KR970012985A - HMDS automatic supply device used in the manufacture of semiconductor devices - Google Patents

HMDS automatic supply device used in the manufacture of semiconductor devices Download PDF

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Publication number
KR970012985A
KR970012985A KR1019950028485A KR19950028485A KR970012985A KR 970012985 A KR970012985 A KR 970012985A KR 1019950028485 A KR1019950028485 A KR 1019950028485A KR 19950028485 A KR19950028485 A KR 19950028485A KR 970012985 A KR970012985 A KR 970012985A
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KR
South Korea
Prior art keywords
hmds
buffer tank
automatic supply
supply device
pressurizer
Prior art date
Application number
KR1019950028485A
Other languages
Korean (ko)
Inventor
백점곤
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950028485A priority Critical patent/KR970012985A/en
Publication of KR970012985A publication Critical patent/KR970012985A/en

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  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

본 발명은 반도체 장치의 제조에 사용되는 HMDS 자동공급 장치에 관해 개시한다. 항온조절기와 정압기를 추가로 설치하여 버퍼탱크의 내압과 온도를 유지함으로 베이퍼 상태의 HMDS를 균일하게 웨이퍼 표면에 분사할 수 있다. 또한 콘트롤박스에 터치 스크린을 설치하여 유량감지장치와 각종 제어장치의 작동 상태를 확인 및 제어할 수 있고, 또 버퍼탱크와 메인탱크간 유량 공급 조건을 제어하고 버퍼탱크의 유량에 따른 프로세스 챔버의 작동을 제어한다. 또한 경보 기능도 갖추고 있어서 작업효율을 높일 수 있다.The present invention discloses an HMDS auto feeding device used in the manufacture of semiconductor devices. An additional thermostat and a constant pressure regulator are installed to maintain the internal pressure and temperature of the buffer tank so that the vaporized HMDS can be uniformly sprayed onto the wafer surface. In addition, by installing a touch screen on the control box, it is possible to check and control the operation status of the flow sensing device and various control devices, control the flow supply conditions between the buffer tank and the main tank, and operate the process chamber according to the flow rate of the buffer tank. To control. It also has an alarm function to increase the work efficiency.

Description

반도체 장치의 제조에 사용되는 에이취엠디에스(HMDS)자동 공급 장치HMDS automatic supply device used in the manufacture of semiconductor devices

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 의한 에이취엠디에스(HMDS) 자동공급 장치의 개략도이다.2 is a schematic diagram of a HMDS automatic supply apparatus according to the present invention.

제3도는 상기 제2도에 도시한 에이취엠디에스(HMDS) 자동공급 장치중 콘트롤박스의 개략도이다.3 is a schematic diagram of a control box of the HMDS automatic supply device shown in FIG.

Claims (10)

HMDS 외부 공급관과 제1가압기를 부착한 메인탱크; 상기 메인탱크에 연결되고 제2가압기를 부착하며, HMDS 저장량을 5단계로 나누어 측량할 수 있는 버퍼탱크; 및 상기 버퍼탱크를 내부에 설치하고 항온조절기, 플로우메타, 에어밸브, 이그조스트, 유량감지장치로 구성된 콘트롤박스를 구비하는 것을 특징으로 하는 HMDS 자동공급 장치.A main tank to which an HMDS external supply pipe and a first pressurizer are attached; A buffer tank connected to the main tank and attached to a second pressurizer, the buffer tank capable of dividing the HMDS storage into five levels; And a control box installed inside the buffer tank, the control box including a thermostat, a flow meter, an air valve, an egest jot, and a flow rate sensing device. 제1항에 있어서, 상기 제1가압기는 메인탱크의 내압을 일정하게 유지하기 위한 정압기를 더 구비하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic supply device of claim 1, wherein the first pressurizer further comprises a constant pressure regulator for maintaining a constant internal pressure of the main tank. 제1항에 있어서, 상기 제1가압기는 질소(N2) 개스를 이용하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic feeding device of claim 1, wherein the first pressurizer uses nitrogen (N2) gas. 제1항에 있어서, 상기 항온조절기는 상기 버퍼탱크내의 온도편차를 ±0.1℃ 이내로 유지하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic supply device of claim 1, wherein the thermostat maintains a temperature deviation within the buffer tank within ± 0.1 ° C. 제1항에 있어서, 상기 버퍼탱크에는 3개 이하의 프로세스 챔버가 연결되어 있는 것을 특징으로 하는 HMDS 자동공급 장치.According to claim 1, HMDS automatic supply apparatus characterized in that three or less process chambers are connected to the buffer tank. 제1항에 있어서, 상기 제2가압기는 버퍼탱크의 압력을 일정하게 유지할 수 있는 정압기를 더 구비하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic supply device of claim 1, wherein the second pressurizer further comprises a constant pressure regulator capable of maintaining a constant pressure in the buffer tank. 제1항에 있어서, 상기 제2가압기 질소(N2) 개스를 사용하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic feeding device according to claim 1, wherein said second pressurizer nitrogen (N2) gas is used. 제1항에 있어서, 상기 콘트롤박스는 상기 유량감지장치의 작동상태를 보여주고 제어할 수 있는 터치스크린을 더 구비하는 것을 특징으로 하는 HMDS 자동공급 장치.The method of claim 1, wherein the control box is HMDS automatic supply device further comprises a touch screen for displaying and controlling the operating state of the flow rate sensor. 제1항에 있어서, 상기 콘트롤박스는 PLC(Programmable Logic Controller)를 이용하여 상기 유량감지장치를 제어하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic supply device of claim 1, wherein the control box controls the flow rate sensing device by using a programmable logic controller (PLC). 제1항에 있어서, 상기 유량감지장치는 윷의 굴절각을 이용한 광센서로 구성하는 것을 특징으로 하는 HMDS 자동공급 장치.The HMDS automatic supply device according to claim 1, wherein the flow rate sensing device comprises an optical sensor using a refractive angle of 윷.
KR1019950028485A 1995-08-31 1995-08-31 HMDS automatic supply device used in the manufacture of semiconductor devices KR970012985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950028485A KR970012985A (en) 1995-08-31 1995-08-31 HMDS automatic supply device used in the manufacture of semiconductor devices

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Application Number Priority Date Filing Date Title
KR1019950028485A KR970012985A (en) 1995-08-31 1995-08-31 HMDS automatic supply device used in the manufacture of semiconductor devices

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KR970012985A true KR970012985A (en) 1997-03-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100505060B1 (en) * 1998-02-11 2005-10-19 삼성전자주식회사 Drug supply system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100505060B1 (en) * 1998-02-11 2005-10-19 삼성전자주식회사 Drug supply system

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