KR970018084A - Shadow Mask with bump contact prevention groove - Google Patents

Shadow Mask with bump contact prevention groove Download PDF

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Publication number
KR970018084A
KR970018084A KR1019950033391A KR19950033391A KR970018084A KR 970018084 A KR970018084 A KR 970018084A KR 1019950033391 A KR1019950033391 A KR 1019950033391A KR 19950033391 A KR19950033391 A KR 19950033391A KR 970018084 A KR970018084 A KR 970018084A
Authority
KR
South Korea
Prior art keywords
shadow mask
bumps
substrate
area
regions
Prior art date
Application number
KR1019950033391A
Other languages
Korean (ko)
Inventor
장동현
이영민
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950033391A priority Critical patent/KR970018084A/en
Publication of KR970018084A publication Critical patent/KR970018084A/en

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Abstract

본 발명은 서로 다른 적층구조의 범프들이 형성될 기판상의 영역들을 선택적으로 노출시키는 섀도우 마스크에 있어서, 선택적으로 형성될 범프가 위치할 기판상의 영역에 해당하는 영역에는 홀이 형성되어 있고, 선택적으로 형성된 범프가 위치한 기판상의 영역에 해당하는 영역에는 홈이 형성되어 있어 기 형성된 범프와 접촉되지 않고도 기 형성된 범프의 적층구조와는 상이한 적층구조를 갖는 범프를 기판상의 소정의 영역에 형성할 수 있음으로써 기 형성된 범프의 손상을 방지할 수 있다.The present invention provides a shadow mask for selectively exposing regions on a substrate on which bumps of different stacked structures are to be formed, wherein holes are formed in regions corresponding to the regions on the substrate where the bumps to be selectively formed are to be located, and selectively formed. Grooves are formed in an area corresponding to the area on the substrate where the bumps are located, so that bumps having a different stacking structure from those of the formed bumps can be formed in a predetermined area on the substrate without being in contact with the formed bumps. Damage to the formed bumps can be prevented.

Description

범프(bump) 접촉 방지용 홈이 형성된 섀도우 마스크(Shadow Mask)Shadow Mask with bump contact prevention groove

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1(A)도 내지 제1(G)도는 본 발명에 의한 범프(bump) 접촉방지용 홈이 형성된 섀도우 마스크(Shadow Mask)를 이용하여 상이한 적층 구조의 범프를 형성하는 것을 나타낸 공정도이다.1 (A) to 1 (G) are process drawings showing the formation of bumps of different laminated structures using a shadow mask in which bump contact preventing grooves according to the present invention are formed.

Claims (3)

서로 다른 적층구조의 범프들이 형성될 기판상의 영역들을 선택적으로 노출시키는 섀도우 마스크에 있어서, 상기 선택적으로 노출되는, 범프가 위치하는 기판상의 영역에 도금층이 형성되도록 하기 위해 홀이 상기 선택적으로 노출되는 범프에 해당하는 상기 섀도우 마스크의 영역에 형성되어 있고, 선택적으로 노출되지 않는, 범프가 위치하는 기판상의 영역에 기 도금된 층과 접촉되지 않도록 하기 위해 홈이 상기 선택적으로 노출되지 않는, 범퍼의 위치에 해당하는 상기 섀도우 마스크의 영역에 형성되어 있는 범프 접촉방지용 홈이 형성된 섀도우 마스크.A shadow mask for selectively exposing regions on a substrate on which bumps of different stacks are to be formed, wherein the bumps through which holes are selectively exposed to allow the plating layer to be formed in the regions on the substrate where the bumps are located are selectively exposed. At the location of the bumper, in which the groove is not selectively exposed, so as not to contact the pre-plated layer in the area on the substrate where the bump is located, which is formed in the area of the shadow mask corresponding to A shadow mask having bump contact preventing grooves formed in a corresponding area of the shadow mask. 제1항에 있어서, 상기 섀도우 마스크는 박막의 금속판 표면에 비전도성 물질이 형성된 것을 특징으로 하는 범프 접착방지용 홈이 형성된 섀도우 마스크.The shadow mask of claim 1, wherein the shadow mask is formed with a non-conductive material formed on a surface of the metal plate of the thin film. 제1항에 있어서, 상기 섀도우 마스크는 실리콘 고무로 이루어진 것을 특징으로 하는 범프 접착방지용 홈이 형성된 섀도우 마스크.2. The shadow mask of claim 1, wherein the shadow mask is made of silicone rubber. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950033391A 1995-09-30 1995-09-30 Shadow Mask with bump contact prevention groove KR970018084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950033391A KR970018084A (en) 1995-09-30 1995-09-30 Shadow Mask with bump contact prevention groove

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950033391A KR970018084A (en) 1995-09-30 1995-09-30 Shadow Mask with bump contact prevention groove

Publications (1)

Publication Number Publication Date
KR970018084A true KR970018084A (en) 1997-04-30

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ID=66582414

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950033391A KR970018084A (en) 1995-09-30 1995-09-30 Shadow Mask with bump contact prevention groove

Country Status (1)

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KR (1) KR970018084A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101218115B1 (en) * 2005-07-26 2013-01-18 주성엔지니어링(주) Shadow mask and method of depositing thin film using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101218115B1 (en) * 2005-07-26 2013-01-18 주성엔지니어링(주) Shadow mask and method of depositing thin film using the same

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