KR970018084A - Shadow Mask with bump contact prevention groove - Google Patents
Shadow Mask with bump contact prevention groove Download PDFInfo
- Publication number
- KR970018084A KR970018084A KR1019950033391A KR19950033391A KR970018084A KR 970018084 A KR970018084 A KR 970018084A KR 1019950033391 A KR1019950033391 A KR 1019950033391A KR 19950033391 A KR19950033391 A KR 19950033391A KR 970018084 A KR970018084 A KR 970018084A
- Authority
- KR
- South Korea
- Prior art keywords
- shadow mask
- bumps
- substrate
- area
- regions
- Prior art date
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- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
본 발명은 서로 다른 적층구조의 범프들이 형성될 기판상의 영역들을 선택적으로 노출시키는 섀도우 마스크에 있어서, 선택적으로 형성될 범프가 위치할 기판상의 영역에 해당하는 영역에는 홀이 형성되어 있고, 선택적으로 형성된 범프가 위치한 기판상의 영역에 해당하는 영역에는 홈이 형성되어 있어 기 형성된 범프와 접촉되지 않고도 기 형성된 범프의 적층구조와는 상이한 적층구조를 갖는 범프를 기판상의 소정의 영역에 형성할 수 있음으로써 기 형성된 범프의 손상을 방지할 수 있다.The present invention provides a shadow mask for selectively exposing regions on a substrate on which bumps of different stacked structures are to be formed, wherein holes are formed in regions corresponding to the regions on the substrate where the bumps to be selectively formed are to be located, and selectively formed. Grooves are formed in an area corresponding to the area on the substrate where the bumps are located, so that bumps having a different stacking structure from those of the formed bumps can be formed in a predetermined area on the substrate without being in contact with the formed bumps. Damage to the formed bumps can be prevented.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1(A)도 내지 제1(G)도는 본 발명에 의한 범프(bump) 접촉방지용 홈이 형성된 섀도우 마스크(Shadow Mask)를 이용하여 상이한 적층 구조의 범프를 형성하는 것을 나타낸 공정도이다.1 (A) to 1 (G) are process drawings showing the formation of bumps of different laminated structures using a shadow mask in which bump contact preventing grooves according to the present invention are formed.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950033391A KR970018084A (en) | 1995-09-30 | 1995-09-30 | Shadow Mask with bump contact prevention groove |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950033391A KR970018084A (en) | 1995-09-30 | 1995-09-30 | Shadow Mask with bump contact prevention groove |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970018084A true KR970018084A (en) | 1997-04-30 |
Family
ID=66582414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950033391A KR970018084A (en) | 1995-09-30 | 1995-09-30 | Shadow Mask with bump contact prevention groove |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970018084A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101218115B1 (en) * | 2005-07-26 | 2013-01-18 | 주성엔지니어링(주) | Shadow mask and method of depositing thin film using the same |
-
1995
- 1995-09-30 KR KR1019950033391A patent/KR970018084A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101218115B1 (en) * | 2005-07-26 | 2013-01-18 | 주성엔지니어링(주) | Shadow mask and method of depositing thin film using the same |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |