KR970023614A - Decontamination device for workers in semiconductor processing line - Google Patents

Decontamination device for workers in semiconductor processing line Download PDF

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Publication number
KR970023614A
KR970023614A KR1019950037279A KR19950037279A KR970023614A KR 970023614 A KR970023614 A KR 970023614A KR 1019950037279 A KR1019950037279 A KR 1019950037279A KR 19950037279 A KR19950037279 A KR 19950037279A KR 970023614 A KR970023614 A KR 970023614A
Authority
KR
South Korea
Prior art keywords
workers
vacuum
suction port
semiconductor processing
processing line
Prior art date
Application number
KR1019950037279A
Other languages
Korean (ko)
Inventor
유영섭
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950037279A priority Critical patent/KR970023614A/en
Publication of KR970023614A publication Critical patent/KR970023614A/en

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Abstract

본 발명은 반도체소자의 제조공정중 오염원을 제거하기 위한 것으로 특히 작업자인 사람으로 부터의 오염을 제거하는 반도체 공정라인에서 작업자용 오염제거장치에 대한 것이다.The present invention relates to the removal of contaminants during the manufacturing process of semiconductor devices, and more particularly, to a decontamination apparatus for workers in a semiconductor processing line for removing contamination from human workers.

종래의 방진복은 신체에서 발생되는 이온이나 불순물들이 밖으로 나오지 않는 구조를 가지고 있으나, 작업중 땀이나 기타 불순물들이 방진복 밖으로 빠져나와 라인을 오염시켜 공정진행에 문제를 발생시켜 왔었다.Conventional anti-vibration clothes have a structure in which ions or impurities generated in the body do not come out, but sweat or other impurities escape out of the anti-vibration clothes during work and contaminate the line, causing problems in process progress.

본 발명은 상술한 문제점들을 해소하기 위한 것으로, 반도체의 공정라인 내에서 작업자의 인체에서 발생하는 오염원을 제거하기 위한 흡입구를 구비한 진공띠와, 이 진공띠의 외측에서 상기 흡입구와 연결되는 진공호소로 구성하여, 인체에서 발생하는 오염원을 효과적으로 제거함으로써 Fab내에서 작업의 지속적으로 수행할 수 있어 작업의 능률과 수율을 높일 수 있도록 한 것이다.The present invention is to solve the above problems, a vacuum strip having a suction port for removing the source of contamination occurring in the human body in the process line of the semiconductor, and a vacuum hose connected to the suction port outside the vacuum band It is configured to effectively remove the pollutants generated in the human body to continue the work in the Fab to increase the efficiency and yield of the work.

Description

반도체 공정라인에서 작업자용 오염제거장치Decontamination device for workers in semiconductor processing line

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 전체적인 구조를 나타낸 사시도,1 is a perspective view showing the overall structure of the present invention,

제2도는 본 발명 띠부위의 단면구조도.2 is a cross-sectional view of the band portion of the present invention.

Claims (2)

반도체의 공정라인 내에서 작업자의 인체에서 발생하는 오염원을 제거하기 위한 흡입구를 구비한 진공띠와, 이 진공띠의 외측에서 상기 흡입구와 연결되는 진공호소로 구성한 반도체 공정라인에서 작업자용 오염제거장치.A decontamination apparatus for a worker in a semiconductor processing line comprising a vacuum strip having a suction port for removing a source of contamination occurring in a human body in a semiconductor processing line, and a vacuum hose connected to the suction port outside the vacuum strip. 제1항에 있어서, 상기 진공띠는 상기 흡입구로 부터 유입되는 오염물질의 진공호스를 통해 제거될 수 있도록 내부에 공기라인을 구비한 반도체 공정라인에서 작업자용 오명제거장치.The apparatus of claim 1, wherein the vacuum strip is provided with an air line therein to be removed through a vacuum hose of contaminants introduced from the suction port. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950037279A 1995-10-26 1995-10-26 Decontamination device for workers in semiconductor processing line KR970023614A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950037279A KR970023614A (en) 1995-10-26 1995-10-26 Decontamination device for workers in semiconductor processing line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950037279A KR970023614A (en) 1995-10-26 1995-10-26 Decontamination device for workers in semiconductor processing line

Publications (1)

Publication Number Publication Date
KR970023614A true KR970023614A (en) 1997-05-30

Family

ID=66584527

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950037279A KR970023614A (en) 1995-10-26 1995-10-26 Decontamination device for workers in semiconductor processing line

Country Status (1)

Country Link
KR (1) KR970023614A (en)

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