KR970022516A - Manufacturing method of halftone phase inversion mask - Google Patents
Manufacturing method of halftone phase inversion mask Download PDFInfo
- Publication number
- KR970022516A KR970022516A KR1019950034913A KR19950034913A KR970022516A KR 970022516 A KR970022516 A KR 970022516A KR 1019950034913 A KR1019950034913 A KR 1019950034913A KR 19950034913 A KR19950034913 A KR 19950034913A KR 970022516 A KR970022516 A KR 970022516A
- Authority
- KR
- South Korea
- Prior art keywords
- aperture
- manufacturing
- photoresist film
- mask
- halftone phase
- Prior art date
Links
Abstract
어퍼쳐를 이용한 하프톤 위상반전 마스크의 제조방법에 대해 개시한다.A method of manufacturing a halftone phase shift mask using an aperture is disclosed.
이는, 기판 상에 형성된 위상 쉬프터 및 차광패턴이 형성된 결과물상에 감광막을 도포하는 단계, 감광막상에 어퍼쳐를 얹고, 어퍼쳐를 마스크로하여 소정 부위의 감광막을 노광하는 단계 및 감광막을 현상하는 단계를 포함하여 이루어진다.This method includes applying a photoresist film to a phase shifter and a light shielding pattern formed on a substrate, placing an aperture on the photoresist film, exposing the photoresist film at a predetermined site using the aperture as a mask, and developing the photoresist film. It is made, including.
따라서, 원하는 모양과 사이즈를 조절하여 사용할 수 있는 가변 어퍼쳐를 사용하여 노광함으로써, 공정이 단순하며, 공정시간 및 제조단가를 절감할 수 있다.Therefore, by using a variable aperture that can be used to adjust the desired shape and size, the process is simple, it is possible to reduce the process time and manufacturing cost.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1B도는 본 발명에 의한 하프톤 위상반전 마스크의 제조방법을 설명하기 위하여 공정 순서에 따라 도시한 단면도들,Figure 1B is a cross-sectional view shown in order of the process to explain a method for manufacturing a halftone phase inversion mask according to the present invention,
제2도는 개별 어퍼쳐 및 상기 개별 어퍼쳐들이 조합된 것을 도시한 도면.2 shows an individual aperture and the combination of the individual apertures.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950034913A KR970022516A (en) | 1995-10-11 | 1995-10-11 | Manufacturing method of halftone phase inversion mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950034913A KR970022516A (en) | 1995-10-11 | 1995-10-11 | Manufacturing method of halftone phase inversion mask |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970022516A true KR970022516A (en) | 1997-05-28 |
Family
ID=66582499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950034913A KR970022516A (en) | 1995-10-11 | 1995-10-11 | Manufacturing method of halftone phase inversion mask |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970022516A (en) |
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1995
- 1995-10-11 KR KR1019950034913A patent/KR970022516A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |