KR970018491A - Inductor Device Manufacturing Method - Google Patents

Inductor Device Manufacturing Method Download PDF

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Publication number
KR970018491A
KR970018491A KR1019950030051A KR19950030051A KR970018491A KR 970018491 A KR970018491 A KR 970018491A KR 1019950030051 A KR1019950030051 A KR 1019950030051A KR 19950030051 A KR19950030051 A KR 19950030051A KR 970018491 A KR970018491 A KR 970018491A
Authority
KR
South Korea
Prior art keywords
conductors
inductor
intermediate insulating
manufacturing
inductor device
Prior art date
Application number
KR1019950030051A
Other languages
Korean (ko)
Inventor
강승원
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950030051A priority Critical patent/KR970018491A/en
Publication of KR970018491A publication Critical patent/KR970018491A/en

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  • Semiconductor Integrated Circuits (AREA)

Abstract

본 발명은 반도체 제작공정으로 구현될 수 있는 반도체 회로의 인덕터 소자 제조방법에 관한 것으로 특히, 실리콘 기판상에 1, 2차 도전체를 형성화되, 양 도전체 사이에 중간 절연막을 위치시키고 양 도전체가 상호 엇갈려 연결되도록 중간 절연말의 상단에 콘택홀을 형성한 인덕터 소자 제조방법에 관한 것으로, 반도체의 제반공정을 도입하여 실리콘 칩안에 형성될 수 있는 반도체 회로의 인덕터구조가 구현될 수 있음에 착안되어 신뢰도가 높은 인덕터를 구현함으로서 응용회로를 운용하는데 따른 비용 및 부피의 최소화를 달성하는 인덕터 소자제조방법을 제공하는 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an inductor element of a semiconductor circuit that can be implemented by a semiconductor fabrication process. In particular, primary and secondary conductors are formed on a silicon substrate, and an intermediate insulating film is disposed between both conductors. The present invention relates to a method for manufacturing an inductor device in which contact holes are formed on top of an intermediate insulating layer so as to cross each other, and an inductor structure of a semiconductor circuit that can be formed in a silicon chip can be realized by introducing various processes of a semiconductor. By providing a highly reliable inductor, the present invention provides a method of manufacturing an inductor device which achieves minimization of cost and volume for operating an application circuit.

Description

인덕터 소자 제조방법Inductor Device Manufacturing Method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도와 (A), (B)는 본 발명에 의해 제1도전체가 형성된 평면도 및 측면도.1 and (A) and (B) are a plan view and a side view in which a first conductor is formed according to the present invention.

Claims (1)

반도체 기판상에 충분히 낮은 저항률을 갖고, 상호 일정 간격을 유지한 다수의 박막형 제1도전체를 길이 방향으로 형성하는 제1단계; 상기 다수의 박막형 제1도전체를 중간 절연막으로 덮는 제2단계; 상기 다수의 박막형 제1도전체의 양 끝단부가 노출되므로 상기 중간 절연막에 콘택홀을 형성하는 제3단계; 및 하나의 제1도전체의 일단과 인접하는 다른 제1도전체에의 타단이 연결되도록 상호 일정간격을 유지한 다수의 박막형 제2도전체를 경사방향으로 상기 중간 절연막상에 형성하는 제4단계를 구비한 것을 특징으로 인덕터 소자 제조방법.A first step of forming a plurality of thin film type first conductors having a sufficiently low resistivity on the semiconductor substrate and having a predetermined distance therebetween in a longitudinal direction; A second step of covering the plurality of thin film first conductors with an intermediate insulating film; A third step of forming contact holes in the intermediate insulating layer because both ends of the plurality of thin film first conductors are exposed; And a fourth step of forming a plurality of thin film type second conductors having a constant distance therebetween such that one end of one first conductor and the other end of the other first conductor are connected to each other on the intermediate insulating film in an oblique direction. Inductor device manufacturing method characterized in that it comprises.
KR1019950030051A 1995-09-14 1995-09-14 Inductor Device Manufacturing Method KR970018491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950030051A KR970018491A (en) 1995-09-14 1995-09-14 Inductor Device Manufacturing Method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950030051A KR970018491A (en) 1995-09-14 1995-09-14 Inductor Device Manufacturing Method

Publications (1)

Publication Number Publication Date
KR970018491A true KR970018491A (en) 1997-04-30

Family

ID=66615737

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950030051A KR970018491A (en) 1995-09-14 1995-09-14 Inductor Device Manufacturing Method

Country Status (1)

Country Link
KR (1) KR970018491A (en)

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