KR970018491A - Inductor Device Manufacturing Method - Google Patents
Inductor Device Manufacturing Method Download PDFInfo
- Publication number
- KR970018491A KR970018491A KR1019950030051A KR19950030051A KR970018491A KR 970018491 A KR970018491 A KR 970018491A KR 1019950030051 A KR1019950030051 A KR 1019950030051A KR 19950030051 A KR19950030051 A KR 19950030051A KR 970018491 A KR970018491 A KR 970018491A
- Authority
- KR
- South Korea
- Prior art keywords
- conductors
- inductor
- intermediate insulating
- manufacturing
- inductor device
- Prior art date
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- Coils Or Transformers For Communication (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
본 발명은 반도체 제작공정으로 구현될 수 있는 반도체 회로의 인덕터 소자 제조방법에 관한 것으로 특히, 실리콘 기판상에 1, 2차 도전체를 형성화되, 양 도전체 사이에 중간 절연막을 위치시키고 양 도전체가 상호 엇갈려 연결되도록 중간 절연말의 상단에 콘택홀을 형성한 인덕터 소자 제조방법에 관한 것으로, 반도체의 제반공정을 도입하여 실리콘 칩안에 형성될 수 있는 반도체 회로의 인덕터구조가 구현될 수 있음에 착안되어 신뢰도가 높은 인덕터를 구현함으로서 응용회로를 운용하는데 따른 비용 및 부피의 최소화를 달성하는 인덕터 소자제조방법을 제공하는 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an inductor element of a semiconductor circuit that can be implemented by a semiconductor fabrication process. In particular, primary and secondary conductors are formed on a silicon substrate, and an intermediate insulating film is disposed between both conductors. The present invention relates to a method for manufacturing an inductor device in which contact holes are formed on top of an intermediate insulating layer so as to cross each other, and an inductor structure of a semiconductor circuit that can be formed in a silicon chip can be realized by introducing various processes of a semiconductor. By providing a highly reliable inductor, the present invention provides a method of manufacturing an inductor device which achieves minimization of cost and volume for operating an application circuit.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도와 (A), (B)는 본 발명에 의해 제1도전체가 형성된 평면도 및 측면도.1 and (A) and (B) are a plan view and a side view in which a first conductor is formed according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950030051A KR970018491A (en) | 1995-09-14 | 1995-09-14 | Inductor Device Manufacturing Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950030051A KR970018491A (en) | 1995-09-14 | 1995-09-14 | Inductor Device Manufacturing Method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970018491A true KR970018491A (en) | 1997-04-30 |
Family
ID=66615737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950030051A KR970018491A (en) | 1995-09-14 | 1995-09-14 | Inductor Device Manufacturing Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970018491A (en) |
-
1995
- 1995-09-14 KR KR1019950030051A patent/KR970018491A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |