KR970019156U - 오존 애셔장치 - Google Patents

오존 애셔장치

Info

Publication number
KR970019156U
KR970019156U KR2019950028278U KR19950028278U KR970019156U KR 970019156 U KR970019156 U KR 970019156U KR 2019950028278 U KR2019950028278 U KR 2019950028278U KR 19950028278 U KR19950028278 U KR 19950028278U KR 970019156 U KR970019156 U KR 970019156U
Authority
KR
South Korea
Prior art keywords
ozone asher
asher
ozone
Prior art date
Application number
KR2019950028278U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950028278U priority Critical patent/KR970019156U/ko
Priority to GB9620608A priority patent/GB2306248B/en
Priority to US08/728,639 priority patent/US5993595A/en
Publication of KR970019156U publication Critical patent/KR970019156U/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/427—Stripping or agents therefor using plasma means only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
KR2019950028278U 1995-10-10 1995-10-10 오존 애셔장치 KR970019156U (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR2019950028278U KR970019156U (ko) 1995-10-10 1995-10-10 오존 애셔장치
GB9620608A GB2306248B (en) 1995-10-10 1996-10-03 An ozone asher
US08/728,639 US5993595A (en) 1995-10-10 1996-10-10 Ozone asher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950028278U KR970019156U (ko) 1995-10-10 1995-10-10 오존 애셔장치

Publications (1)

Publication Number Publication Date
KR970019156U true KR970019156U (ko) 1997-05-26

Family

ID=19425638

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950028278U KR970019156U (ko) 1995-10-10 1995-10-10 오존 애셔장치

Country Status (3)

Country Link
US (1) US5993595A (ko)
KR (1) KR970019156U (ko)
GB (1) GB2306248B (ko)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812201A (en) * 1986-07-25 1989-03-14 Tokyo Electron Limited Method of ashing layers, and apparatus for ashing layers
JPS6332927A (ja) * 1986-07-25 1988-02-12 Tokyo Electron Ltd アツシング装置
JPH0834205B2 (ja) * 1986-11-21 1996-03-29 株式会社東芝 ドライエツチング装置
JPH04230018A (ja) * 1990-12-27 1992-08-19 Orc Mfg Co Ltd ホトレジストの光灰化装置
US5558717A (en) * 1994-11-30 1996-09-24 Applied Materials CVD Processing chamber

Also Published As

Publication number Publication date
GB2306248A (en) 1997-04-30
GB2306248B (en) 2000-01-12
GB9620608D0 (en) 1996-11-20
US5993595A (en) 1999-11-30

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application