KR970023610A

KR970023610A - Supply device for chemical solution for semiconductor device manufacturing

Info

Publication number: KR970023610A
Application number: KR1019950035602A
Authority: KR
Inventors: 남창현; 남재우; 이현재; 이상호
Original assignee: 김광호; 삼성전자 주식회사
Priority date: 1995-10-16
Filing date: 1995-10-16
Publication date: 1997-05-30

Abstract

본 발명은 반도체 제조공정에 사용되는 화학용액을 공급하는 반도제조장치에 관한 것으로, 특히 비율이 높은 화학용액의 혼합시 소량의 약액을 공정조 또는 혼합조에 정밀한 제어로 공급이 가능하도록 한 화학용액의 정량공급장치에 대한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus for supplying chemical solutions used in semiconductor manufacturing processes. It is about a fixed quantity supply device.

종래의 약액공급장치는 이러한 설비가 공간을 많이 차지할 뿐 아니라 다양한 비율을 요구하는 현재의 세정공정에 대처하기 어렵고, 정량을 조절할 수 없는 상태에서 자체적으로 보정할거나 제어할 수 있는 장비가 없어 후속세정공정에 막대한 영향을 미쳐왔었다.The conventional chemical liquid supply device is difficult to cope with the current cleaning process that requires various ratios, such as the equipment takes up a lot of space, and there is no equipment for self-calibration or control in the absence of control of the subsequent cleaning. It has had a huge impact on the process.

본 발명은 상술한 문제점들을 극복하기 위한 것으로, 반도체 제조장비에 사용되는 화학용액을 공정조 또는 혼합조에 정량공급하기 위한 밸브를 구비한 약액중앙공급부(CCSS)을 구비하고 상기 약액중앙공급부와 밸브사이의 공급라인에 연결되는 유량감지수단과, 상기 유량감지부재에서 감지된 데이터를 입력받아 상기 밸브를 제어하는 제어 신호를 출력하는 제어수단을 포함하여 약액의 정량공급과 다양한 비율에 대한 조절은 물론 정량공급의 에러에 대해 자체진단을 하여 보정할 수 있도록 한 것이다.SUMMARY OF THE INVENTION The present invention is to overcome the above-mentioned problems, and includes a chemical solution central supply unit (CCSS) having a valve for quantitatively supplying a chemical solution used in semiconductor manufacturing equipment to a process tank or a mixing tank, and between the chemical solution central supply unit and the valve. Flow rate sensing means connected to the supply line of the control unit, and the control means for receiving the data sensed by the flow rate sensing member and outputs a control signal for controlling the valve, the quantitative supply of the chemical liquid and the adjustment of various ratios as well as quantitative The self-diagnosis of the supply error can be made and corrected.

Description

Supply device for chemical solution for semiconductor device manufacturing

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 종래의 화학용액 공급장치.2 is a conventional chemical solution supply device.

Claims

A quantitative supply device for a chemical liquid comprising a chemical liquid central supply unit (CCSS) having a valve for quantitatively supplying a chemical solution used in semiconductor manufacturing equipment to a process tank or a mixing tank, the supply line between the chemical liquid central supply unit and the valve. A flow rate sensing means connected thereto; And a control means for receiving the data sensed by the flow rate sensing member and outputting a control signal for controlling the valve.

The apparatus of claim 1, wherein the flow rate detecting means uses an ultrasonic flow rate sensor member for detecting a flow rate (supply amount / minute).

The apparatus for quantitative supply of chemical liquid for use in a semiconductor manufacturing process according to claim 1, wherein said control means uses a program logic controller (PLC).

The apparatus of claim 3, wherein the logic control unit adjusts the quantification of the chemical liquid according to a ratio by changing program data.

The apparatus of claim 1, wherein the control unit additionally controls whether or not the wafer transfer robot is transported according to whether the input data value is true or false.

※ Note: The disclosure is based on the initial application.