KR970015795A - Crystal fuller - Google Patents

Crystal fuller Download PDF

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Publication number
KR970015795A
KR970015795A KR1019960041961A KR19960041961A KR970015795A KR 970015795 A KR970015795 A KR 970015795A KR 1019960041961 A KR1019960041961 A KR 1019960041961A KR 19960041961 A KR19960041961 A KR 19960041961A KR 970015795 A KR970015795 A KR 970015795A
Authority
KR
South Korea
Prior art keywords
crystal
container
protective gas
heater
puller
Prior art date
Application number
KR1019960041961A
Other languages
Korean (ko)
Other versions
KR100220118B1 (en
Inventor
슐만 윈프리이드
슈흘러 요한
Original Assignee
피터 좀머캄프, 하랄드 하게돈
발제르스 운트 레이볼드 도이치란드 홀딩 앗크티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 피터 좀머캄프, 하랄드 하게돈, 발제르스 운트 레이볼드 도이치란드 홀딩 앗크티엔게젤샤프트 filed Critical 피터 좀머캄프, 하랄드 하게돈
Publication of KR970015795A publication Critical patent/KR970015795A/en
Application granted granted Critical
Publication of KR100220118B1 publication Critical patent/KR100220118B1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

포트(4)에서 용융가능한 재료로부터 크리스털 블록을 형성하기 위한 크리스털 풀러는 용기(1)에서 상기 포트(4)를 에워싸는 히터(5)를 갖는다. 이 용기(1)는 상기 포트(4)의 영역에서 내측 보호관(6)에 의해 히터(5)를 향해 제한된, 상기 보호 가스 아웃렛(14, 15)과 연결되어 있는 원형 공간(8)을 가지며, 이것은 외측에서 외측 보호관(7)에 의해 제한되며, 이 뒤에 상기 용기(1)의 열전열물(10)이 위치한다.The crystal puller for forming the crystal block from the meltable material in the port 4 has a heater 5 which encloses the port 4 in the container 1. The vessel 1 has a circular space 8 connected with the protective gas outlets 14, 15, which is limited towards the heater 5 by an inner protective tube 6 in the region of the port 4, This is constrained by the outer protective tube 7 on the outside, followed by the heat transfer 10 of the container 1.

Description

크리스털 풀러Crystal fuller

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (4)

포트에서 용융가능한 재료로부터 크리스털 블록을 형성하기 위해, 상기 포트가 히터에 의해 감싸여 용기에 배열되며, 그의 벽이 열전연물을 구비하며 또한 외측에서는 냉각 매체를 위한 냉각 채널을 구비하며, 상기 용기가 적어도 하나의 보호 가스 인렛과 보호 가스 아웃렛을 가지는 크리스털 풀러에 있어서,상기 용기(1)가 상기 포트(4)의 영역에서 내측 보호관(6)에 의해 히터(5)를 향해 경계를 이루는 보호 가스 인렛(14, 15)과 연결되어 있는 원형 공간(8)을 가지며, 이것은 외측에서 외측 보호관(7)에 의해 제한되며, 이것 뒤에 상기 용기(1)의 열전열물(10)이 위치하는 것을 특징으로 하는 크리스털 풀러.In order to form a crystal block from the meltable material in the pot, the port is wrapped in a heater and arranged in a container, the wall of which has a thermoelectric material and on the outside with a cooling channel for the cooling medium, In a crystal puller having at least one protective gas inlet and protective gas outlet, a protective gas inlet in which the vessel 1 is bounded towards the heater 5 by an inner protective tube 6 in the region of the port 4. It has a circular space (8) connected to (14, 15), which is limited by the outer protective tube (7) from the outside, after which the heat-transfer material (10) of the container (1) is located. Crystal Fuller. 제1항에 있어서, 상기 원형 공간(8)은 스크린 판(9)의 하측 정면에서 경계를 이루고, 이 스크린 판에 의해 상기 보호 가스 아웃렛(14, 15)에 대한 연결이 이루어지는 것을 특징으로 하는 크리스털 풀러.Crystal according to claim 1, characterized in that the circular space (8) is bounded at the lower front of the screen plate (9), by means of which the connection to the protective gas outlets (14, 15) is made. Puller. 제1항에 있어서, 상기 용기(1)는 그의 바닥(16)에서 상기 용기(1)에 대해 동축으로 향해있는, 서로 마주하는 2개의 보호가스 아웃렛(14, 15)을 갖는 것을 특징으로 하는 크리스털 풀러.Crystal according to claim 1, characterized in that the container (1) has two protective gas outlets (14, 15) facing each other, coaxially directed with respect to the container (1) at its bottom (16). Puller. 전술한 항 중 한 항에 있어서, 상기 내측 보호관(6)은 위를 향해 상기 히터(5)의 상측 가장자리까지 도달하는 것을 특징으로 하는 크리스털 풀러.Crystal puller according to one of the preceding claims, characterized in that the inner sheath (6) reaches upwards to the upper edge of the heater (5). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960041961A 1995-09-26 1996-09-24 Crystal pulling apparatus KR100220118B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19535750 1995-09-26
DE19535750.7 1995-09-26

Publications (2)

Publication Number Publication Date
KR970015795A true KR970015795A (en) 1997-04-28
KR100220118B1 KR100220118B1 (en) 1999-09-01

Family

ID=7773204

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960041961A KR100220118B1 (en) 1995-09-26 1996-09-24 Crystal pulling apparatus

Country Status (2)

Country Link
KR (1) KR100220118B1 (en)
DE (2) DE19539316A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19780188B4 (en) * 1996-02-08 2006-03-30 Sumitomo Mitsubishi Silicon Corp. Method and device for producing single crystals
DE10119947A1 (en) * 2001-04-24 2002-10-31 Crystal Growing Systems Gmbh Method for controlling a crystal pulling system and crystal pulling system for carrying it out
DE102020128225A1 (en) * 2019-10-28 2021-04-29 Pva Tepla Ag Crystal pulling system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2821481C2 (en) * 1978-05-17 1985-12-05 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Device for pulling high-purity semiconductor rods from the melt
JPH0388794A (en) * 1989-08-31 1991-04-15 Nippon Steel Corp Method and device for pulling up silicon single crystal
EP0530397A1 (en) * 1991-09-04 1993-03-10 Kawasaki Steel Corporation Czochralski crystal pulling process and an apparatus for carrying out the same
JPH06293589A (en) * 1993-04-06 1994-10-21 Kawasaki Steel Corp Apparatus for growing single crystal

Also Published As

Publication number Publication date
DE59601759D1 (en) 1999-06-02
KR100220118B1 (en) 1999-09-01
DE19539316A1 (en) 1997-03-27

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