시켜 공정진행에 문제를 발생시켜 왔었다.Conventional anti-vibration clothes have a structure in which ions or impurities generated in the body do not come out, but sweat or other impurities escape out of the anti-vibration clothes during work and contaminate the line, causing problems in process progress.
본 발명은 상술한 문제점들을 해소하기 위한 것으로, 반도체의 공정라인 내에서 작업자의 인체에서 발생하는 오염원을 제거하기 위한 흡입구를 구비한 진공띠와, 이 진공띠의 외측에서 상기 흡입구와 연결되는 진공호소로 구성하여, 인체에서 발생하는 오염원을 효과적으로 제거함으로써 Fab내에서 작업의 지속적으로 수행할 수 있어 작업의 능률과 수율을 높일 수 있도록 한 것이다.The present invention is to solve the above problems, a vacuum strip having a suction port for removing the source of contamination occurring in the human body in the process line of the semiconductor, and a vacuum hose connected to the suction port outside the vacuum band It is configured to effectively remove the pollutants generated in the human body to continue the work in the Fab to increase the efficiency and yield of the work.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명의 전체적인 구조를 나타낸 사시도,1 is a perspective view showing the overall structure of the present invention,
제2도는 본 발명 띠부위의 단면구조도.2 is a cross-sectional view of the band portion of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950037279A KR970023614A (en) | 1995-10-26 | 1995-10-26 | Decontamination device for workers in semiconductor processing line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950037279A KR970023614A (en) | 1995-10-26 | 1995-10-26 | Decontamination device for workers in semiconductor processing line |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970023614A true KR970023614A (en) | 1997-05-30 |
Family
ID=66584527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950037279A KR970023614A (en) | 1995-10-26 | 1995-10-26 | Decontamination device for workers in semiconductor processing line |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970023614A (en) |
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1995
- 1995-10-26 KR KR1019950037279A patent/KR970023614A/en not_active Application Discontinuation
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Legal Events
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WITN | Withdrawal due to no request for examination |